This high-performance semiconductor transfer valve is a vacuum isolation and wafer transmission device specifically engineered for ultra-high vacuum (UHV), photovoltaic, and semiconductor systems. Designed for environments requiring extremely low particle contamination, it utilizes a sophisticated hinge-type opening and closing structure. It is fully compatible with the entire pressure range from 5×10⁻⁸ Pa to 1×10⁵ Pa, ensuring safe wafer or workpiece transfer and hermetic sealing between vacuum chambers. With its compact design and emergency self-locking mechanism, it stands as the core choice for high-cleanliness vacuum transmission.
Core Features
- Hinge-Type Motion: The hinge-style opening mechanism eliminates friction-induced particles, making it perfect for high-cleanliness semiconductor and PV processes to protect wafer integrity.
- Pneumatic Double-Acting Drive: Ensures stable operation and seamless integration into automated production lines for continuous manufacturing needs.
- Flexible Material Customization: The main body is available in high-grade aviation aluminum or stainless steel, offering high strength, low outgassing, and corrosion resistance for a modern vacuum system.
- Reliable O-Ring Sealing: Provides a zero-leakage solution that meets the stringent requirements of high-vacuum systems, even in hazardous gas or high-temperature environments.
- Expandable Temperature Control: Optional water-cooling and temperature control modules are available to extend equipment life and adapt to high-temperature process requirements.
- Optimized Large-Opening Design: Specifically structural-optimized for large dimensions, ensuring stable dynamic balance and smooth transmission of large-sized wafers or workpieces.
Product Specifications
| Opening Diameter |
Main Material |
Actuator |
Example Model |
| DN500×50 |
Aluminum Alloy (Optional) |
Pneumatic Double-Acting |
VAvat-P1113-61-DN500X50 |
| DN800×100 |
Aluminum Alloy (Optional) |
Pneumatic Double-Acting |
VAvat-P1113-61-DN800X100 |
| DN1500×400 |
Stainless Steel (Optional) |
Pneumatic Double-Acting |
VAvat-P1113-62-DN1500X400 |
| Note: All specifications support customization, including optional water-cooling and temperature control modules. |
Application Fields
Our transfer valves are essential components in various high-tech industries:
- Semiconductor Production: Ideal for wafer processing, process chambers, and transfer chambers where low particle counts are mandatory.
- Photovoltaic (PV) Systems: Ensures cleanliness and stability during the production of solar cells and modules.
- High-Cleanliness Equipment: A top choice for high-clean vacuum equipment that handles hazardous gases or operates under extreme thermal conditions.
- Vacuum Coating: Facilitates smooth wafer transfer and pipe isolation in vacuum coating equipment.
- Automated Production Lines: Supports full automation integration for high-volume semiconductor and PV manufacturing.
- Custom Vacuum Solutions: Provides non-standard sizes and specialized solutions for unique process requirements.
Why Choose Our Semiconductor Transfer Valve?
The core advantage of this valve lies in its hinge-type low-particle operation, emergency self-locking, and long-life maintenance-free design. Unlike standard valves, the particle generation is virtually non-existent, matching the rigorous standards of the semiconductor industry.
Reliability in Harsh Conditions: It operates reliably under hazardous gas and high-temperature conditions. The compact and simple design ensures ease of use while maintaining high performance. Furthermore, the dynamic balance is optimized for large openings, preventing vibration during high-speed cycles. The emergency self-locking feature provides an extra layer of safety, preventing wafer contamination or equipment damage during power or air supply failures.
Frequently Asked Questions (FAQ)
1. What is the primary use of this valve? It is used for vacuum isolation and wafer/workpiece transfer in PV and semiconductor systems, especially where low particle contamination is critical.
2. What are the available drive methods? The valve uses a pneumatic double-acting drive, which is stable and easily integrated into automated control systems.
3. How is the sealing achieved? It uses a high-quality O-ring (rubber ring) seal to ensure zero leakage and high vacuum integrity.
4. Can the materials be customized? Yes, the body can be made from aviation-grade aluminum or stainless steel depending on your corrosion resistance needs and budget.
5. Does it support high-temperature processes? Yes, we offer optional water-cooling and temperature control modules for specialized high-temperature applications.
6. How long is the service life? Thanks to the robust hinge structure and low-friction design, the valve offers a long operating life with minimal maintenance requirements.
Conclusion：The Semiconductor Transfer Valve is Suitable for Semiconductor and Photovoltaic manufacturers requiring ultra-clean environments. The core advantage is its hinge-type low-particle opening mechanism, emergency self-locking safety feature, and exceptional reliability in UHV conditions.
