High Vacuum S Type Transfer Valve for Semiconductor and Coating Applications

This High Vacuum S-Type Transfer Valve is a high-performance vacuum isolation and transmission device specifically designed for ultra-high vacuum (UHV), high cleanliness, low disturbance, and long-life operating conditions. Utilizing an S-type streamlined smooth channel structure, it is suitable for the full range of operations from ultra-high vacuum to atmospheric pressure. It enables low-flow resistance transmission, efficient isolation, and stable sealing for chambers and pipelines. As a core control component of high-performance vacuum equipment, it offers advantages such as low outgassing, zero leakage, bakeability, dust resistance, and rapid switching.

Core Features

• S-Type Streamlined Structure: Smooth channels ensure stable airflow, low flow resistance, and no dead zones for dust accumulation.
• Wide Vacuum Range: Stable switching performance from UHV levels up to atmospheric pressure.
• Dual Sealing Options: Choose between Rubber Sealing or Metal Sealing to meet different cleanliness and vacuum requirements.
• Clean Material Construction: High-grade stainless steel or aluminum alloy options provide low outgassing and zero contamination.
• High-Temperature Bakeability: Supports rapid degassing, making it ideal for UHV systems.
• Maintenance-Free Longevity: Anti-dust design prevents valve jamming and supports seamless automation integration.

Technical Specifications

Application Fields

• Semiconductor Production: Ideal for wafer processing, process chambers, and semiconductor chambers isolation.
• Etching & Thin Film Deposition: Compatible with Etch, CVD, and PVD corrosive process environments.
• Vacuum Coating: Used in optical coating, integrated circuit coating, and vacuum coating systems.
• Scientific Research: Essential for surface analysis, material labs, and particle accelerators.
• Industrial Vacuum Furnaces: Reliable isolation for high-temperature vacuum furnace applications.
• Corrosive Environments: Long-term stability in systems containing acidic gases or process vapors.

Why Choose the S-Type Transfer Valve?

The High Vacuum S-Type Transfer Valve is engineered for scenarios requiring smooth transmission and minimal disturbance. Its core advantage lies in the combination of the S-type streamlined flow, clean materials, and zero-leakage sealing. Compared to right-angle valves, the airflow is significantly more stable; compared to straight-through valves, the structure is more compact with superior dust resistance. The friction-free opening and closing mechanism ensures no particle generation, resulting in higher cleanliness and extended seal life. With its robust corrosion resistance and stable dynamic balance of internal moving parts, it is the preferred choice for high-end vacuum systems.

Frequently Asked Questions