Vacuum Value

Water Cooled and Temperature Controlled High Vacuum Gate Valve

Water Cooled and Temperature Controlled High Vacuum Gate Valve

This high-performance water-cooled and temperature-controlled high vacuum gate valve is engineered for demanding applications requiring extreme vacuum levels and precise thermal regulation. Featuring a robust die-cast construction, it supports temperatures up to 200°C while maintaining superior airtight integrity. Perfectly suited for semiconductor manufacturing, vacuum coating, and research environments, this valve offers flexible installation, long-term reliability, and seamless compatibility with molecular pumps.

Inquire Now

Product Details

This high-performance Water-cooled / Temperature-controlled High Vacuum Gate Valve is a specialized vacuum isolation device designed for ultra-high vacuum environments, extreme high-temperature conditions, and precision temperature control requirements. Utilizing a high-pressure vacuum die-casting gate structure, this high vacuum gate valve is suitable for the full range from ultra-high vacuum (5×10⁻⁸ Pa) to atmospheric pressure (1×10⁵ Pa).

Engineered for specialized industrial processes, it realizes reliable vacuum isolation and temperature management. With advantages such as high-temperature resistance, superior heat insulation/dissipation, high airtightness, and flexible installation, it is widely used in semiconductor heat treatment, vacuum coating, high-temperature experimental apparatus, and specialized industrial vacuum system components.

Core Features

Dual Temperature Control Options: Available in Water-cooled (DN25~350) and Temperature-controlled (DN25~350) versions, customizable to meet specific thermal management needs.
High-Pressure Vacuum Die-Casting: Constructed with high-pressure vacuum die-casting technology for high strength, corrosion resistance, and excellent mechanical performance, making it compatible with imported molecular pumps.
Thermal Insulation Design: Optional temperature controllers and thermocouples ensure uniform heating and excellent insulation, effectively preventing heat transfer to the valve body and seals.
Pneumatic Double-Acting Drive: Provides stable and reliable operation, supporting seamless integration into automated production lines for continuous industrial processes.
Superior Airtightness: The specialized sealing structure ensures the vacuum isolation remains intact even under instantaneous high temperatures of up to 200°C.
Versatile Installation: Supports installation at any angle, saving valuable equipment space and adapting to compact or complex vacuum system layouts.

Technical Specifications

Port Diameter (DN)	Main Features	Actuator Type	Example Model
DN25 ~ 50	Water-cooled	Pneumatic, Double-acting	VAvat-A1313-12-DN25~50
DN60 ~ 350	Water-cooled	Pneumatic, Double-acting	VAvat-A1313-32-DN60~350
DN25 ~ 50	Temp-controlled	Pneumatic, Double-acting	VAvat-A1413-12-DN25~50
DN60 ~ 350	Temp-controlled	Pneumatic, Double-acting	VAvat-A1413-32-DN60~350

Application Fields

Our pneumatic vacuum valves are essential for several high-tech sectors:

Semiconductor Heat Treatment: Ideal for wafer processing and annealing where high-temperature vacuum isolation is critical for process stability.
Vacuum Coating Systems: Facilitates heat dissipation in high-temperature coating processes, protecting equipment longevity and coating quality.
High-Temperature Experimental Apparatus: Used in research laboratories and material testing facilities for precise temperature control under vacuum.
Specialized Industrial Vacuum Systems: Handles systems involving process gases and extreme heat, ensuring safe and isolated operation.

Why Choose This Valve?

Molecular Pump Friendly: The high-pressure die-casting material ensures no risk of contamination, allowing it to work perfectly with imported molecular pumps, thereby extending the service life of both the pump and the valve.

200°C High-Temperature Resistance: Capable of withstanding instantaneous temperatures up to 200°C without affecting the sealing integrity, ensuring reliability in the harshest environments.

Precision Thermal Management: Uniform heating and excellent insulation properties allow for effective heat source isolation. The temperature-controlled models offer precise monitoring via thermocouples for stable, quiet operation.

Durability and Quiet Operation: The unique mechanical structure is designed for a long service life with minimal noise, providing a stable solution for any vacuum layout.

Frequently Asked Questions

1. What is the primary use of this valve?

It is specifically designed for vacuum isolation in special working conditions, particularly where high temperatures or precise thermal control are required.

2. What temperature control types are available?

We offer two main types: Water-cooled (for heat dissipation) and Temperature-controlled (for precise heat management via controllers and thermocouples).

3. Can it be installed vertically or horizontally?

Yes, it supports installation at any angle, making it highly adaptable to various system configurations.

4. Is it compatible with molecular pumps?

Absolutely. The materials and manufacturing process ensure it is safe for use with high-end imported molecular pumps without the risk of outgassing or contamination.

Conclusion：The Water-cooled / Temperature-controlled High Vacuum Gate Valve is Suitable for semiconductor manufacturing, high-temperature research, and precision vacuum coating industries. The core advantage is its ability to maintain high-vacuum integrity under 200°C temperatures while offering customizable water or electric thermal management for extended equipment life.

Tags :