Large Aperture Pneumatic Rectangular Vacuum Valve for Industrial Coating and PV Systems

This high-performance Large-diameter Pneumatic Rectangular Valve is a heavy-duty vacuum isolation and transmission device specifically engineered for ultra-high vacuum (UHV), oversized openings, and demanding industrial environments such as display panels, photovoltaics, and large-scale coating systems. Featuring a large-size rectangular straight-through structure, it is suitable for the full pressure range from 5×10⁻⁸ Pa to 1×10⁵ Pa. This high-performance vacuum valves ensures rapid isolation and reliable sealing for large process chambers and complex vacuum systems.

Core Technical Features

• Oversized Rectangular Port Design: Perfectly adapted to non-standard large dimensions such as 2422×300mm, 2560×50mm, and 1700×650mm, meeting the requirements for high throughput and large-scale substrate transfer.
• Dual Drive Structures: Offers both "Suspended" and "Rail-guided" installation options to accommodate different structural layouts and mounting requirements of large-scale vacuum isolation equipment.
• Premium Material Customization: The main body is constructed from high-grade aviation aluminum or stainless steel. These materials provide high strength, excellent corrosion resistance, and low outgassing rates, ideal for ultra-clean environments.
• Flexible Sealing Solutions: Users can choose between Viton O-ring sealing or bellows shaft sealing based on specific process requirements and vacuum levels.
• Expandable Thermal Control: Optional water-cooling modules and temperature control modules are available to effectively manage valve temperature in high-heat process environments, significantly extending the equipment's service life.
• Wide Vacuum Range Compatibility: Operates stably from ultra-high vacuum to atmospheric pressure, ensuring safe and consistent switching under all working conditions.

Product Specifications Table

Primary Application Fields

The Large-diameter Pneumatic Rectangular Valve is a standard core component for customized vacuum solutions across various high-tech industries:

• Display Panel Production: Ideal for giant vacuum chamber isolation in LCD and OLED production lines.
• Photovoltaic (PV) Systems: Used for isolation and flow control in large-scale vacuum process equipment for solar modules and cells.
• Large Coating Systems: Facilitates vacuum line switching in continuous production lines for large-area optical coating and web coating.
• Giant Vacuum Installations: Essential for large-scale scientific research devices, space simulation chambers, and industrial vacuum furnaces.

Frequently Asked Questions (FAQ)

1. What is the primary use of this valve?
It is primarily used for isolating giant vacuum chambers in display, PV, and large coating systems where standard circular valves are insufficient.

2. What structural forms are available?
We provide both suspended and rail-guided designs to fit different spatial constraints and system requirements.

3. Can the materials be customized?
Yes, the body can be made from aviation aluminum or stainless steel to match your specific corrosion resistance and budget needs.

4. Does it support high-temperature processes?
Yes, we offer optional water-cooling and temperature control modules for processes that operate at elevated temperatures.