This high-performance high vacuum flapper valve is a specialized vacuum isolation and flow control device designed for ultra-high vacuum, large-flow, and photovoltaic or large-scale coating system conditions. Utilizing a flapper-style flip opening and closing structure, it is suitable for the entire range from ultra-high vacuum to atmospheric pressure (5×10⁻⁸ Pa to 1×10⁵ Pa). It enables rapid connection, disconnection, and sealed isolation for large vacuum chambers and production lines. With advantages such as stable dynamic balance, low particle generation, compact structure, and high customizability, it is the core preferred equipment for vacuum system isolation and control.
Core Features
- Flapper Flip Structure: Smooth opening and closing, adapted for large apertures and high-flow conditions, perfectly matching the needs of photovoltaic and large coating systems.
- Pneumatic Double-Acting Drive: Equipped with a double-acting mechanism for stable and reliable operation, supporting integration into automated vacuum production lines for continuous industrial production.
- Flexible Material Customization: The main body is available in aviation aluminum or stainless steel. These materials offer high strength, corrosion resistance, and low outgassing, suitable for high-cleanliness or harsh environments.
- Dual Sealing Options: Choose between rubber ring sealing or ferrofluid sealing based on process requirements to meet different vacuum levels and sealing standards.
- Full Size Customization: Supports customization of any size according to customer needs, adapting to various non-standard large chambers and systems.
- Expandable Temperature Control: Supports optional water-cooling and temperature control modules to effectively manage valve temperature in high-temperature processes, extending equipment lifespan.
Technical Specifications
| Opening Diameter |
Main Material |
Actuator Type |
Example Model |
| DN500×60 |
Aluminum Alloy (Optional) |
Pneumatic Double-Acting |
VAvat-F1113-61-DN500X60 |
| DN2560×50 |
Stainless Steel (Optional) |
Pneumatic Double-Acting |
VAvat-F1113-62-DN2560X50 |
| All specifications are customizable, including optional water-cooling and temperature control modules. |
Application Fields
The versatility of the high vacuum flapper valve makes it indispensable in several high-tech industries:
- Photovoltaic Production: Used for vacuum pipeline switching and chamber isolation in solar cell and module production, meeting high stability requirements.
- Large Coating Systems: Ideal for large-scale coating lines and continuous plating lines requiring large apertures and high throughput.
- Vacuum Coating Equipment: Applied in large-scale optical coating and roll-to-roll coating processes for efficient vacuum coating equipment isolation.
- Customized Vacuum Systems: Provides solutions for non-standard sizes and special process requirements in high-end equipment manufacturing.
Why Choose Our Flapper Valve?
The core advantage lies in the combination of a stable flapper structure + low particle generation + dual sealing adaptability + full specification customization. Compared to standard rectangular valves, the flapper structure offers better dynamic balance and lower particle emission, making it the safest and most efficient choice for large-scale systems.
- Stable Dynamic Balance: Smooth operation without jitter, ensuring safety during long-term continuous running.
- Low Maintenance: Designed for easy maintenance and low particle generation, which significantly reduces operational costs and ensures production continuity.
- Simple & Universal Design: Its compact and reasonable design allows it to be widely applied across various large-scale vacuum scenarios.
Frequently Asked Questions (FAQ)
1. What is the primary use of this valve? It is primarily used for vacuum pipeline switching and chamber isolation in photovoltaic and large-scale coating systems.
2. What drive methods are available? It utilizes a pneumatic double-acting drive, ensuring stable operation and compatibility with automated control systems.
3. Can the material be customized? Yes, the body can be made from aviation aluminum or stainless steel to suit different corrosion levels and budget requirements.
4. How is the particle generation controlled? The optimized flapper structure minimizes friction and wear, resulting in extremely low particle generation, perfect for high-cleanliness environments.
Conclusion: The High Vacuum Flapper Valve is Suitable for Photovoltaic, Large Coating, and Semiconductor industries. The core advantage is its stable flapper structure, low particle generation, and highly customizable dimensions with optional temperature control.