Our High Vacuum Linear Actuator is a precision-engineered drive solution designed for UHV systems, semiconductor wafer handling, and automated vacuum processes. Featuring a robust aerospace-grade aluminum construction, customizable stroke lengths (63mm to 800mm), and reliable rubber-sealed vacuum integrity, it offers stable, vibration-free operation. Available in pneumatic, solenoid-controlled, and electric configurations to meet diverse industrial automation requirements.

Our high vacuum gate valves are engineered for demanding applications including semiconductor manufacturing and harsh industrial environments. With options for pneumatic or manual operation, multiple flange standards (ISO-F, CF-F, etc.), and superior sealing technology, these valves provide a friction-free, particle-free, and highly reliable solution for critical vacuum system isolation and protection.

Engineered for the most demanding semiconductor and ultra-high vacuum (UHV) environments, our all-metal vacuum valves provide a particle-free, high-sealing solution. With advanced axial metal sealing, CF flange compatibility, and optional thermal control, these valves are the industry standard for preventing contamination and ensuring system integrity in critical vacuum applications.

Our high-vacuum fast-acting protection valve is engineered for critical applications in semiconductor processing and chip manufacturing. Featuring rapid pneumatic response, robust axial sealing, and multi-material construction (aluminum/stainless steel), this valve provides reliable emergency shut-off and contamination control for high-vacuum systems ranging from 5×10⁻⁸ Pa to 1×10⁵ Pa.

Our Ultra High Vacuum Gate Valves provide reliable, low-maintenance isolation for UHV systems. Featuring a compact rail-guided design, metal bellows or O-ring sealing, and versatile drive options (manual/pneumatic/solenoid), these valves are ideal for semiconductor, research, and industrial vacuum applications requiring superior sealing and long-term stability.

Our mini ultra-high vacuum gate valves are engineered for precision, reliability, and space-saving performance in demanding vacuum systems. Available in aluminum or stainless steel with versatile drive options and standard CF/ISO-KF flanges, these valves ensure excellent airtight integrity for semiconductor, analytical, and research applications.

This mini high vacuum gate valve is an ultra-compact, cost-effective solution for small-scale vacuum systems. Engineered with aerospace-grade aluminum and standard ISO-KF flanges, it offers superior sealing performance, stable operation, and versatile manual or pneumatic drive options, making it ideal for research labs, analytical instruments, and semiconductor micro-vacuum applications.

This high-performance water-cooled and temperature-controlled high vacuum gate valve is engineered for demanding applications requiring extreme vacuum levels and precise thermal regulation. Featuring a robust die-cast construction, it supports temperatures up to 200°C while maintaining superior airtight integrity. Perfectly suited for semiconductor manufacturing, vacuum coating, and research environments, this valve offers flexible installation, long-term reliability, and seamless compatibility with molecular pumps.

This manual high vacuum gate valve is a precision-engineered solution for ultra-high vacuum systems. Built with lightweight, corrosion-resistant aluminum alloy, it offers reliable sealing, flexible installation at any angle, and optional position sensing. Perfect for laboratory setups, molecular pump isolation, and small-scale industrial vacuum applications, it ensures stable performance and easy maintenance.

Our large diameter high vacuum gate valves are engineered for demanding applications including vacuum coating and space simulation. These robust, compact valves feature a pneumatic push-pull mechanism, excellent conductance, and reliable rubber-seal technology. Available in sizes from DN400 to DN2000, they offer high durability, easy maintenance, and universal flange compatibility for seamless integration into complex vacuum systems.

This high-performance large diameter high vacuum gate valve is engineered for demanding applications including space simulation chambers and turbo pump systems. Supporting sizes from DN400 to DN2000, it features a heavy-duty pneumatic push-pull design, reliable rubber seal technology, and optional water-cooling, ensuring long-term durability, low maintenance, and superior vacuum integrity.

This stainless steel high vacuum gate valve series offers a compact, high-precision solution for large-scale vacuum systems. Engineered for durability and low outgassing, it features a reliable push-pull mechanism, pneumatic operation, and universal flange compatibility, making it the premier choice for vacuum coating and space simulation industries.

Our high-performance aluminum gate valve series is engineered for superior vacuum isolation in turbo molecular pump systems and research applications. Featuring a lubricant-free design, pneumatic dual-action drive, and universal flange compatibility, these valves ensure zero-leakage sealing, rapid maintenance, and long-term operational reliability in demanding high-vacuum environments.

Engineered for ultra-high vacuum and semiconductor applications, this high-performance gate valve features a linear lift-gate design for rapid, low-particle, and vibration-free isolation. Available in customizable sizes and materials, it is the ideal solution for 200mm, 300mm, and 450mm wafer load lock systems.

This high-performance high vacuum flap valve is engineered for ultra-high vacuum and large-flow applications, including photovoltaic production and large-scale coating systems. With a robust flap design, pneumatic dual-action drive, and options for rubber or magnetic fluid sealing, it offers superior stability, low particle generation, and full customization for non-standard vacuum requirements.

This heavy-duty large low-particle transfer valve is engineered for ultra-high vacuum and large-scale industrial applications, including display panel, photovoltaic, and coating production lines. Featuring a robust linear opening design, pneumatic dual-action drive, and customizable material/cooling options, it ensures minimal particle contamination, rapid operation, and long-term reliability in demanding vacuum environments.

Our semiconductor transfer valves are engineered for high-cleanliness, low-particle environments in semiconductor and photovoltaic manufacturing. Featuring a robust hinge-type design, pneumatic dual-action operation, and customizable options for temperature control and materials, these valves provide superior vacuum isolation and safe, stable wafer transport for demanding industrial applications.

Engineered for demanding ultra-high vacuum applications, our large aperture electric rectangular gate valves offer exceptional sealing uniformity, integrated control, and robust stability. Available in customizable sizes and mounting configurations, these valves are the ideal solution for space simulation chambers, large-scale coating production lines, and heavy-duty vacuum research equipment.

This high-performance large aperture pneumatic rectangular valve is engineered for demanding applications in display, photovoltaic, and large-scale coating industries. Supporting a wide vacuum range from 5×10⁻⁸ Pa to 1×10⁵ Pa, it offers flexible mounting options, customizable materials (aluminum or stainless steel), and optional thermal control modules. With its superior sealing uniformity, compact design, and stable dynamic balance, it serves as the ideal isolation solution for giant vacuum chambers and complex industrial processes.

This high-performance High Vacuum Transfer Valve is engineered for large-aperture, ultra-high vacuum environments such as photovoltaic production, large-scale coating systems, and semiconductor processing. Featuring a robust pneumatic dual-action design, low-particle generation, and a removable base for simplified maintenance, it provides reliable, long-lasting isolation and transmission for demanding industrial vacuum applications.

This high-performance high vacuum rectangular gate valve is engineered for ultra-high vacuum and cleanroom environments. Featuring a compact linear design, it offers superior sealing, low particle generation, and full customization options including water cooling and temperature control, making it the ideal solution for semiconductor and vacuum coating systems.