High Vacuum T Type Transfer Valve for Semiconductor and Coating Systems

This high-performance High Vacuum T-Type Transfer Valve is a precision-engineered vacuum isolation and transmission device designed specifically for ultra-high vacuum (UHV), high cleanliness, multi-path switching, and long-service-life conditions. Utilizing a specialized T-type three-way structure, it is perfectly suited for the full pressure range from 5×10⁻⁸ Pa to 1×10⁵ Pa. This versatility allows for rapid switching, isolation, diversion, and merging of three-way chambers or pipelines. As a core component in premium vacuum pump accessories, it features low outgassing, zero leakage, bakeability, and dust resistance, making it indispensable for semiconductor processing and advanced research.

Core Features & Advantages

• T-Type Three-Way Configuration: Enables seamless switching between three channels, allowing for diversion, merging, or isolation with a flexible layout.
• Wide Vacuum Range: Stable operation from ultra-high vacuum levels up to atmospheric pressure.
• Dual Sealing Options: Available with either high-quality rubber ring seals or advanced bellows sealing to meet specific application needs.
• Clean Stainless Steel Construction: Low outgassing and zero-pollution materials ensure compatibility with high-cleanliness environments.
• Bakeable Design: Supports high-temperature baking for rapid degassing, essential for UHV systems.
• Maintenance-Free Longevity: Engineered to resist dust and prevent valve jamming, supporting high-cycle automated integration.

Technical Specifications

Primary Application Fields

Our high vacuum valves are widely utilized across various high-tech industries:

• Semiconductor Manufacturing: Critical for wafer processing, process chambers, and transfer chamber isolation.
• Etching & Thin Film Deposition: Compatible with corrosive environments found in Etch, CVD, and PVD processes.
• Vacuum Coating Equipment: Ideal for optical coating and integrated circuit coating where dust resistance is vital.
• Scientific Research: Used in surface analysis, material laboratories, and particle accelerators requiring UHV isolation.
• Helium Leak Detection: Ensures the integrity of automated vacuum production lines.

Frequently Asked Questions (FAQ)

1. What is the main advantage of the T-type structure?

It allows for the control of three pipelines simultaneously, enabling diversion and merging while reducing the total number of valves needed in a system.

2. How do I choose between metal and rubber seals?

Metal seals are recommended for UHV and bakeable applications, while rubber seals are cost-effective for standard high vacuum requirements.

3. Can this valve be integrated into a PLC system?

Yes, both pneumatic and electric versions come with position feedback signals for remote control and interlocking.

4. Is it resistant to coating dust and vapors?

Absolutely. The valve plate is reinforced to prevent adhesion and jamming, making it perfect for PVD/CVD processes.

5. What is the expected service life?

Standard models are rated for ≥100,000 cycles, while metal-sealed versions can exceed 1,000,000 cycles with minimal maintenance.

When sourcing UHV components, reliability is paramount. Our T-type valves support KF, ISO, and CF standard flanges, ensuring they can directly replace imported valves without system modifications.