Edwards IXH1820 Dry Vacuum Pump Parts Material & Process Analysis

I. Why Material & Process Determine IXH1820 Series Lifespan

All wearing parts of dry roots vacuum pumps are exposed to pumped gases:

· Corrosive gases (HCl, HF, Cl₂): directly corrode cast iron surfaces

· Particulates: enter the chamber and wear rotor end faces

· Condensing vapors: form liquid films at low-temperature sections, breaking dynamic seals

Therefore, Edwards employs a layered protection material & process system for IXH1820 / 1820H series parts.

II. IXH1820 Standard Rotors: Nodular Cast Iron Precision Machining

2.1 X2-X4 / Y2-Y4 / LV Standard Rotors

Figure: X2 Rotor (Standard) — IXH1820 base model

图：X2 Rotor

Standard Process Trilogy:

· Substrate: Nodular cast iron QT600-3 (tensile strength ≥600 MPa)

· Precision machining: CNC turning, end-face runout ≤0.01mm

· Dynamic balancing: Grade G2.5 @ 12000 RPM

III. IXH1820H High-Nickel Rotors: Flagship Corrosion-Resistant Process

For corrosive working conditions, IXH1820H comes with high-nickel version rotors (PN: TX110044569-573):

Figure: LV Rotor (Standard) — IXH1820 universal base model

图：LV Rotor

Core Advantages of High-Nickel Rotors:

· Form stable passivation film in oxidizing media

· Immune to stress corrosion cracking (SCC)

· Dynamic balance precision Grade G2.5 (12000 RPM)

IV. A200HP High-Nickel Rotors (IXH1220 Specialized)

A200HP is Edwards' special high-nickel rotor with the same part number as IXH1820H but labeled on IXH1220:

Difference from IXH1820H High-Nickel Rotors:

· A200HP has micro-adjustments on IXH1220 chamber mating surfaces

· Same Ni content (≥16%)

· Same dynamic balance grade (G2.5)

V. Multi-Stage Stators: 2ND-4TH + LV + Specialized

Figure: 3RD Stator — IXH1820 stage-3 stator

图：3RD Stator

Stator Design Key Points:

· Nodular cast iron substrate (QT600-3)

· Inner hole precision grinding (Ra ≤0.4μm)

· End-face runout ≤0.02mm

· Rotor-stator clearance 0.10-0.15mm

VI. Wave Springs & Disc Springs

Core Functions of Wave Springs:

· Provide axial preload, compensate for rotor thermal expansion

· Absorb axial shock vibration, extend bearing life

· Maintain seal contact after shaft seal wear

VII. Shaft Seals: Precision Friction Pair

Key Processes for Shaft Seals:

· Rotating ring: Silicon carbide (HV2600), mirror polishing Ra ≤0.02μm

· Stationary ring: Impregnated carbon graphite

· Spring: Wave spring provides constant contact pressure

· Auxiliary seal: FKM O-ring

VIII. Sintered Metal Powder Filter (IXH1220 Specialized)

Edwards IXH1220 uses sintered metal powder filters (TX150050009):

Sintering Process Features:

· Powder particle size 50-100μm

· Sintering temperature 1100-1250℃

· Porosity 30-40%

· Filtration precision 5-10μm

Comparison with Y-Type Mist Filter (TX150050005):

· Higher precision (0.5-1μm oil mist interception)

· Suitable for semiconductor high-cleanliness chambers

· Lower pressure drop

IX. Cooling System Parts: DP200H / GS1800C Series

9.1 IXH1820H DP200H Water Cooling Bars (No.1-8)

9.2 IXH1820 Standard Cooling Bars

9.3 GS1800C Industrial Cooling Bars

Figure: Lower Pump Upper Cooling Bar D18 — IXH1820 cooling core

图：Lower Pump Upper Cooling Bar D18

X. Transmission Components: Gears / Couplings / Locking Assemblies

Figure: Motor Coupling + Locking Assembly — Key transmission components

图：Motor Coupling

图：Locking Assembly

XI. Material Selection Decision Recommendations

Working Condition Assessment

├─ Dry clean air/nitrogen → Standard version (nodular cast iron + standard rotors)

├─ Contains Cl₂/HCl/corrosion gas → IXH1820H high-nickel rotor (≥16% Ni)

├─ IXH1220 corrosive condition → A200HP high-nickel rotor (shared part number)

├─ High-cleanliness semiconductor → Sintered filter + Y-type mist filter

└─ Long-term high temperature → Stainless steel water pipe + DP200H cooling bar

XII. FAQ

Q1: Can IXH1820H high-nickel rotors fully replace IXH1820 standard rotors?

A: Reverse replacement is possible (high-nickel → standard), but cost increases 30-40%. Recommended to select by working condition to avoid waste.

Q2: Are A200HP and IXH1820H high-nickel rotors the same?

A: Same Ni content and dynamic balance grade, but A200HP has micro-adjustments on IXH1220 mating surfaces, not 100% interchangeable.

Q3: How to select IXH1820H cooling bars (DP200H series)?

A: 8 types numbered 1-8, position-specific matching. Recommend providing pump serial number to vendor for table lookup.

Q4: What's the lifespan of wave springs?

A: 10⁷ variable load cycles without failure, corresponding to 3-5 years of service life.

Q5: Can sintered filters be cleaned and reused?

A: Yes. Ultrasonic cleaning + back-blowing, recommend replacement after 3-5 cycles.