Engineered for precision, our high vacuum diaphragm valve offers a seal-less, zero-leakage solution for demanding environments. Constructed from 316L EP stainless steel, it ensures high purity, corrosion resistance, and long-term reliability in semiconductor, solar, and chemical processing industries.
Our high vacuum gate valves are engineered for demanding applications including semiconductor manufacturing and harsh industrial environments. With options for pneumatic or manual operation, multiple flange standards (ISO-F, CF-F, etc.), and superior sealing technology, these valves provide a friction-free, particle-free, and highly reliable solution for critical vacuum system isolation and protection.
Engineered for the most demanding semiconductor and ultra-high vacuum (UHV) environments, our all-metal vacuum valves provide a particle-free, high-sealing solution. With advanced axial metal sealing, CF flange compatibility, and optional thermal control, these valves are the industry standard for preventing contamination and ensuring system integrity in critical vacuum applications.
Our high-vacuum fast-acting protection valve is engineered for critical applications in semiconductor processing and chip manufacturing. Featuring rapid pneumatic response, robust axial sealing, and multi-material construction (aluminum/stainless steel), this valve provides reliable emergency shut-off and contamination control for high-vacuum systems ranging from 5×10⁻⁸ Pa to 1×10⁵ Pa.
This high-performance water-cooled and temperature-controlled high vacuum gate valve is engineered for demanding applications requiring extreme vacuum levels and precise thermal regulation. Featuring a robust die-cast construction, it supports temperatures up to 200°C while maintaining superior airtight integrity. Perfectly suited for semiconductor manufacturing, vacuum coating, and research environments, this valve offers flexible installation, long-term reliability, and seamless compatibility with molecular pumps.
Engineered for ultra-high vacuum and semiconductor applications, this high-performance gate valve features a linear lift-gate design for rapid, low-particle, and vibration-free isolation. Available in customizable sizes and materials, it is the ideal solution for 200mm, 300mm, and 450mm wafer load lock systems.
This high-performance high vacuum butterfly valve is engineered for ultra-high vacuum environments (5×10⁻⁸ Pa to 1×10⁵ Pa). It features a lightweight, compact design with rapid response and precise flow regulation capabilities. Ideal for semiconductor CVD/ALD processes, vacuum coating, and research applications, it supports multiple drive options (electric/pneumatic), various flange standards (ISO-KF, CF, etc.), and customizable sealing materials to ensure long-term reliability in demanding industrial vacuum systems.
Our High Vacuum T-Type Transfer Valve is engineered for demanding UHV and cleanroom environments. Featuring a versatile 3-way configuration for flow diversion and isolation, this valve provides low outgassing, zero leakage, and long-cycle reliability. Ideal for semiconductor manufacturing, vacuum coating, and research applications, it supports automated control and high-temperature baking to ensure optimal system performance.
Our high-performance J-type transfer valve is engineered for ultra-high vacuum (UHV) environments, offering a compact, space-saving design with exceptional sealing reliability. Built from high-grade stainless steel or aluminum, it supports bakeable operations, low outgassing, and long-cycle maintenance-free performance, making it the ideal choice for semiconductor manufacturing, vacuum coating, and advanced research facilities.
Engineered for precision, our high vacuum diaphragm valve offers a seal-less, zero-leakage solution for demanding environments. Constructed from 316L EP stainless steel, it ensures high purity, corrosion resistance, and long-term reliability in semiconductor, solar, and chemical processing industries.
Our high vacuum gate valves are engineered for demanding applications including semiconductor manufacturing and harsh industrial environments. With options for pneumatic or manual operation, multiple flange standards (ISO-F, CF-F, etc.), and superior sealing technology, these valves provide a friction-free, particle-free, and highly reliable solution for critical vacuum system isolation and protection.
Engineered for the most demanding semiconductor and ultra-high vacuum (UHV) environments, our all-metal vacuum valves provide a particle-free, high-sealing solution. With advanced axial metal sealing, CF flange compatibility, and optional thermal control, these valves are the industry standard for preventing contamination and ensuring system integrity in critical vacuum applications.
Our high-vacuum fast-acting protection valve is engineered for critical applications in semiconductor processing and chip manufacturing. Featuring rapid pneumatic response, robust axial sealing, and multi-material construction (aluminum/stainless steel), this valve provides reliable emergency shut-off and contamination control for high-vacuum systems ranging from 5×10⁻⁸ Pa to 1×10⁵ Pa.
This high-performance water-cooled and temperature-controlled high vacuum gate valve is engineered for demanding applications requiring extreme vacuum levels and precise thermal regulation. Featuring a robust die-cast construction, it supports temperatures up to 200°C while maintaining superior airtight integrity. Perfectly suited for semiconductor manufacturing, vacuum coating, and research environments, this valve offers flexible installation, long-term reliability, and seamless compatibility with molecular pumps.
Engineered for ultra-high vacuum and semiconductor applications, this high-performance gate valve features a linear lift-gate design for rapid, low-particle, and vibration-free isolation. Available in customizable sizes and materials, it is the ideal solution for 200mm, 300mm, and 450mm wafer load lock systems.
This high-performance high vacuum butterfly valve is engineered for ultra-high vacuum environments (5×10⁻⁸ Pa to 1×10⁵ Pa). It features a lightweight, compact design with rapid response and precise flow regulation capabilities. Ideal for semiconductor CVD/ALD processes, vacuum coating, and research applications, it supports multiple drive options (electric/pneumatic), various flange standards (ISO-KF, CF, etc.), and customizable sealing materials to ensure long-term reliability in demanding industrial vacuum systems.
Our High Vacuum T-Type Transfer Valve is engineered for demanding UHV and cleanroom environments. Featuring a versatile 3-way configuration for flow diversion and isolation, this valve provides low outgassing, zero leakage, and long-cycle reliability. Ideal for semiconductor manufacturing, vacuum coating, and research applications, it supports automated control and high-temperature baking to ensure optimal system performance.
Our high-performance J-type transfer valve is engineered for ultra-high vacuum (UHV) environments, offering a compact, space-saving design with exceptional sealing reliability. Built from high-grade stainless steel or aluminum, it supports bakeable operations, low outgassing, and long-cycle maintenance-free performance, making it the ideal choice for semiconductor manufacturing, vacuum coating, and advanced research facilities.
