This high-performance Mini Ultra-High Vacuum (UHV) Gate Valve is a specialized miniature vacuum isolation device designed specifically for extreme high vacuum, ultra-clean environments, and harsh operating conditions. Utilizing an ultra-precision gate push-pull structure, it is suitable for the full range from extreme high vacuum (1×10⁻⁹ Pa) to atmospheric pressure (1×10⁵ Pa). It achieves high-standard sealing and isolation for small UHV chambers, analytical instruments, and semiconductor precision pipelines. With core advantages such as strong UHV adaptability, compact structure, stable dynamic balance, and long service life, it is a critical component in reliable vacuum solutions.
Available in four drive modes: Manual, Pneumatic Normally Closed (NC), Pneumatic Normally Open (NO), and Pneumatic Double-Acting. This ensures compatibility with manual operations, automated control systems, and safety interlock requirements.
Engineered with high material density and a sophisticated miniature structure, it perfectly fits small or congested UHV systems, significantly saving installation space while maintaining ease of use.
Constructed from either Aluminum Alloy or Stainless Steel. These materials offer high strength, superior corrosion resistance, and low outgassing rates, making them ideal for UHV system components.
Features two distinct sealing processes: O-ring sealing or Bellows sealing. These provide exceptional airtightness and performance tailored to specific vacuum requirements and cleanliness standards.
| Bore Size (DN) | Flange Type | Actuator Type | Example Model Number |
|---|---|---|---|
| DN25 ~ 50 | ISO-KF | Pneumatic, Double-Acting | VAvat-K1213-12-DN25~50 |
| DN25 ~ 50 | CF-F | Manual | VAvat-K3244-12-B-DN25~50 |
| DN25 ~ 50 | CF-F | Normally Closed (with Solenoid Valve) | VAvat-K1211-52024-B-DN25~50 |
| DN25 ~ 50 | CF-F | Pneumatic, Double-Acting | VAvat-K1213-52-B-DN25~50 |
Our Mini UHV Gate Valve is specifically designed for miniaturized scenarios that do not compromise on performance. Compared to standard valves, our vacuum pump accessories offer unique sealing processes and higher vacuum ratings.
Stable Dynamic Balance: The product exhibits stable dynamic balance during operation, providing strong anti-interference capabilities and smooth actuation, which is vital for complex, precision vacuum environments.
Longevity and Reliability: The high-density materials and unique sealing technology ensure a long service life and low maintenance costs. Whether you choose the manual or pneumatic version, you are guaranteed a valve that performs consistently under pressure.
It is designed for high-vacuum isolation in extreme high vacuum (UHV) or harsh application conditions, serving as a dedicated standard for miniature UHV systems.
It depends on your workflow. Manual is great for simple setups, while pneumatic options (NC, NO, Double-acting) are better for automated systems. Models with solenoid valves support safety interlocks.
Yes, it comes standard with ISO-KF and CF-F flanges, ensuring full compatibility with most small-scale UHV pipelines and chambers.
The entire unit is designed for stable dynamic balance, meaning it operates without vibration or jitter, providing high resistance to environmental interference during sensitive experiments.
Conclusion: The Mini Ultra-High Vacuum Gate Valve is Suitable for semiconductor manufacturing, high-end scientific research, and analytical instrument industries. The core advantage is its UHV compatibility, multi-drive precision control, and compact high-density construction.
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