This high-performance helium compressor serves as the critical power unit for cryogenic vacuum pumps and refrigerators. Engineered for stability and reliability, it delivers 99.999% pure helium with precise pressure control. Featuring an efficient water-cooling system, multi-layer safety protections, and a long 26,000-hour maintenance cycle, it is a versatile, industrial-grade solution compatible with various cryogenic systems, including direct replacements for C30VRT and 9600 series compressors.
Optimize your vacuum system with our comprehensive range of cryopump spare parts and expert repair services. We specialize in genuine components for CTI, ULVAC, Leybold, and Sumitomo systems, offering everything from helium hoses and regeneration controllers to motors and thermocouples to minimize downtime and maximize efficiency.
Our advanced cryogenic refrigerators utilize reliable gas adiabatic expansion technology to provide stable, eco-friendly, and efficient cooling. Designed for industrial and scientific applications, these systems offer low maintenance, easy operation, and full customization to meet the specific requirements of vacuum equipment, medical MRI, and superconducting research.
The CRYO-P series cryogenic pump is a high-performance, oil-free vacuum solution utilizing cryocondensation and adsorption technology. Capable of reaching an ultimate vacuum of 10⁻⁷ Pa (up to 10⁻⁹ Pa with bake-out), it is designed for demanding applications including semiconductor fabrication, thin-film coating, and space simulation. Featuring flexible installation, low operating costs, and customizable corrosion-resistant or bake-out models, the CRYO-P series provides reliable, high-purity vacuum performance for advanced industrial and scientific research.
The ECM Series Cryopump is a cutting-edge vacuum solution engineered for semiconductor IC manufacturing and ion implantation. Featuring fully automatic regeneration, PLC-based remote monitoring, and adaptive thermal compensation, this high-purity, stainless steel pump ensures stable, reliable, and safe operation for advanced 7nm process nodes and beyond.
This high-performance helium compressor serves as the critical power unit for cryogenic vacuum pumps and refrigerators. Engineered for stability and reliability, it delivers 99.999% pure helium with precise pressure control. Featuring an efficient water-cooling system, multi-layer safety protections, and a long 26,000-hour maintenance cycle, it is a versatile, industrial-grade solution compatible with various cryogenic systems, including direct replacements for C30VRT and 9600 series compressors.
Optimize your vacuum system with our comprehensive range of cryopump spare parts and expert repair services. We specialize in genuine components for CTI, ULVAC, Leybold, and Sumitomo systems, offering everything from helium hoses and regeneration controllers to motors and thermocouples to minimize downtime and maximize efficiency.
Our advanced cryogenic refrigerators utilize reliable gas adiabatic expansion technology to provide stable, eco-friendly, and efficient cooling. Designed for industrial and scientific applications, these systems offer low maintenance, easy operation, and full customization to meet the specific requirements of vacuum equipment, medical MRI, and superconducting research.
The CRYO-P series cryogenic pump is a high-performance, oil-free vacuum solution utilizing cryocondensation and adsorption technology. Capable of reaching an ultimate vacuum of 10⁻⁷ Pa (up to 10⁻⁹ Pa with bake-out), it is designed for demanding applications including semiconductor fabrication, thin-film coating, and space simulation. Featuring flexible installation, low operating costs, and customizable corrosion-resistant or bake-out models, the CRYO-P series provides reliable, high-purity vacuum performance for advanced industrial and scientific research.
The ECM Series Cryopump is a cutting-edge vacuum solution engineered for semiconductor IC manufacturing and ion implantation. Featuring fully automatic regeneration, PLC-based remote monitoring, and adaptive thermal compensation, this high-purity, stainless steel pump ensures stable, reliable, and safe operation for advanced 7nm process nodes and beyond.
