This high-performance high vacuum rectangular gate valve is engineered for ultra-high vacuum and cleanroom environments. Featuring a compact linear design, it offers superior sealing, low particle generation, and full customization options including water cooling and temperature control, making it the ideal solution for semiconductor and vacuum coating systems.
Our high-vacuum large pendulum valves offer a superior solution for large-diameter, space-constrained vacuum systems. Engineered for low-particle performance and high reliability, these valves support a wide range of pressures from 5×10⁻⁸ Pa to atmospheric pressure. With customizable options including heating/cooling modules and multiple pneumatic drive configurations, they are the perfect choice for demanding applications in semiconductor, LCD, and thin-film coating industries.
This high-performance vacuum throttle valve is engineered for precise linear flow regulation and downstream pressure stability in demanding vacuum environments. Utilizing a unique counter-rotating blade mechanism, it minimizes conductance loss while providing exceptional control repeatability. Designed for semiconductor production, thin-film processes, and research applications, it features a compact, low-profile build and full compatibility with major flange standards.
Our high-vacuum S-type transfer valve is engineered for ultra-high vacuum (UHV) environments requiring low flow resistance and high cleanliness. Featuring a streamlined S-shaped design, it minimizes turbulence and particle accumulation, making it perfect for semiconductor, thin-film deposition, and research applications. With options for metal or rubber seals, bakeable capabilities, and long-cycle durability, this valve provides a reliable, maintenance-free solution for critical vacuum process control.
The CRYO-P series cryogenic pump is a high-performance, oil-free vacuum solution utilizing cryocondensation and adsorption technology. Capable of reaching an ultimate vacuum of 10⁻⁷ Pa (up to 10⁻⁹ Pa with bake-out), it is designed for demanding applications including semiconductor fabrication, thin-film coating, and space simulation. Featuring flexible installation, low operating costs, and customizable corrosion-resistant or bake-out models, the CRYO-P series provides reliable, high-purity vacuum performance for advanced industrial and scientific research.
This high-performance high vacuum rectangular gate valve is engineered for ultra-high vacuum and cleanroom environments. Featuring a compact linear design, it offers superior sealing, low particle generation, and full customization options including water cooling and temperature control, making it the ideal solution for semiconductor and vacuum coating systems.
Our high-vacuum large pendulum valves offer a superior solution for large-diameter, space-constrained vacuum systems. Engineered for low-particle performance and high reliability, these valves support a wide range of pressures from 5×10⁻⁸ Pa to atmospheric pressure. With customizable options including heating/cooling modules and multiple pneumatic drive configurations, they are the perfect choice for demanding applications in semiconductor, LCD, and thin-film coating industries.
This high-performance vacuum throttle valve is engineered for precise linear flow regulation and downstream pressure stability in demanding vacuum environments. Utilizing a unique counter-rotating blade mechanism, it minimizes conductance loss while providing exceptional control repeatability. Designed for semiconductor production, thin-film processes, and research applications, it features a compact, low-profile build and full compatibility with major flange standards.
Our high-vacuum S-type transfer valve is engineered for ultra-high vacuum (UHV) environments requiring low flow resistance and high cleanliness. Featuring a streamlined S-shaped design, it minimizes turbulence and particle accumulation, making it perfect for semiconductor, thin-film deposition, and research applications. With options for metal or rubber seals, bakeable capabilities, and long-cycle durability, this valve provides a reliable, maintenance-free solution for critical vacuum process control.
The CRYO-P series cryogenic pump is a high-performance, oil-free vacuum solution utilizing cryocondensation and adsorption technology. Capable of reaching an ultimate vacuum of 10⁻⁷ Pa (up to 10⁻⁹ Pa with bake-out), it is designed for demanding applications including semiconductor fabrication, thin-film coating, and space simulation. Featuring flexible installation, low operating costs, and customizable corrosion-resistant or bake-out models, the CRYO-P series provides reliable, high-purity vacuum performance for advanced industrial and scientific research.