Edwards IXM IXM1200 GMR-A200 Dry Vacuum Pump Parts Material & Process Analysis

I. IXM Series Material Process Core

The IXM series is a relatively new family of Edwards dry roots vacuum pumps (parallel to the IXH series), with the following material process system:

· Base Material: Nodular cast iron QT600-3 (housing, chamber, bearing plate)

· Drive Shaft: 40Cr alloy steel (tempered)

· Gear: 20CrMnTi carburized and quenched

· Wave Spring: 60Si2Mn spring steel

· Seal Ring: High-fluorine FKM (resistant to 200°C + corrosion)

· Wool Felt: Industrial wool felt (oil absorption, dust prevention)

· Water Cooling Bar: Stainless steel 304/316L

II. IXM Drive Shaft: 40Cr Tempered Treatment

Figure: IXMDP X Shaft — IXM Series Core Drive Shaft

图：IXMDP X Shaft

IXM Drive Shaft Key Process:

· Base material: 40Cr alloy steel (tensile strength ≥980 MPa)

· Tempered treatment: HB280-320

· Surface precision grinding: Ra ≤0.4μm

· Dynamic balance: G2.5 grade @ 12000 RPM

· Keyway: End-face runout ≤0.01mm

III. IXM Housing: Nodular Cast Iron Precision Machining

Figure: IXM Lower Housing — IXM Lower Housing

图：IXM Lower Housing

IXM Housing Key Process:

· Base material: Nodular cast iron QT600-3 (tensile strength ≥600 MPa)

· Precision turning: End-face runout ≤0.02mm

· Inner hole precision grinding: Ra ≤0.8μm

· Assembly face flatness: ≤0.03mm

· Mating clearance: 0.10-0.15mm with rotor

IV. IXM Bearing Plate: 3 Processes

Figure: DP LV Bearing Plate — IXM Series LV Bearing Plate

图：DP LV Bearing Plate

IXM Bearing Plate Key Process:

· Base material: Nodular cast iron QT600-3

· Bearing position precision grinding: Ra ≤0.4μm

· End-face runout: ≤0.015mm

· Interference fit with bearing: H7/r6

V. IXM Chamber: MB Chamber

Figure: MB Chamber — IXM1200 Exclusive Chamber

图：MB Chamber

MB Chamber Key Process:

· Base material: Nodular cast iron QT600-3

· Inner hole precision grinding: Ra ≤0.4μm

· End-face runout: ≤0.02mm

· Mating clearance: 0.10-0.15mm with rotor

VI. IXM Gear Drive

Figure: Gear — IXM Gear Drive

图：Gear

IXM Gear Key Process:

· Base material: 20CrMnTi alloy steel

· Carburized layer: 0.8-1.2mm

· Quenching: HRC58-62

· Tooth surface precision grinding: Ra ≤0.8μm

· Precision grade: ISO 6

VII. IXM Seal Parts: High-Fluorine FKM

7.1 Seal Rings (4 specs)

7.2 Special-Shaped Ring

7.3 Shaft Seal

IXM Seal Parts Key Process:

· Material: High-fluorine FKM F001-78 (resistant to 200°C + acid/alkali)

· Hardness: Shore A 70-80

· Tensile strength: ≥15 MPa

· Elongation: ≥200%

· Working temperature: -20°C ~ +200°C

· Chemical resistance: Cl₂, HCl, HF, etc.

VIII. IXM Bearing: Precision Grade

IXM Bearing Key Process:

· Brand: BARDEN (American precision bearing)

· Precision: ABEC 7 grade

· Contact angle: 15°

· Speed: Up to 15000 RPM

· Life: 8000-12000h

IX. IXM Wave Spring Series (4 types)

9.1 IXM Standard Wave Spring

9.2 GMR-A200 Domestic Wave Spring

IXM Wave Spring Key Process:

· Base material: 60Si2Mn spring steel (tensile strength ≥1500 MPa)

· Surface treatment: Oxidation (rust prevention)

· Precision: Thickness tolerance ±0.02mm

· Life: 10⁶ cycles

· Working temperature: -30°C ~ +150°C

X. GMR-A200 Domestic Replacement Parts

10.1 Wool Felt

Figure: GMR-A200 Wool Felt — GMR-A200 Domestic Compatible Part

图：GMR-A200 Wool Felt

GMR-A200 Wool Felt Key Process:

· Material: Industrial wool (fineness 32s)

· Density: 0.45-0.50 g/cm³

· Thickness tolerance: ±0.5mm

· Oil absorption rate: ≥150%

· Working temperature: -40°C ~ +120°C

· Function: Oil absorption seal, dust prevention

10.2 Flat Key

10.3 Threaded Plug

XI. IXM Water Cooling Bar

Figure: Water Cooler — IXM Water Cooling Bar

图：Water Cooler

IXM Water Cooling Bar Key Process:

· Base material: Stainless steel 304/316L

· 100% Helium mass spectrometer leak detection

· Working pressure: 0.4-0.6 MPa

· Flow rate: 10-30 L/min

· Interface: G1/2 or PT1/2

· Working temperature: -20°C ~ +150°C

XII. IXM Oil Mist Filter

Figure: Oil Mist Filter — IXM Oil Mist Filter

图：Oil Mist Filter

IXM Oil Mist Filter Key Process:

· Housing: Stainless steel 304

· Filter element: Multi-layer composite (metal mesh + filter paper + activated carbon)

· Filtration precision: 1-5μm

· Working pressure difference: ≤0.05 MPa

· Life: 8000-12000h

XIII. IXM Precision Hardware

IXM Magnet Key Process:

· Material: NdFeB N35

· Surface treatment: Nickel plating (rust prevention)

· Magnetic energy product: 33-35 MGOe

· Working temperature: ≤80°C

XIV. IXM Process Comparison: Edwards vs GMR-A200

XV. Material Selection Decision Recommendations

Working Condition

├─ Dry clean air/N₂ → Standard IXM parts full set

├─ Containing Cl₂/HCl corrosive gas → Upgrade to high-fluorine F001-78 seal ring

├─ High-speed operation → BARDEN precision bearing + Dynamic balance G2.5

├─ Domestic replacement → GMR-A200 parts (drawing number parts)

└─ Cooling requirement → Stainless steel 316L water cooling bar

XVI. FAQ

Q1: What is the process difference between GMR-A200 parts and Edwards IXM?

A: Core processes (40Cr drive shaft, nodular cast iron housing, high-fluorine seal) are the same. Wool felt is a GMR-A200 domestic exclusive.

Q2: Can high-fluorine FKM resist Cl₂?

A: Yes. High-fluorine F001-78 resists 200°C + Cl₂/HCl/HF.

Q3: BARDEN bearing is from which brand?

A: American BARDEN precision bearing (ABEC 7 grade).

Q4: IXM wave spring life?

A: 10⁶ cycles, corresponding to 3-5 years.

Q5: What is the difference between GMR-A200 double-layer wave spring and single-layer?

A: Double-layer compensates larger displacement (d53×D56), single-layer is more compact (d52.8×D62.3).

Q6: Must IXM water cooling bar be 316L?

A: 304 is sufficient. 316L is for strong corrosive environment.

Q7: IXM magnet material?

A: NdFeB N35 + Nickel plating, working temperature ≤80°C.