Edwards IGX100 Dry Vacuum Pump Applications in Semiconductor and Industrial Sectors

I. Five Major Application Scenarios Overview

II. Semiconductor Wafer Fab Application

2.1 8-inch Wafer Fab

· IGX100 main application: 8-inch wafer etching, diffusion, PECVD

· Process gas: Cl₂, SiH₄, NH₃

· Typical working conditions: Temperature 80-120℃, continuous 24/7

· Key wear parts:

· X/Y drive shaft (high load 15-18 months)

· 5th stage chamber (particle wear 15-18 months)

2.2 Maintenance Practice Case (June 2026)

· Customer: An 8-inch wafer fab in Shanghai

· Failure: X/Y drive shaft keyway wear after 16 months operation

· Symptom: Vibration value suddenly increased to 3.8 mm/s, transmission abnormal noise

· Diagnosis: Keyway worn 0.3mm, exceeding tolerance

· Parts: Taixing 40Cr tempered X/Y shaft (HB280-320)

· Replacement duration: 5 hours

· Result: Vibration recovered to 1.5 mm/s, abnormal noise eliminated

III. FPD Factory Application

3.1 PECVD Process

· IGX100 application: Gen 4.5/5 PECVD

· Process gas: SiH₄ + NH₃

· Temperature: 200-400℃

· Key parts:

· X2-Y4 rotors (NH₃ particle wear 12-15 months)

· 2-3 stage chambers (inner wall fouling)

3.2 Maintenance Recommendations

· Inspect X2-Y4 rotors every 12 months

· Clean 2-3 stage chambers every 18 months

IV. Solar Photovoltaic Application

4.1 Thin Film Deposition

· IGX100 application: Thin film silicon solar PECVD

· Process gas: SiH₄ + H₂

· Key parts:

· XLV/YLV rotors (high load continuous operation 10-12 months)

4.2 Maintenance Recommendations

· Inspect XLV/YLV rotors annually

· Replace every 18 months

V. Vacuum Metallurgy Application

5.1 Vacuum Melting

· IGX100 application: Metal vacuum melting

· Process gas: Ar + N₂

· Temperature: 1500-1800℃

· Key parts:

· 1st stage rotor (high load 12-15 months)

· Exhaust chamber (particle accumulation)

5.2 Maintenance Recommendations

· Inspect 1st stage rotor annually

· Clean exhaust chamber every 12 months

VI. Laboratory R&D Application

6.1 Intermittent Process

· IGX100 application: Small batch experiment

· Operation characteristics: 4-8 hours/day

· Key parts:

· Lower pump X/Y shaft (low load 18-24 months)

VII. Typical Failures & Solutions

7.1 X/Y Drive Shaft Keyway Wear

· Symptom: Transmission abnormal noise, sudden vibration increase

· Root cause: Keyway worn exceeding tolerance

· Solution: Replace 40Cr tempered X/Y shaft

7.2 XLV/YLV Rotor Pitting

· Symptom: Efficiency decline, increased particles

· Root cause: Corrosive gas pitting

· Solution: Replace XLV/YLV rotor (Ni upgraded to 16%)

7.3 5th Stage Chamber Particle Wear

· Symptom: Ultimate vacuum decline

· Root cause: Process particle wear

· Solution: Replace 5th stage chamber

7.4 Exhaust Chamber Particle Accumulation

· Symptom: Pumping efficiency decline

· Root cause: Particle accumulation

· Solution: Clean or replace exhaust chamber

VIII. Maintenance Strategy

IX. FAQ

Q1: What processes is IGX100 suitable for?

A: 8-inch wafer fab medium pumping speed process + FPD + Solar PV + Vacuum metallurgy.

Q2: Can IGX100 and IXH4550 parts be interchanged?

A: Partially. X2-Y4 rotors may be compatible, but X/Y drive shafts differ.

Q3: How long do X/Y drive shafts last?

A: 15-18 months (8-inch wafer fab) / 18-24 months (clean process).

Q4: Is 5th stage chamber more wear-resistant than 2nd stage?

A: Not necessarily. 5th has lower pressure but finer particles, 2nd has higher pressure but coarser particles.

Q5: How long is the IGX100 major overhaul interval?

A: 18 months (semiconductor process) or 24 months (clean process).

Q6: Is 1st stage rotor the same material as X2-Y4 rotors?

A: Same material (nodular iron QT600-3), but different size and profile.

Q7: How many IGX100 parts does Taixing have in stock?

A: 50+ pieces regular parts, 24h response nationwide.