This high-performance Aluminum Alloy Series is a lightweight vacuum isolation component specifically designed for small and medium-sized high vacuum systems, general pumping, process, and exhaust applications. Featuring a compact baffle structure precision-molded from aluminum alloy, it is suitable for the full range from high vacuum to atmospheric pressure (5×10⁻⁸ Pa to 1×10⁵ Pa). It provides stable isolation, switching, and flow control across various vacuum setups.
With core advantages such as a lightweight design, long service life, precise dual-sensing, stable dynamic balance, and adaptable dual-sealing, this series is widely utilized in semiconductor processes, laboratory vacuum devices, vacuum coating, and analytical instruments. It stands as a universal and cost-effective core isolation valve for modern vacuum engineering.
| Bore Diameter | Flange Type | Actuator Type | Example Model |
|---|---|---|---|
| DN25~50 | ISO-KF | Pneumatic, NC, w/ Solenoid | VAvat-B1111-11024-DN25~50 |
| DN25~50 | ISO-KF | Pneumatic, NO, w/ Solenoid | VAvat-B1112-11024-DN25~50 |
| DN25~50 | ISO-KF | Pneumatic, Double Acting, Bellows | VAvat-B1123-11-B-DN25~50 |
| DN60~160 | ISO-K | Pneumatic, NC, w/ Solenoid | VAvat-B1111-21024-DN60~160 |
| DN60~160 | ISO-K | Pneumatic, NO, w/ Solenoid | VAvat-B1112-21024-DN60~160 |
| DN60~160 | ISO-K | Pneumatic, Double Acting, Bellows | VAvat-B1123-21-B-DN60~160 |
Universal vacuum valves for pumping and exhaust in small to medium setups.
Wafer transport and component packaging where cleanliness and zero particle contamination are vital.
Mass spectrometry, leak detection, and research devices requiring precise vacuum control.
Small vacuum coaters, electron microscopes, and leak detectors needing reliable safety shut-off.
This series is the ideal choice for users seeking vacuum technology solutions that prioritize weight, space, and cost-efficiency without compromising performance.
Q: How do I choose between O-ring and Bellows sealing?
A: O-ring sealing is cost-effective and perfect for standard high vacuum and low-to-medium temperatures. Bellows sealing offers superior airtightness and is recommended for ultra-high vacuum, corrosive gases, or bakeable environments.
Q: What is the benefit of the "Normally Closed" pneumatic drive?
A: In the event of a power or air failure, the valve automatically closes. This prevents backflow and protects the system, which is critical when handling toxic or expensive media.
Q: Are these valves compatible with standard laboratory equipment?
A: Yes, the use of standard ISO-KF and ISO-K flanges ensures they are compatible with the majority of global laboratory and industrial vacuum equipment.
Conclusion: The High Vacuum Pneumatic Flapper Valve (Aluminum Alloy Series) is Suitable for small and medium-sized high vacuum system users, laboratories, and semiconductor manufacturers. The core advantage is its lightweight aviation aluminum design, dual-sensing precision, and versatile sealing options for high-performance vacuum isolation.
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