Engineered for ultra-high vacuum and semiconductor applications, this high-performance gate valve features a linear lift-gate design for rapid, low-particle, and vibration-free isolation. Available in customizable sizes and materials, it is the ideal solution for 200mm, 300mm, and 450mm wafer load lock systems.
This high-performance high vacuum flap valve is engineered for ultra-high vacuum and large-flow applications, including photovoltaic production and large-scale coating systems. With a robust flap design, pneumatic dual-action drive, and options for rubber or magnetic fluid sealing, it offers superior stability, low particle generation, and full customization for non-standard vacuum requirements.
Our semiconductor transfer valves are engineered for high-cleanliness, low-particle environments in semiconductor and photovoltaic manufacturing. Featuring a robust hinge-type design, pneumatic dual-action operation, and customizable options for temperature control and materials, these valves provide superior vacuum isolation and safe, stable wafer transport for demanding industrial applications.
Engineered for demanding ultra-high vacuum applications, our large aperture electric rectangular gate valves offer exceptional sealing uniformity, integrated control, and robust stability. Available in customizable sizes and mounting configurations, these valves are the ideal solution for space simulation chambers, large-scale coating production lines, and heavy-duty vacuum research equipment.
This high-performance High Vacuum Transfer Valve is engineered for large-aperture, ultra-high vacuum environments such as photovoltaic production, large-scale coating systems, and semiconductor processing. Featuring a robust pneumatic dual-action design, low-particle generation, and a removable base for simplified maintenance, it provides reliable, long-lasting isolation and transmission for demanding industrial vacuum applications.
This high-performance high vacuum rectangular gate valve is engineered for ultra-high vacuum and cleanroom environments. Featuring a compact linear design, it offers superior sealing, low particle generation, and full customization options including water cooling and temperature control, making it the ideal solution for semiconductor and vacuum coating systems.
Our high-vacuum large pendulum valves offer a superior solution for large-diameter, space-constrained vacuum systems. Engineered for low-particle performance and high reliability, these valves support a wide range of pressures from 5×10⁻⁸ Pa to atmospheric pressure. With customizable options including heating/cooling modules and multiple pneumatic drive configurations, they are the perfect choice for demanding applications in semiconductor, LCD, and thin-film coating industries.
This high-performance pneumatic pendulum valve is engineered for ultra-high vacuum environments (5×10⁻⁸ Pa to 1×10⁵ Pa). With its compact, low-vibration, and low-particle design, it provides reliable isolation for semiconductor processes, vacuum coating, and research equipment. Featuring modular maintenance, customizable heating/cooling options, and universal flange compatibility, it is the premier choice for space-constrained, high-purity vacuum systems.
Our High Vacuum T-Type Transfer Valve is engineered for demanding UHV and cleanroom environments. Featuring a versatile 3-way configuration for flow diversion and isolation, this valve provides low outgassing, zero leakage, and long-cycle reliability. Ideal for semiconductor manufacturing, vacuum coating, and research applications, it supports automated control and high-temperature baking to ensure optimal system performance.
Our high-vacuum S-type transfer valve is engineered for ultra-high vacuum (UHV) environments requiring low flow resistance and high cleanliness. Featuring a streamlined S-shaped design, it minimizes turbulence and particle accumulation, making it perfect for semiconductor, thin-film deposition, and research applications. With options for metal or rubber seals, bakeable capabilities, and long-cycle durability, this valve provides a reliable, maintenance-free solution for critical vacuum process control.
Our High Vacuum L-Type Transfer Valve is engineered for demanding ultra-high vacuum (UHV) environments. With a space-saving 90-degree design, low-outgassing stainless steel construction, and versatile sealing options (FKM/Metal), this valve provides reliable, particle-free isolation for semiconductor manufacturing, thin-film deposition, and research vacuum systems. It supports automated control and offers an extended service life, making it the ideal choice for high-precision vacuum applications.
Engineered for ultra-high vacuum and semiconductor applications, this high-performance gate valve features a linear lift-gate design for rapid, low-particle, and vibration-free isolation. Available in customizable sizes and materials, it is the ideal solution for 200mm, 300mm, and 450mm wafer load lock systems.
This high-performance high vacuum flap valve is engineered for ultra-high vacuum and large-flow applications, including photovoltaic production and large-scale coating systems. With a robust flap design, pneumatic dual-action drive, and options for rubber or magnetic fluid sealing, it offers superior stability, low particle generation, and full customization for non-standard vacuum requirements.
Our semiconductor transfer valves are engineered for high-cleanliness, low-particle environments in semiconductor and photovoltaic manufacturing. Featuring a robust hinge-type design, pneumatic dual-action operation, and customizable options for temperature control and materials, these valves provide superior vacuum isolation and safe, stable wafer transport for demanding industrial applications.
Engineered for demanding ultra-high vacuum applications, our large aperture electric rectangular gate valves offer exceptional sealing uniformity, integrated control, and robust stability. Available in customizable sizes and mounting configurations, these valves are the ideal solution for space simulation chambers, large-scale coating production lines, and heavy-duty vacuum research equipment.
This high-performance High Vacuum Transfer Valve is engineered for large-aperture, ultra-high vacuum environments such as photovoltaic production, large-scale coating systems, and semiconductor processing. Featuring a robust pneumatic dual-action design, low-particle generation, and a removable base for simplified maintenance, it provides reliable, long-lasting isolation and transmission for demanding industrial vacuum applications.
This high-performance high vacuum rectangular gate valve is engineered for ultra-high vacuum and cleanroom environments. Featuring a compact linear design, it offers superior sealing, low particle generation, and full customization options including water cooling and temperature control, making it the ideal solution for semiconductor and vacuum coating systems.
Our high-vacuum large pendulum valves offer a superior solution for large-diameter, space-constrained vacuum systems. Engineered for low-particle performance and high reliability, these valves support a wide range of pressures from 5×10⁻⁸ Pa to atmospheric pressure. With customizable options including heating/cooling modules and multiple pneumatic drive configurations, they are the perfect choice for demanding applications in semiconductor, LCD, and thin-film coating industries.
This high-performance pneumatic pendulum valve is engineered for ultra-high vacuum environments (5×10⁻⁸ Pa to 1×10⁵ Pa). With its compact, low-vibration, and low-particle design, it provides reliable isolation for semiconductor processes, vacuum coating, and research equipment. Featuring modular maintenance, customizable heating/cooling options, and universal flange compatibility, it is the premier choice for space-constrained, high-purity vacuum systems.
Our High Vacuum T-Type Transfer Valve is engineered for demanding UHV and cleanroom environments. Featuring a versatile 3-way configuration for flow diversion and isolation, this valve provides low outgassing, zero leakage, and long-cycle reliability. Ideal for semiconductor manufacturing, vacuum coating, and research applications, it supports automated control and high-temperature baking to ensure optimal system performance.
Our high-vacuum S-type transfer valve is engineered for ultra-high vacuum (UHV) environments requiring low flow resistance and high cleanliness. Featuring a streamlined S-shaped design, it minimizes turbulence and particle accumulation, making it perfect for semiconductor, thin-film deposition, and research applications. With options for metal or rubber seals, bakeable capabilities, and long-cycle durability, this valve provides a reliable, maintenance-free solution for critical vacuum process control.
Our High Vacuum L-Type Transfer Valve is engineered for demanding ultra-high vacuum (UHV) environments. With a space-saving 90-degree design, low-outgassing stainless steel construction, and versatile sealing options (FKM/Metal), this valve provides reliable, particle-free isolation for semiconductor manufacturing, thin-film deposition, and research vacuum systems. It supports automated control and offers an extended service life, making it the ideal choice for high-precision vacuum applications.
