The ECM Series Cryopump is a cutting-edge vacuum solution engineered for semiconductor IC manufacturing and ion implantation. Featuring fully automatic regeneration, PLC-based remote monitoring, and adaptive thermal compensation, this high-purity, stainless steel pump ensures stable, reliable, and safe operation for advanced 7nm process nodes and beyond.
The ECM Series Cryopump is a cutting-edge vacuum solution engineered for semiconductor IC manufacturing and ion implantation. Featuring fully automatic regeneration, PLC-based remote monitoring, and adaptive thermal compensation, this high-purity, stainless steel pump ensures stable, reliable, and safe operation for advanced 7nm process nodes and beyond.