Vacuum Value

High Vacuum J Type Transfer Valve for Semiconductor and Coating Systems

High Vacuum J Type Transfer Valve for Semiconductor and Coating Systems

Our high-performance J-type transfer valve is engineered for ultra-high vacuum (UHV) environments, offering a compact, space-saving design with exceptional sealing reliability. Built from high-grade stainless steel or aluminum, it supports bakeable operations, low outgassing, and long-cycle maintenance-free performance, making it the ideal choice for semiconductor manufacturing, vacuum coating, and advanced research facilities.

Inquire Now

Product Details

The high-performance High Vacuum J-Type Transfer Valve is a specialized vacuum isolation and transmission device designed for ultra-high vacuum (UHV), high cleanliness, rapid switching, and long-service-life environments. Featuring a compact J-shaped bent structure, this valve is engineered for the full range from ultra-high vacuum to atmospheric pressure (5×10⁻⁸ Pa to 1×10⁵ Pa). It enables rapid isolation, transmission, and sealed disconnection between chambers and pipelines, making it an essential component for advanced vacuum system components.

This equipment boasts significant advantages such as low outgassing, zero leakage, bakeability, dust resistance, and swift operation. It is widely utilized in vacuum coating, semiconductor chambers, vacuum furnaces, scientific research UHV devices, helium leak detection systems, and automated vacuum production lines.

Core Features

J-Type Compact Bent Structure: Ensures smooth passage while saving installation space with flexible layout options.
Wide Vacuum Range: Stable switching performance from ultra-high vacuum to atmospheric pressure.
Dual Sealing Solutions: Optional configurations including rubber ring sealing and bellows sealing to meet specific process needs.
Clean Materials: Constructed from high-grade stainless steel (SUS316L) or aviation aluminum for low outgassing and zero contamination.
High-Temperature Bakeability: Supports rapid degassing to meet the stringent requirements of UHV systems.
Maintenance-Free Longevity: Dust-resistant design that prevents valve jamming and supports seamless automation integration.

Technical Specifications

Opening Diameter	Main Material	Actuator Type	Example Model
DN236X70	Aluminum Alloy	Pneumatic, Double Acting	VAVat-J1113-61-B-DN236X70
DN460X70	Aluminum Alloy	Pneumatic, Double Acting	VAVat-J1113-61-B-DN460X70
Custom sizes and specifications available upon request.

Primary Application Fields

Semiconductor Production: Vacuum isolation and control for wafer processing, process chambers, and transfer chambers.
Etching & Thin Film Deposition: Ideal for corrosive environments such as Etch, CVD, and PVD processes.
UHV Process Chambers: Reliable channel switching under the most rigorous vacuum conditions.
Vacuum Coating Equipment: Precision control for optical coating, integrated circuit coating, and corrosive gas environments.
Scientific Research: Essential for surface analysis, material laboratories, and particle accelerators.
Corrosive Vacuum Systems: Long-term stability in systems containing acidic gases or process vapors.

Why Choose the J-Type Transfer Valve?

The high-performance vacuum valves of the J-type series are designed for space-constrained layouts where cleanliness and longevity are paramount. The core advantage lies in the J-shaped space-saving design combined with zero-leakage UHV performance. Compared to gate valves, they offer a more compact footprint; compared to ball valves, they provide superior sealing reliability and lower outgassing. With friction-free opening and closing, these valves generate no particles, ensuring the highest level of system cleanliness and minimal seal wear.

Frequently Asked Questions (FAQ)

1. What are the advantages of the J-type structure? The J-shaped bent layout saves significant installation space, making it ideal for side-chamber mounting, pump ports, and narrow equipment clusters.

2. How do I choose between metal and rubber seals? For ultra-high vacuum and bakeable requirements, metal seals are preferred. For standard high vacuum where cost-efficiency is key, rubber seals are recommended.

3. Can it be integrated with PLC for automatic control? Yes, both pneumatic and electric versions come with position feedback signals, supporting remote control and safety interlocking.

4. Is the valve bakeable? The metal-sealed versions support baking up to 300°C, satisfying the requirements of UHV solutions.

5. Can it withstand coating dust and vapors? Absolutely. The valve plate structure is reinforced to resist adhesion and jamming, making it suitable for PVD and CVD processes.

6. What is the expected service life? Standard models are rated for ≥100,000 cycles, while high-end metal-sealed versions can exceed 1,000,000 cycles with minimal maintenance.

In summary, the High Vacuum J-Type Transfer Valve integrates a compact footprint with UHV-grade sealing, bakeability, and low outgassing. It stands as the benchmark for pipeline isolation in high-end vacuum systems, providing a reliable, clean, and durable solution for semiconductor and research industries worldwide.

Conclusion：The High Vacuum J-Type Transfer Valve is Suitable for semiconductor manufacturing, UHV research, and industrial coating systems. The core advantage is its compact J-type space-saving design combined with friction-free, zero-leakage performance across a wide vacuum range.

Tags :