Vacuum Value

High Vacuum All Metal Valve for Semiconductor and UHV Applications

High Vacuum All Metal Valve for Semiconductor and UHV Applications

Engineered for the most demanding semiconductor and ultra-high vacuum (UHV) environments, our all-metal vacuum valves provide a particle-free, high-sealing solution. With advanced axial metal sealing, CF flange compatibility, and optional thermal control, these valves are the industry standard for preventing contamination and ensuring system integrity in critical vacuum applications.

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Product Details

Product Overview

This high-performance High Vacuum All-Metal Valve is a premium vacuum isolation device specifically designed for semiconductor processes, ultra-high vacuum (UHV), and particle-free clean environments. Utilizing a coupled-shaft feed combined with an axial metal sealing structure, it is suitable for the entire range from ultra-high vacuum to atmospheric pressure (1×10⁻⁹ Pa to 1×10⁵ Pa). It achieves particle-free, high-seal isolation within the Vacuum system, completely eliminating the risks of particle contamination and leakage. With core advantages such as zero particles, high sealing integrity, high-temperature resistance, and long service life, it is the essential high-end valve for semiconductor chip manufacturing and advanced scientific research.

Core Features

All-Metal Sealing Design Employs a metal-to-metal sealing structure to ensure zero particle generation. Perfect for UHV and cleanroom conditions, protecting sensitive equipment from contamination.

Coupled Feed + Axial Seal The unique coupled-shaft feed mechanism and axial sealing design ensure stable operation, excellent airtightness, and an extended service life for continuous industrial use.

Precision Control Modes Supports both pneumatic double-acting and pneumatic with solenoid valve configurations. Solenoid-equipped models support emergency interlocking for automated safety responses.

Standard CF Flange Compatibility Equipped with standard CF-F UHV flanges, making it fully compatible with various Ultra-High Vacuum (UHV) systems and easy to install in existing pipelines.

Thermal Management The valve body can be configured with heating or water-cooling structures to precisely control temperature, ensuring vacuum stability under extreme thermal conditions.

Universal Installation Supports installation at any angle, providing flexibility for complex vacuum system layouts while maintaining superior airtightness.

Technical Specifications

Bore Size (DN)	Flange Type	Actuator Type	Example Model No.
DN60 ~ 320	CF-F	Pneumatic, Double Acting	VAvat-R1113-52-B-DN60~320
DN60 ~ 320	CF-F	Pneumatic, with Solenoid Valve	VAvat-R1113-52024-B-DN60~320

Application Fields

Semiconductor Processing: Essential for Semiconductor manufacturing where particle-free environments are critical for wafer yield.
UHV Research Systems: Used in material analysis, physics experiments, and quantum detection where high-seal isolation is mandatory.
Clean Process Equipment: Ideal for any vacuum process requiring extreme cleanliness to prevent equipment degradation.
High-End Vacuum Pumping Stations: Acts as a reliable isolation valve for molecular pumps and ion pumps to extend equipment longevity.

Why Choose Our All-Metal Valve?

The High Vacuum All-Metal Valve is the "Guardian of Cleanliness" for your vacuum environment. Unlike standard valves, our all-metal design eliminates the outgassing and degradation associated with elastomers. It offers:

Zero Particle Contamination: Protecting your delicate semiconductor processes.
Dynamic Stability: Excellent corrosion resistance and long-term durability under UHV conditions.
Temperature Adaptability: Stable vacuum performance regardless of process heat.
Flexible Integration: Compatible with all standard flange types and orientations.

Frequently Asked Questions (FAQ)

1. What is the primary use of this valve?

It is primarily used for particle-free, high-seal isolation in semiconductor manufacturing and ultra-high vacuum systems to prevent contamination.

2. What makes the sealing "all-metal"?

The valve uses metal-to-metal contact for sealing instead of rubber or plastic, which ensures no particles are shed and allows for higher bake-out temperatures.

3. Can the valve handle extreme temperatures?

Yes, with optional heating or water-cooling jackets, the valve maintains its vacuum integrity and operational stability in both high and low-temperature processes.

4. Is it compatible with automated systems?

Absolutely. The pneumatic versions with solenoid valves are designed for seamless integration into automated control loops and safety interlock systems.

Conclusion: The High Vacuum All-Metal Valve is Suitable for semiconductor manufacturing and ultra-high vacuum research facilities. The core advantage is its zero-particle all-metal sealing structure and extreme vacuum stability across a wide pressure range.

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