Vacuum Value

Ultra High Vacuum Gate Valve CF Flange Manual and Pneumatic Options

Ultra High Vacuum Gate Valve CF Flange Manual and Pneumatic Options

Our Ultra High Vacuum Gate Valves provide reliable, low-maintenance isolation for UHV systems. Featuring a compact rail-guided design, metal bellows or O-ring sealing, and versatile drive options (manual/pneumatic/solenoid), these valves are ideal for semiconductor, research, and industrial vacuum applications requiring superior sealing and long-term stability.

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Product Details

Product Overview

This high-performance Ultra-High Vacuum Gate Valve is a standard vacuum isolation device specifically engineered for ultra-high vacuum (UHV) systems, scientific research, and general industrial applications. Utilizing a guide-rail type slide structure, it is perfectly suited for the full pressure range from 1×10⁻⁹ Pa to 1×10⁵ Pa, ensuring high-standard sealing, isolation, and flow control for vacuum pipelines and chambers.

Characterized by its compact structure, stable dynamic balance, low maintenance requirements, and exceptional service life, this valve is a core component for laboratories, semiconductor manufacturing, and vacuum system solutions.

Core Features

Stable Guide-Rail Structure: The feed mechanism is sealed with a welded metal bellows, providing smooth motion, reliable sealing, and convenient maintenance across a wide range of applications.
Flexible Actuation Options: Supports three driving modes: Pneumatic Double-Acting, Manual, and Pneumatic with Solenoid Valve, catering to manual operation, automated control, and safety interlocking.
Dual Sealing Solutions: Available with either Bellows Sealing or Rubber Ring Sealing to meet the stringent airtightness requirements of ultra-high vacuum environments.
Full CF Flange Compatibility: Standardized with CF-F flanges, ensuring seamless integration with various UHV systems and high-vacuum pipeline layouts.
Compact & User-Friendly: The simple, space-saving design allows for easy installation even in restricted vacuum system configurations.
Low Maintenance & Longevity: Engineered for stable dynamic balance and minimal wear, reducing the need for frequent servicing during long-term continuous operation.

Technical Specifications

Bore Size (DN)	Flange Type	Actuator Type	Example Model Number
DN25 ~ 50	CF-F	Pneumatic, Double-Acting	VAvat-K1113-52-B-DN25~50
DN60 ~ 400	CF-F	Pneumatic, Double-Acting	VAvat-K1113-52-B-DN60~400
DN60 ~ 400	CF-F	Manual	VAvat-K3144-52-B-DN60~400
DN25 ~ 50	CF-F	Pneumatic with Solenoid Valve	VAvat-K1113-52024-B-DN25~50
DN60 ~ 400	CF-F	Pneumatic with Solenoid Valve	VAvat-K1113-52024-B-DN60~400

Primary Application Fields

General UHV Isolation: Acts as the standard valve for isolating vacuum lines and chambers in both scientific and industrial settings.
Research Laboratories: Ideal for university and institute experimental setups, material analysis equipment, and vacuum chamber isolation.
Industrial Vacuum Systems: Essential for semiconductor processing, vacuum coating, and vacuum furnace operations requiring continuous production.
High-End Equipment Support: Serves as a critical isolation valve for high-end vacuum technology such as molecular pumps and ion pumps, extending equipment life.
Customized Vacuum Systems: Supports full-specification customization to meet unique requirements in advanced vacuum engineering.

Why Choose Our Ultra-High Vacuum Gate Valve?

Our valve is the premier choice for UHV, scientific/industrial, and high-reliability scenarios. The core advantage lies in the combination of bellows sealing + guide-rail stability + compact maintenance + multi-drive adaptation. Compared to standard gate valves, our vacuum pump accessories offer higher sealing grades and more stable structures, making them the standard-setter for rigorous vacuum environments.

Frequently Asked Questions (FAQ)

1. What is the primary purpose of this valve?

It is used for standard isolation in ultra-high vacuum systems, widely adopted across scientific research and high-tech industrial sectors.

2. What sealing options are available?

We offer bellows sealing (ideal for UHV and bakeable conditions) and rubber ring sealing (suitable for conventional high vacuum).

3. What are the drive options?

You can choose between pneumatic double-acting, manual, or pneumatic with a solenoid valve for automated safety interlocking.

4. Is it compatible with standard systems?

Yes, it features standard CF-F flanges, ensuring compatibility and easy installation with most UHV systems.

5. How is the maintenance and service life?

The valve requires minimal maintenance thanks to its stable guide-rail design and durable welded metal bellows, ensuring a long service life in continuous operation.

Summary

The Ultra-High Vacuum Gate Valve integrates high-performance bellows sealing with a stable guide-rail motion and a compact, easy-to-maintain design. It is the benchmark for isolation in high-end vacuum systems. Whether for experimental research or industrial production, it provides a stable, efficient, and durable solution, making it the preferred standard gate valve for any demanding vacuum environment.

Conclusion：The Ultra-High Vacuum Gate Valve is Suitable for scientific research laboratories and high-end industrial vacuum systems, The core advantage is its superior bellows sealing, stable guide rail motion, and wide compatibility with CF standard flanges.

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