Vacuum Value

High Vacuum Throttle Valve Precision Linear Flow Control for Semiconductor and Thin Film Processes

High Vacuum Throttle Valve Precision Linear Flow Control for Semiconductor and Thin Film Processes

This high-performance vacuum throttle valve is engineered for precise linear flow regulation and downstream pressure stability in demanding vacuum environments. Utilizing a unique counter-rotating blade mechanism, it minimizes conductance loss while providing exceptional control repeatability. Designed for semiconductor production, thin-film processes, and research applications, it features a compact, low-profile build and full compatibility with major flange standards.

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Product Details

This high-performance High Vacuum Throttle Valve is a specialized vacuum pressure control device engineered for ultra-high vacuum (UHV) environments, linear flow control, and high process repeatability. Utilizing a unique counter-rotating blade set structure, it is suitable for the full range from ultra-high vacuum to atmospheric pressure (5×10⁻⁸ Pa to 1×10⁵ Pa). This valve enables precise linear flow regulation and downstream pressure stabilization in vacuum pipelines.

With advantages such as excellent linear control, minimal conductance loss, a compact structure, and a low-profile design, this equipment is widely used in thin-film processes, semiconductor production, vacuum coating, scientific research UHV devices, and automated vacuum production lines. It stands as a core choice for downstream pressure control in high-end vacuum systems.

Core Features

Unique Counter-Rotating Blade Set: Provides precise linear control across the entire operating range, imposing minimal restriction on the pumping path during evacuation.
Low-Profile Flange Design: Significantly reduces conductance loss and the installation height of the pump set, saving space and optimizing pipeline layout.
Electric Precision Adjustment: Works in tandem with control systems to complete valve flow regulation, making it ideal for automated closed-loop vacuum pressure control.
Premium Material Options: The main body is available in Stainless Steel or Aluminum Alloy (customizable materials), offering high strength and low outgassing for high-cleanliness conditions.
Universal Flange Compatibility: Covers a full range of standard flanges including ISO-F, CF-F, IA SA, and JIS-B, ensuring compatibility with various vacuum systems.
Reliable Rubber Ring Sealing: Ensures zero leakage and meets the stringent requirements of high vacuum systems across diverse process environments.

Product Specifications

Bore Diameter (DN)	Main Material	Actuator Type	Example Model
DN25 ~ DN50	Aluminum Alloy (Optional)	Electric	VAvat-O2113-11-DN25~50
DN60 ~ DN400	Aluminum Alloy (Optional)	Electric	VAvat-O2113-31-DN60~400

Application Fields

The versatility of the throttle valve makes it indispensable in several high-tech sectors:

Thin Film Process Control: Ideal for scenarios requiring high linear control and process repeatability.
Semiconductor Manufacturing: Precise pressure control for wafer processing and thin-film deposition to ensure stability.
Vacuum Coating Equipment: Regulates flow in the pumping path for optical and integrated circuit coating.
Scientific Research: Essential for surface analysis, material labs, and particle accelerators.
Vacuum Furnaces & Heat Treatment: Manages flow in sintering and high-vacuum furnaces to maintain a stable environment.
Automated Production Lines: Integrates with control systems for consistent process results in automated vacuum system setups.

Why Choose Our Throttle Valve?

The core advantage lies in the Counter-Rotating Blade Linear Control + Low Profile Compact Structure + Stable Flow Output. Compared to standard butterfly valves, our throttle valve offers more precise linear control and higher process repeatability. When fully open, conductance loss is negligible, perfectly matching the rigorous demands of semiconductor and thin-film industries.

Stable Linear Flow: Guarantees process consistency and repeatability.
High Pumping Efficiency: Minimal restriction on the pumping path reduces conductance loss.
Optimized Layout: The low-profile design reduces the overall height of the vacuum assembly.

Frequently Asked Questions (FAQ)

1. What is the primary use of this valve?

It is used for precise linear flow regulation and downstream pressure stabilization, especially in thin-film processes where repeatability is critical.

2. What are the benefits of the counter-rotating blades?

They provide linear control throughout the valve's range and ensure that the pumping path is virtually unobstructed when fully open.

3. Can it be used in automated systems?

Yes, the electric drive allows for integration with control systems for automated closed-loop pressure management.

4. Are the materials customizable?

While the standard body is aluminum alloy, we can provide stainless steel or other materials based on specific industrial requirements.

Product Summary

The High Vacuum Throttle Valve integrates precise linear control, low conductance loss, and a compact design into a single high-end solution. By utilizing unique counter-rotating blades and offering multiple flange and material options, it meets the most demanding needs of modern vacuum technology. Whether you are looking to stabilize process pressure or optimize pumping efficiency, this valve provides a durable and efficient solution characterized by high linearity and high repeatability.

Conclusion：The High Vacuum Throttle Valve is Suitable for semiconductor manufacturing, thin film processing, and research laboratories. The core advantage is its unique counter-rotating blade structure providing precise linear flow control and minimal conductance loss。

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