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High Vacuum Pneumatic Bellows Valve Stainless Steel ISO-KF ISO-K
High Vacuum Pneumatic Bellows Valve Stainless Steel ISO-KF ISO-K
High Vacuum Pneumatic Bellows Valve Stainless Steel ISO-KF ISO-K
High Vacuum Pneumatic Bellows Valve Stainless Steel ISO-KF ISO-K
High Vacuum Pneumatic Bellows Valve Stainless Steel ISO-KF ISO-K
High Vacuum Pneumatic Bellows Valve Stainless Steel ISO-KF ISO-K

High Vacuum Pneumatic Bellows Valve Stainless Steel ISO-KF ISO-K

Our high-vacuum pneumatic baffle valves are engineered for superior performance in demanding environments. Constructed from high-pressure die-cast 304/316L stainless steel, these valves offer exceptional corrosion resistance, EMI-resistant mechanical feedback, and flexible drive options (Normally Open/Closed/Double Acting). Compatible with ISO-KF and ISO-K standards, they provide a reliable, leak-proof solution for semiconductor processing, vacuum coating, and industrial exhaust systems.

This high-performance High Vacuum Pneumatic Flapper Valve is a universal vacuum isolation component specifically engineered for ultra-high vacuum system pumping, process control, and exhaust applications. Featuring a compact baffle-angle structure, it is suitable for the full range from high vacuum to atmospheric pressure (5×10⁻⁸ Pa to 1×10⁵ Pa). It excels in achieving precise isolation, connectivity, and flow control within vacuum systems, even under the most demanding installation environments.

Constructed with high-pressure dense materials and featuring anti-magnetic interference capabilities, this valve offers stable dynamic balance and dual-sealing adaptability. It is widely utilized in semiconductor transport, vacuum coating, laboratory vacuum apparatus, and industrial vacuum exhaust systems, making it the ideal isolation and control valve for harsh environments in any advanced vacuum system.

Core Features & Advantages

  • High-Pressure Vacuum Die-Cast Structure: Utilizing a specialized high-pressure vacuum die-casting process, the valve body achieves exceptional density and strength, ensuring structural stability and airtightness in rigorous environments.
  • Precision Control with Multiple Drive Modes: Available in three main categories: Pneumatic Normally Closed (NC) with solenoid valve, Pneumatic Normally Open (NO) with solenoid valve, and Pneumatic Double-Acting with bellows. This variety supports various automated control requirements.
  • Mechanical Sensing & Anti-Interference: Equipped with high-sensitivity mechanical sensors that are immune to magnetic field interference, providing accurate feedback regardless of external environmental factors.
  • Superior Corrosion Resistance (SS304/316L): The main body is crafted from high-grade stainless steel, offering excellent resistance to corrosive gases and harsh process chemicals.
  • Dual Sealing Options: Choose between Rubber O-ring sealing for standard applications or Bellows sealing for ultra-high vacuum integrity and extended service life.
  • Full Flange Compatibility: Standardized with ISO-KF and ISO-K ultra-high vacuum flanges, ensuring seamless integration with various vacuum pipelines and chambers.

Product Specification Table

Bore Size (DN) Flange Type Actuator Type Example Model Number
DN25 ~ 50 ISO-KF Pneumatic, NC, with Solenoid Valve VAvat-B1111-12024-DN25~50
DN25 ~ 50 ISO-KF Pneumatic, NO, with Solenoid Valve VAvat-B1112-12024-DN25~50
DN25 ~ 50 ISO-KF Pneumatic, Double-Acting, with Bellows VAvat-B1123-12-DN25~50
DN60 ~ 160 ISO-K Pneumatic, NC, with Solenoid Valve VAvat-B1111-22024-DN60~160
DN60 ~ 160 ISO-K Pneumatic, NO, with Solenoid Valve VAvat-B1112-22024-DN60~160
DN60 ~ 160 ISO-K Pneumatic, Double-Acting, with Bellows VAvat-B1123-22-DN60~160

Primary Application Fields

1. Pumping Systems & Process Applications: Used as a universal high vacuum valve for pumping units and process pipeline vacuum isolation.

2. Harsh Environment Systems: Ideal for vacuum control in environments prone to vibration, moisture, or restricted space.

3. Semiconductor & Electronics: Essential for wafer transport and electronic component packaging, ensuring a clean and stable vacuum environment.

4. Vacuum Coating & Detection: Provides safe on-off control for mass spectrometry, leak detection, and precision coating equipment.

5. Industrial Exhaust Units: High reliability and corrosion resistance for industrial furnaces and chemical vacuum equipment.

Why Choose Our Stainless Steel Series?

Our flapper valves are designed for automation safety interlocking and high-vacuum universality. Compared to standard aluminum valves, our stainless steel series offers higher density and superior durability. The combination of mechanical sensing and multiple drive modes makes it the safest and most versatile choice for modern vacuum solutions.

  • Durability: High-pressure die-casting ensures a non-porous structure that resists long-term wear.
  • Precision: Stable dynamic balance ensures smooth opening and closing without vibration.
  • Flexibility: Supports installation in any orientation and integrates easily with ISO-standard hardware.

Frequently Asked Questions (FAQ)

1. What is the core purpose of this valve?

It is a universal valve for high vacuum pumping and exhaust, specifically designed for isolation in harsh installation environments.

2. How do I choose the drive mode?

NC (Normally Closed): Closes automatically during power failure to prevent backflow. NO (Normally Open): Opens during failure for maintenance or continuous exhaust. Double-Acting: Provides bidirectional control, ideal for high-cleanliness bellows-sealed processes.

3. Which sealing method is better?

Rubber O-rings are cost-effective for standard high vacuum. Bellows sealing is required for ultra-high vacuum, corrosive gases, or applications involving high-temperature baking.

Conclusion: The High Vacuum Pneumatic Flapper Valve is Suitable for semiconductor manufacturing, laboratory research, and industrial vacuum processes. The core advantage is its high-pressure die-cast stainless steel construction, anti-magnetic interference mechanical sensors, and versatile pneumatic drive modes.

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