High Vacuum Rectangular Gate Valve for Semiconductor and Coating Systems

This high-performance High Vacuum Rectangular Valve is a specialized vacuum isolation and transmission device designed for ultra-high vacuum (UHV) environments, rectangular chamber isolation, and high-cleanliness industrial conditions. Featuring a rectangular port and a linear opening/closing mechanism, it is engineered for the full pressure range from 5×10⁻⁸ Pa to 1×10⁵ Pa. This valve enables rapid connection and hermetic isolation between rectangular vacuum chambers and process rooms. With its low particle generation, compact structure, and stable dynamic balance, it serves as the core isolation component for vacuum coating, semiconductor manufacturing, and scientific research apparatus.

Core Features & Advantages

• Optimized Rectangular Port: Perfectly matches rectangular vacuum chambers and process cells, ensuring seamless high-vacuum isolation without the need for redundant adapters.
• Pneumatic Double-Acting Drive: Equipped with a robust pneumatic actuator, with optional solenoid valves for full automation and integration into complex production lines.
• Dual Sealing Solutions: Choose between Viton/Rubber O-ring sealing or Bellows sealing to meet specific vacuum levels and cleanliness requirements.
• Premium Material Customization: The valve body is available in high-grade aviation aluminum or stainless steel, offering low outgassing rates and excellent corrosion resistance.
• Full Scalability: We support complete dimensional customization, including optional water-cooling jackets and temperature control modules for specialized thermal processes.
• Wide Operational Range: Maintains stable switching performance from ultra-high vacuum levels up to atmospheric pressure.

Technical Specifications

Primary Application Fields

1. High Vacuum Chamber Isolation: Standard universal rectangular valve for controlling flow and isolation in various high-vacuum systems.
2. Semiconductor Production Systems: Ideal for process and transfer chamber isolation where high cleanliness and low particle counts are critical.
3. Vacuum Coating Equipment: Used in rectangular coating chambers and continuous coating lines for precise vacuum sectioning.
4. Scientific Research: Essential for surface analysis, material laboratories, and UHV rectangular piping systems.
5. Vacuum Furnaces & Heat Treatment: Reliable isolation for rectangular thermal processing equipment and vacuum pipelines.
6. Customized Vacuum Solutions: Tailored for non-standard rectangular ports and specialized industrial process requirements.

Why Choose Our Rectangular Valve?

The core advantage of our valve lies in its Rectangular Adaptation + Compact Design + Low Particle Generation + Stable Dynamic Balance. Unlike traditional circular valves, this design fits rectangular chambers perfectly, reducing the system footprint and simplifying installation. It is the preferred choice for industries demanding high stability and cleanliness.

• Compact & User-Friendly: The streamlined design ensures easy installation and maintenance within tight spatial constraints.
• Stable Dynamic Performance: The overall dynamic balance is optimized for smooth, vibration-free operation, ensuring long-term reliability.
• Low Maintenance: Designed for minimal particle shedding and easy servicing, making it suitable for the most sensitive cleanroom environments.

Frequently Asked Questions (FAQ)