This high-performance high vacuum butterfly valve is engineered for ultra-high vacuum environments (5×10⁻⁸ Pa to 1×10⁵ Pa). It features a lightweight, compact design with rapid response and precise flow regulation capabilities. Ideal for semiconductor CVD/ALD processes, vacuum coating, and research applications, it supports multiple drive options (electric/pneumatic), various flange standards (ISO-KF, CF, etc.), and customizable sealing materials to ensure long-term reliability in demanding industrial vacuum systems.
This high-performance high vacuum butterfly valve is engineered for ultra-high vacuum environments (5×10⁻⁸ Pa to 1×10⁵ Pa). It features a lightweight, compact design with rapid response and precise flow regulation capabilities. Ideal for semiconductor CVD/ALD processes, vacuum coating, and research applications, it supports multiple drive options (electric/pneumatic), various flange standards (ISO-KF, CF, etc.), and customizable sealing materials to ensure long-term reliability in demanding industrial vacuum systems.
