Edwards IH600 IH1000 IH1800 Dry Vacuum Pump Applications in Semiconductor and Industrial Sectors

I. 3-Model Family Process Positioning

Edwards IH600 / IH1000 / IH1800 are 3 closely related models covering the application scenarios from compact to large:

II. Semiconductor Industry Applications

2.1 6-inch / 8-inch Wafer Fabs (IH1000/IH1800 Main Force)

2.2 IH1800 Special Value (HV Rotor)

Applicable Processes:

· Polysilicon etching (containing Cl₂/BCl₃)

· Aluminum etching (containing Cl₂/BCl₃)

· Dielectric etching (containing CF₄/SF₆)

· High vacuum process (≤10⁻⁵ Pa range)

Advantages:

· HV rotor Ni ≥10%, corrosion-resistant life extension

· Vacuum level improvement by 1-2 orders of magnitude

· Direct replacement of IH1800 standard rotor

Note: The IH series does not have IXH 16%+ Ni high-nickel rotors. HV rotor (≥10% Ni) is the IH family's corrosion-resistant upgrade solution.

2.3 5 Maintenance Points Most Concerned by the Semiconductor Industry

· HV Rotor vs. Standard Rotor Selection: Select HV rotor for etching processes containing Cl₂/BCl₃/SF₆

· LTC Shaft Seal Life: 8000-12000h in high-cleanliness chambers

· Filter Element Blockage: Wafer fab 24/7 operation, check every 3-6 months

· Bellows Fatigue: Causes vacuum leak, axial runout

· Friction Ring Wear: Causes increased vibration, increased noise

III. Flat Panel Display (FPD) Industry

3.1 FPD Process Characteristics

· Large-area vacuum chambers (Gen 6 / Gen 8.5)

· Long pump-down time (30-45s to working vacuum)

· Dry pump requires long-term stable operation

3.2 3-Model FPD Industry Applications

IV. Solar Photovoltaic Industry

4.1 PV Process Characteristics

· Mass production, cost-sensitive

· Relatively clean process gas (no strong corrosiveness)

· Standard version rotors are sufficient

4.2 3-Model Parts Selection Recommendations

V. Vacuum Metallurgy and Heat Treatment

5.1 Process Characteristics

· Medium-high temperature (500-1500°C)

· Containing metal vapor, dust

· Dry pump backing pump requires reliable filtration

5.2 Parts Wear Sequence (IH1800)

· Phase 1 (3-6 months): Filter element saturation

· Phase 2 (6-12 months): LTC shaft seal leakage

· Phase 3 (12-24 months): HV rotor end-face wear

· Phase 4 (24-36 months): Bellows fatigue

VI. Laboratory / Small Batch Production

6.1 Laboratory Characteristics

· Variable processes (different experiments)

· Frequent start-stop

· High equipment reliability requirements

6.2 3-Model Laboratory Applications

· IH600: Standard laboratory

· IH1000: Standard + occasional corrosion process

· IH1800: Large test bench

Parts Specificity:

· Standard rotor is sufficient

· T-type filter for low cleanliness

· Standard filter element

VII. Maintenance Case Studies

Case 1: 6-inch Wafer Fab IH1000 Abnormal Vibration

Fault Phenomenon:

· Pump body abnormal noise, vibration ≥3.8 mm/s

· Pump-down time extended from 32s to 58s

· Motor current fluctuation ±10%

Diagnosis:

· X3 rotor (TX110040019) end-face wear 0.05mm

· 3RD stator (TX110020008) end-face wear

· Filter element saturation

Solution:

· Replace X3 rotor (TX110040019) — standard version

· Replace 3RD stator (TX110020008)

· Replace filter element (3 pieces for IH1800)

Case 2: FPD Gen 6 PECVD Vacuum Drop

Fault Phenomenon:

· Process chamber vacuum dropped from 1×10⁻⁴ Pa to 5×10⁻³ Pa

· Roots pump IH1800 temperature rise 22°C

Diagnosis:

· 4TH stator (for IH1800 TX110020010) end-face wear

· 3-stage chamber (for IH1800) mating clearance out of tolerance

· LTC shaft seal leakage

Solution:

· 4TH stator (for IH1800 TX110020010)

· 3-stage chamber (for IH1800)

· LTC shaft seal (for IH1800)

Case 3: PV PECVD IH1800 Rotor Corrosion

Fault Phenomenon:

· Process contains HF concentration fluctuation

· HV rotor (TX110040055) end-face corrosion pits within 6 months

Diagnosis:

· OEM HV rotor (Ni ≥10%) insufficient HF resistance

· Must upgrade to IXH high-nickel rotor (different interface, need pump replacement)

Solution:

· Upgrade to IXH1820H high-nickel rotor (part number TX110044569-573, Ni ≥16%)

· Customer decision: Keep IH1800 standard version for 6 months, then overall upgrade to IXH family after 6 months

Case 4: IH1800 Major Overhaul Special Parts

Fault Phenomenon:

· IH1800 process contains HCl

· LTC shaft seal frequent leakage

Diagnosis:

· LTC shaft seal (for IH1800) standard FKM not HCl-resistant

· Must upgrade to perfluoroether rubber (FFKM / Kalrez)

Solution:

· LTC shaft seal (for IH1800, FFKM material)

· Matching replacement of bellows (for IH1800 316L stainless steel)

VIII. Industry Application Selection Quick Reference

What is your industry?

├─ Semiconductor (6/8-inch wafer fab)

│   ├─ Standard etching → IH1000 standard rotor

│   ├─ Cl₂ etching → IH1800 HV rotor

│   ├─ PECVD → IH1800 standard rotor + filter element

│   └─ Sputtering → IH1000 standard rotor

├─ FPD (Flat Panel Display)

│   └─ IH1800 + HV rotor

├─ Photovoltaic

│   └─ IH600/IH1000 standard full set

├─ Vacuum Metallurgy

│   └─ IH1800 + filter element

└─ Laboratory / Small Batch

    └─ IH600 + standard filter

IX. Key Parameters Comparison

More stars mean more recommended.

X. FAQ

Q1: Is HV rotor mandatory for etching processes?

A: Recommended for processes containing Cl₂/BCl₃/SF₆ halogen gases, otherwise standard rotor will corrode through within 3-6 months.

Q2: What is the part number for HV rotor?

A: TX110040055 (IH1800 exclusive).

Q3: Can LTC shaft seal be replaced by IXH series seal?

A: No. LTC shaft seal is an IH1800 exclusive part, IXH series has different interface.

Q4: Can IH series be upgraded with IXH high-nickel rotors?

A: No. Different interface. Need pump replacement (IXH family) to upgrade.

Q5: Which parts should be prioritized for upgrading an old IH1800 pump?

A: Prioritize HV rotor, LTC shaft seal, filter element (best cost-effective), then consider overall pump replacement.

Q6: Which is more durable, IH1800 or IXH1210H?

A: IXH1210H is a new generation (interface optimization, assembly process upgrade). IH1800 has mature process but older interface.