Hanbell 1252 Dry Vacuum Pump Applications in Semiconductor and Industrial Sectors

I. Five Major Application Scenarios

II. Semiconductor Wafer Fab Application

2.1 6/8-inch Wafer Fab

• Hanbell 1252 main application: 6/8-inch wafer etching + PECVD backing pump
• Process gas: Cl₂, SiH₄, NH₃
• Typical working conditions: 80-120°C, continuous 24/7
• Key wear parts:
• Upper/lower pump gears (tooth pitting 18-24 months)
• X & Y rotor shafts (bearing journal wear 24-36 months)

2.2 Maintenance Case Study (July 2026)

• Customer: An optoelectronic factory in Xiamen
• Failure: Hanbell 1252 lower pump gear pitting after 16 months
• Symptom: Ultimate vacuum dropped, abnormal gear noise
• Diagnosis: Gear pitting + rotor shaft bearing journal wear
• Parts: Taixing upper/lower pump gears + upper/lower pump X & Y rotor shafts (OEM-spec)
• Replacement duration: 8 hours
• Result: Vacuum recovered, vibration and noise back to normal

III. FPD Factory Application

3.1 PECVD Process

• Hanbell 1252 application: FPD PECVD backing pump
• Process gas: SiH₄ + NH₃
• Temperature: 200-400°C
• Key parts: Drive gears (continuous high-load meshing) + Rotor shafts

3.2 Maintenance Recommendations

• Check gear meshing condition every 12 months
• Replace X & Y rotor shafts every 24 months

IV. Solar Photovoltaic Application

4.1 Thin Film Deposition

• Hanbell 1252 application: Thin film silicon solar PECVD
• Process gas: SiH₄ + H₂
• Key parts: Gears + Rotor shafts (15-18 months)

4.2 Maintenance Recommendations

• Annual check of gear tooth surface wear
• Shaft components replacement 18-24 months

V. Vacuum Metallurgy Application

5.1 Vacuum Melting

• Hanbell 1252 application: Specialty metal vacuum melting
• Process gas: Ar + N₂
• Temperature: 1500-1800°C (furnace side, pump outside)
• Key parts: Rotor shafts (high-torque continuous load 18-24 months)

5.2 Maintenance Recommendations

• Check rotor shaft journals every 12 months
• Gear replacement 18-24 months

VI. Laboratory R&D Application

6.1 Intermittent Process

• Hanbell 1252 application: Small batch experiment
• Operating characteristics: 4-8 hours/day
• Key parts: Rotor shafts (24-36 months)

VII. Typical Failures & Solutions

7.1 Gear Tooth Pitting

• Symptom: Periodic knocking noise, vibration increase
• Root cause: Contact fatigue / Poor lubrication
• Solution: Replace upper/lower pump gears (Taixing carburized + ground, OEM-spec)

7.2 Rotor Shaft Journal Wear

• Symptom: Vibration increase, rotor rub risk
• Root cause: Bearing wear / Particle contamination
• Solution: Replace X & Y rotor shafts (straightness ≤0.02mm)

7.3 Abnormal Gear Noise

• Symptom: Gear meshing noise increases
• Root cause: Tooth profile wear / Backlash out of tolerance
• Solution: Replace gear pair as a set, re-adjust backlash

7.4 Shaft Corrosion

• Symptom: Journal surface roughness increases
• Root cause: Corrosive gas ingress
• Solution: Replace with new shaft + confirm seal condition

VIII. Maintenance Strategy

IX. FAQ

Q1: What processes is Hanbell 1252 suitable for?

A: 6/8-inch wafer fab backing + FPD + Solar PV + Vacuum metallurgy + Laboratory R&D.

Q2: How often should gears be replaced?

A: 18-24 months (continuous process) / 24-30 months (intermittent process).

Q3: What to do if gear noise occurs?

A: Check tooth surface condition → Confirm backlash → If pitting found, replace gear pair as a set.

Q4: How to prevent rotor shaft wear?

A: Timely bearing replacement + Regular vibration monitoring + Keep process by-products out.

Q5: Can the shaft blanks be machined locally by customer?

A: Yes. Blanks are quenched + tempered and NDT-inspected with machining allowance, ready for finishing.

Q6: How long is the Hanbell 1252 major overhaul interval?

A: 18-24 months (semiconductor process) or 24-30 months (clean process).

Q7: How many Hanbell 1252 parts does Taixing have in stock?

A: 20+ pieces regular parts, 24h response.