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High Vacuum L Type Transfer Valve for Semiconductor and Coating Systems

High Vacuum L Type Transfer Valve for Semiconductor and Coating Systems

Our High Vacuum L-Type Transfer Valve is engineered for demanding ultra-high vacuum (UHV) environments. With a space-saving 90-degree design, low-outgassing stainless steel construction, and versatile sealing options (FKM/Metal), this valve provides reliable, particle-free isolation for semiconductor manufacturing, thin-film deposition, and research vacuum systems. It supports automated control and offers an extended service life, making it the ideal choice for high-precision vacuum applications.

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Product Details

This high-performance High Vacuum L-type Transfer Valve is a specialized vacuum isolation and transmission device engineered for ultra-high vacuum (UHV), high cleanliness, rapid switching, and long-service life. Featuring a compact 90-degree right-angle L-shaped structure, it is designed to operate seamlessly across the full pressure range from 5×10⁻⁸ Pa to 1×10⁵ Pa. This valve provides rapid isolation, transmission, and sealing between vacuum chambers and pipelines, making it an essential component for high-performance vacuum equipment.

The device is characterized by its low outgassing rates, zero leakage, bakeable design, and resistance to dust. Whether integrated into automated production lines or used in sensitive laboratory environments, it ensures the highest levels of vacuum integrity and operational efficiency.

Core Technical Features

Compact L-type Structure: The 90° right-angle channel design significantly saves installation space and allows for flexible system layouts.
Wide Vacuum Range: Stable switching performance from ultra-high vacuum levels up to atmospheric pressure.
Dual Sealing Solutions: Choose between Fluororubber (Viton) or Metal CF seals to meet specific cleanliness and temperature requirements.
High-Grade Materials: Constructed from clean, low-outgassing materials (Stainless Steel/Aluminum Alloy) to prevent contamination in ultra-high vacuum solutions.
Bakeable Design: Supports high-temperature baking for rapid degassing, essential for reaching UHV base pressures.
Maintenance-Free Longevity: Engineered to resist dust and prevent jamming, supporting millions of cycles in automated environments.

Product Specifications

Opening Diameter	Main Material	Actuator Type	Example Model
DN336X50	Aluminum Alloy	Pneumatic, Double Acting	VAVat-L1113-61-B-DN336X50
DN480X50	Aluminum Alloy	Pneumatic, Double Acting	VAVat-L1113-61-B-DN480X50
DN496X56	Aluminum Alloy	Pneumatic, Double Acting	VAVat-L1113-61-B-DN496X56
DN500X80	Aluminum Alloy	Pneumatic, Double Acting	VAVat-L1113-61-B-DN500X80
DN800X100	Aluminum Alloy	Pneumatic, Double Acting	VAVat-L1113-61-B-DN800X100

Primary Application Fields

The versatility of the L-type transfer valve makes it a staple in various high-tech industries:

Semiconductor Manufacturing: Ideal for wafer processing, process chambers, and transfer chamber isolation in semiconductor manufacturing.
Etching & Thin Film Deposition: Compatible with corrosive environments found in Etch, CVD, and PVD processes.
Vacuum Coating Systems: Used in optical coating and integrated circuit fabrication within vacuum coating systems.
Scientific Research: Essential for surface analysis, material science labs, and particle accelerators requiring UHV isolation.
Industrial Vacuum Furnaces: Provides reliable sealing for high-temperature thermal processing.
Helium Leak Detection: Ensures airtight integrity for automated leak testing stations.

Why Choose the L-type Transfer Valve?

This valve is the preferred choice for scenarios requiring compact layouts and zero-leakage performance. Unlike standard gate valves, the L-type configuration saves significant lateral space. Its friction-free opening and closing mechanism ensures no particle generation, protecting sensitive substrates. Furthermore, the dynamic balance of internal moving parts ensures smooth operation and extreme reliability even in harsh industrial conditions.

Frequently Asked Questions (FAQ)

1. What are the advantages of the L-shaped structure?

The 90° layout is specifically designed to save space, making it ideal for mounting on chamber sides, pump ports, or within narrow machine frames.

2. How do I choose between metal and rubber seals?

Select metal seals for UHV applications requiring high-temperature baking. Rubber seals are more cost-effective for standard high-vacuum applications.

3. Can it be integrated with PLC control?

Yes, both pneumatic and electric versions come with position feedback signals, supporting remote control and safety interlocking.

4. What is the maximum baking temperature?

The metal-sealed versions can withstand baking temperatures up to 300°C, meeting the rigorous requirements of UHV systems.

5. What is the expected service life?

Standard models are rated for ≥100,000 cycles, while high-end metal-sealed versions can exceed 1,000,000 cycles with minimal maintenance.

Conclusion: The High Vacuum L-type Transfer Valve is Suitable for semiconductor fabrication, UHV research, and industrial coating systems. The core advantage is its compact 90-degree space-saving design combined with ultra-high vacuum sealing reliability and a particle-free long-life mechanism.

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