Edwards IXH1210H Dry Vacuum Pump Parts Material & Process Analysis

1. 4-Model Material & Process Core Differences

2. IXH1210H Standard Rotors: Nodular Cast Iron Precision Process

2.1 X2-Y4 / LV Standard Rotors

Figure: X2 Rotor — IXH1210H/IXH1210 Base Model

图：X2 Rotor

Figure: LV Rotor — IXH1210H/IXH1820 Universal Base

图：LV Rotor

Standard Process Three-Step:

· Substrate: Nodular cast iron QT600-3 (tensile strength ≥600 MPa)

· Precision machining: CNC turning, end-face runout ≤0.01mm

· Dynamic balancing: G2.5 grade @ 12000 RPM

3. IXH1210 Single Model Rotors (5-Stage Series)

IXH1210 is the only one of the 4 models with X5/Y5 rotors:

Process Description: X5/Y5 rotors use special end-face profile (high compression ratio), paired with 5TH stator to achieve 5-stage compression.

4. 1820HTX High Temperature Version Rotors

1820HTX rotors require special material process:

High Temperature Process Points:

· Ni content spectral detection ≥16%

· High temperature dynamic balance G2.5 grade @ 12000 RPM (re-checked under 150℃ working condition)

· Surface nitriding treatment (improve hardness + high temperature oxidation resistance)

5. Multi-Stage Stators: 2ND-5TH + LV

Figure: 3RD Stator — IXH1210H/IXH1820 Multi-Stage Stator

图：3RD Stage Stator

Stator Design Points:

· Nodular cast iron substrate (QT600-3)

· Inner hole precision grinding (Ra ≤0.4μm)

· End-face runout ≤0.02mm

· Rotor-to-stator clearance 0.10-0.15mm

6. Chamber Categories (1&2-Stage / 3-Stage / 4-Stage / 5-Stage / LV)

6.1 Multi-Stage Chamber Sealing Technology

Multi-Stage Chamber Core Process:

· Nodular cast iron QT600-3 substrate

· Inner hole precision grinding Ra ≤0.4μm

· End-face runout ≤0.02mm

· Multi-stage O-ring seal groove precision machining

· Assembly clearance 0.08-0.12mm

7. Shaft Components

8. Transmission and Seal Components

8.1 Tension Bush

Figure: Tension Bush — Key Transmission Component

图：Tension Bush

8.2 Water Cooling Bars

Water Cooling Bar Key Process:

· Inner hole precision grinding Ra ≤0.8μm

· Welded joint 100% helium mass spectrometer leak detection

· Working pressure 0.4-0.6 MPa

· Temperature resistance: Standard version 150℃, 1820HTX version 200℃

8.3 Motor Couplings

Figure: Motor Coupling — Key Transmission Component

图：Motor Coupling

Motor Coupling Key Process:

· High temperature bearing grease (temperature resistance 200℃)

· Elastomer uses FKM

· Dynamic balance G2.5 grade

8.4 LV Spiral Rotor Locating Pin

Figure: LV Spiral Rotor Locating Pin — Key Locating Component

图：LV Spiral Rotor Locating Pin

9. 1820HTX High Temperature Process Overview

1820HTX Process Challenges

├─ Rotor Ni content ≥16% (temperature resistance 200℃)

├─ 5-stage chamber multi-stage sealing technology

├─ Motor coupling high temperature bearing lubrication

├─ Water cooling bar 316L + high temperature seal

├─ LV spiral rotor locating pin 45 steel quenching

└─ Rotor blank (for precision machining preform)

10. Material Selection Decision Recommendation

Working Condition

├─ Standard semiconductor process → IXH1210H standard rotor + 2ND-4TH/LV multi-stage stator

├─ High-clean wafer fab → IXH1820 upgraded rotor + 5-stage chamber

├─ High temperature heat treatment → 1820HTX high temperature version full set

├─ Laboratory/R&D → IXH1210 standard rotor

└─ Large PECVD → IXH1820 + water cooling bar

11. FAQ

Q1: What's the process difference between IXH1210H and IXH1210 rotors?

A: X2/Y2 rotors have different part numbers (independent vs common), but the process is all nodular cast iron + precision turning + dynamic balance G2.5.

Q2: What's the 1820HTX high temperature version rotor process?

A: Ni content ≥16%, nitriding treatment, high temperature dynamic balance.

Q3: What's the difference between 5-stage chamber and 3-stage chamber?

A: 5-stage chamber is exclusive to IXH1210, multi-stage seal for high compression ratio. 3-stage chamber is common to all 4 models.

Q4: What's the difference between water cooling bar 1 and water cooling bar 2?

A: No.1 water cooling bar is installed on the backing side, No.2 on the roots side. 1820HTX version uses 316L stainless steel.

Q5: Is the motor coupling a high temperature bearing?

A: Motor coupling used in 1820HTX uses high temperature bearing grease, temperature resistance 200℃.

Q6: Can IXH1210H use the sintered filter?

A: Yes (IXH1220 uses it), but 1820HTX high temperature pump is not recommended to use the sintered filter (temperature resistance limit).