This high-performance High Vacuum Large Pendulum Valve is a vacuum isolation and transmission device specifically designed for large-diameter, compact layouts, and low-particle contamination environments. Utilizing a pendulum rotary opening and closing structure, it is suitable for the entire range from ultra-high vacuum (5×10⁻⁸ Pa) to atmospheric pressure (1×10⁵ Pa). It enables rapid connection, isolation, and sealing of large-diameter vacuum chambers and pipelines.
Core Features & Technical Advantages
Flexible Drive Adaptation Supports pneumatic normally closed (NC), pneumatic three-stage NC, and pneumatic double-acting actuators. Equipped with a normally closed spring to ensure safety during power outages.
Standard Flange Compatibility Standardized with ISO-F and JIS B flanges, making it universally compatible with various large-diameter
vacuum equipment for easy installation.
Premium Material Selection The main body is constructed from high-grade aluminum alloy (customizable materials available), offering high strength, lightweight properties, and low outgassing for clean vacuum processes.
Customizable Modules Supports optional heating and water-cooling modules to meet specific process temperature requirements in complex industrial environments.
Wide Vacuum Range Stable operation across the full spectrum from ultra-high vacuum to atmospheric pressure without performance degradation.
Long Life & Low Maintenance The pendulum structure ensures smooth operation with minimal wear. Its split-body design allows for quick maintenance and seamless integration into automated production lines.
Product Specifications
| Bore Diameter |
Main Material |
Actuator Type |
Example Model Number |
| DN400 ~ DN1250 |
Aluminum Alloy (Optional) |
Pneumatic Normally Closed |
VAvat-D1111-31-DN400~1250 |
| DN400 ~ DN1250 |
Aluminum Alloy (Optional) |
Pneumatic 3-Stage NC |
VAvat-D5111-31-DN400~1250 |
| DN400 ~ DN1250 |
Aluminum Alloy (Optional) |
Pneumatic Double Acting |
VAvat-D1113-31-DN400~1250 |
Primary Application Fields
- Large Coating Production Lines: Ideal for large-scale coating processes where installation space is limited.
- LCD Production Systems: Meets the high cleanliness and low-particle requirements of large-diameter liquid crystal panel manufacturing.
- Vacuum Coating Equipment: Used for isolation in large-diameter optical coating and integrated circuit coating pipelines.
- Semiconductor Production Systems: Perfect for large wafer processing, process chambers, and transfer chamber isolation.
- Scientific Research: Essential for large-scale surface analysis, particle accelerators, and space simulation vacuum systems.
- Compact Large-Diameter Systems: Saves significant space in large vacuum units and chambers where layout is restricted.
Why Choose the High Vacuum Large Pendulum Valve?
The High Vacuum Large Pendulum Valve is the core component for scenarios requiring large diameters, compact layouts, and low particle contamination. Compared to traditional large-diameter gate valves or butterfly valves, the pendulum valve offers smoother opening/closing, lower vibration, and significantly fewer particles.
- Ultra-Low Particle Contamination: The smooth motion minimizes vibration, making it perfect for high-cleanliness semiconductor and coating processes.
- Split Design for Easy Maintenance: The split-body architecture allows for rapid servicing, drastically reducing downtime and maintenance costs.
- Space-Saving Design: Its compact footprint is specifically engineered for systems where every centimeter of space counts.
- Bi-directional Universal Design: High versatility in installation direction allows for flexible pipeline layouts.
- Visual Operation: Equipped with a visual indicator for clear status monitoring, enhancing operational efficiency.
Frequently Asked Questions (FAQ)
1. What is the primary use of this valve? It is used for rapid connection and isolation in large-diameter vacuum pipelines, especially in LCD and coating production.
2. What drive options are available? We offer pneumatic normally closed, pneumatic three-stage normally closed, and pneumatic double-acting drives.
3. Can the material be customized? Yes, while the standard is aluminum alloy, we can customize materials to suit specific corrosive environments.
4. Are the flanges standard? Yes, they come standard with ISO-F and JIS B flanges for universal compatibility.
5. Does it support temperature control? Yes, we can provide custom heating or water-cooling modules based on your process needs.
Conclusion：High Vacuum Large Pendulum Valve Suitable for large-scale industrial coating, LCD manufacturing, and semiconductor production, The core advantage is its pendulum-style low-particle operation, compact space-saving design, and split-body structure for easy maintenance across ultra-high vacuum ranges。
