Dry vacuum pump

Ebara Dry Vacuum Pump Maintenance Parts

This article systematically organizes the maintenance parts material codes for Ebara EV-L200N / EVM20 / EVM50 / EVS100 / EVX-100 / ESA70-A70W / Ebara 130 / M302NS / ESA25-D series dry roots vacuum pumps, covering 24 core part numbers and corresponding Taixing replacement solutions. This article lists item by item in five major categories "drive shaft - gear - shaft blank - piston ring - X/Y shaft assembly", and provides procurement recommendations: which parts are recommended to be purchased from OEM, and which parts Taixing replacement parts have higher cost performance.

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Product Details

I. Material Code Summary Table (24 Core Part Numbers)

No.	Material Code	Product Name	Spec	Category
1	TX110016050	X Shaft-DP	EV-L200N	Drive Shaft
2	TX110016051	Y Shaft-DP	EV-L200N	Drive Shaft
3	(EVM20 dedicated)	X Shaft-DP	EVM20	Drive Shaft
4	(EVM20 dedicated)	Y Shaft-DP	EVM20	Drive Shaft
5	(EVM20 dedicated)	Gear Assembly	EVM20	Gear
6	(EVM50 dedicated)	X Shaft-DP	EVM50	Drive Shaft
7	(EVM50 dedicated)	Y Shaft-DP	EVM50	Drive Shaft
8	(EVS100 dedicated)	Gear-MB (BP)	EVS100	Gear
9	(EVS100 dedicated)	Gear-DP (MP)	EVS100	Gear
10	(EVS100 dedicated)	Y Shaft-DP	EVS100	Drive Shaft
11	(EVS100 dedicated)	X Shaft-DP	EVS100	Drive Shaft
12	TX110016041	Y Shaft-DP	EVX-100	Drive Shaft
13	110016042	X Shaft-DP	EVX-100	Drive Shaft
14	(ESA70-A70W dedicated)	X Shaft Y Shaft	ESA70-A70W	Shaft Assembly
15	(Ebara 130 dedicated)	X Shaft Y Shaft (Lower Pump Shaft)	Ebara 130	Shaft Assembly
16	(Ebara 130 dedicated)	Lower Pump Shaft Blank	Ebara 130	Shaft Blank
17	(Ebara 130 dedicated)	Upper Pump Shaft Blank	Ebara 130	Shaft Blank
18	(M302NS dedicated)	X Shaft Y Shaft (Lower Pump Shaft)	M302NS	Shaft Assembly
19	(ESA25-D dedicated)	X Shaft Y Shaft (Lower Pump Shaft)	ESA25-D	Shaft Assembly
20	(Ebara 130 dedicated)	Upper Pump Shaft Piston Ring	Ebara 130	Piston Ring
21	(Ebara 130 dedicated)	Upper Pump Shaft X Shaft Y Shaft	Ebara 130	Shaft Assembly
22	(Ebara 130 dedicated)	Upper Pump Shaft Gear	Ebara 130	Gear
23	(Ebara 130 dedicated)	Lower Pump Shaft Gear	Ebara 130	Gear
24	(Ebara 130 dedicated)	Upper Pump Shaft Piston Ring	Ebara 130	Piston Ring

Important Note: Material codes are Taixing (OEM-spec) internal codes, different from OEM part numbers, but products fully match OEM specifications.

II. Drive Shaft Assembly (10 Part Numbers)

2.1 EV-L200N X/Y-DP Shaft

Dimension	X Shaft-DP	Y Shaft-DP
Material Code	TX110016050	TX110016051
Spec	EV-L200N	EV-L200N
Material	40Cr alloy steel	40Cr alloy steel
Tempering Hardness	HB280-320	HB280-320
Dynamic Balance	G2.5 @ 12,000 RPM	G2.5 @ 12,000 RPM
Life	10,000-15,000h	10,000-15,000h
OEM Price	¥3,800/piece	¥3,800/piece
Taixing Price	¥1,950/piece	¥1,950/piece
Save	49%	49%

2.2 EVS100 X/Y-DP Shaft

Dimension	X Shaft-DP	Y Shaft-DP
Material Code	(EVS100 dedicated)	(EVS100 dedicated)
Spec	EVS100	EVS100
Material	40Cr alloy steel	40Cr alloy steel
Tempering Hardness	HB280-320	HB280-320
Dynamic Balance	G2.5 @ 12,000 RPM	G2.5 @ 12,000 RPM
Special Process	Thickened interface (high load)	Thickened interface (high load)
Life	12,000-15,000h	12,000-15,000h
OEM Price	¥4,200/piece	¥4,200/piece
Taixing Price	¥2,150/piece	¥2,150/piece
Save	49%	49%

2.3 EVX-100 X/Y-DP Shaft

Dimension	X Shaft-DP	Y Shaft-DP
Material Code	110016042	TX110016041
Spec	EVX-100	EVX-100
Material	40Cr alloy steel	40Cr alloy steel
Tempering Hardness	HB280-320	HB280-320
Dynamic Balance	G2.5 @ 12,000 RPM	G2.5 @ 12,000 RPM
Life	12,000-15,000h	12,000-15,000h
OEM Price	¥4,500/piece	¥4,500/piece
Taixing Price	¥2,300/piece	¥2,300/piece
Save	49%	49%

III. Gear Components (3 Part Numbers)

3.1 EVM20 Gear Assembly

Dimension	Details
Material Name	Gear Assembly
Spec	EVM20
Material	20CrMnTi carburized steel
Carburization Layer	0.8-1.2mm
Hardness	HRC58-62
Precision	ISO Grade 6
Life	≥15,000h
OEM Price	¥6,500/set
Taixing Price	¥3,400/set
Save	48%

3.2 EVS100 Gear-MB (BP)

Dimension	Details
Material Name	Gear-MB (BP)
Spec	EVS100
Use	High pressure stage
Material	20CrMnTi carburized steel
Carburization Layer	0.8-1.2mm
Hardness	HRC58-62
Precision	ISO Grade 6
Life	≥15,000h
OEM Price	¥5,800/piece
Taixing Price	¥3,000/piece
Save	48%

3.3 EVS100 Gear-DP (MP)

Dimension	Details
Material Name	Gear-DP (MP)
Spec	EVS100
Use	Medium pressure stage
Material	20CrMnTi carburized steel
Carburization Layer	0.8-1.2mm
Hardness	HRC58-62
Precision	ISO Grade 6
Life	≥15,000h
OEM Price	¥5,200/piece
Taixing Price	¥2,700/piece
Save	48%

IV. Shaft Blank Parts (Ebara 130 Dedicated, 2 Part Numbers)

Dimension	Upper Pump Shaft Blank	Lower Pump Shaft Blank
Material Name	Upper Pump Shaft Blank	Lower Pump Shaft Blank
Spec	Ebara 130	Ebara 130
Material	42CrMo alloy steel	42CrMo alloy steel
Forging Ratio	≥4:1	≥4:1
Testing	100% ultrasonic	100% ultrasonic
Rough Machining Allowance	2-3mm	2-3mm
Use	User finishing	User finishing
OEM Price	¥8,500/piece	¥8,500/piece
Taixing Price	¥4,500/piece	¥4,500/piece
Save	47%	47%

V. Piston Ring (Ebara 130 Dedicated, 2 Part Numbers)

Dimension	Upper Pump Shaft Piston Ring
Material Name	Upper Pump Shaft Piston Ring
Spec	Ebara 130
Material	Nodular cast iron QT600-3 + PTFE coating
Outer Diameter	Customized according to model
Temperature Resistance	≤200℃
Life	8000-12000h
OEM Price	¥1,800/piece
Taixing Price	¥950/piece
Save	47%

VI. X/Y Shaft Assembly (6 Part Numbers)

Material Name	Spec	Remarks
X Shaft Y Shaft	ESA70-A70W	High load
X Shaft Y Shaft (Lower Pump Shaft)	Ebara 130	High load
X Shaft Y Shaft (Lower Pump Shaft)	M302NS	Corrosion resistant
X Shaft Y Shaft (Lower Pump Shaft)	ESA25-D	Medium load
Upper Pump Shaft X Shaft Y Shaft	Ebara 130	High load

· Material: 40Cr + Nodular cast iron QT600-3

· Interface: Non-standard (ESA series dedicated)

· Life: 12,000-18,000h

· Price Range: OEM price ¥5,500-8,000/piece, Taixing price ¥2,900-4,200/piece (Save 47-48%)

VII. 24 Part Number Procurement Recommendations

Parts Category	Recommended Procurement	Reason
X/Y-DP Drive Shaft	Taixing Parts	40Cr tempering + dynamic balance dual guarantee
Gear Components	Taixing Parts	20CrMnTi carburization + ISO Grade 6 precision
Shaft Blank Parts	Taixing Parts	42CrMo forging + 100% testing
Piston Ring	Taixing Parts	Nodular cast iron + PTFE coating
X/Y Shaft Assembly	Taixing Parts	40Cr + Nodular cast iron, matching OEM interface

Key Experience: Among the 24 part numbers, all Taixing parts can provide quality comparable to OEM and 47-49% cost savings.

VIII. OEM Parts vs Taixing Parts Comparison

Parts Category	Average OEM Price	Average Taixing Price	Average Save
Drive Shaft (10 pieces)	¥4,000/piece	¥2,050/piece	49%
Gear Components (3 pieces)	¥5,800/piece	¥3,000/piece	48%
Shaft Blank Parts (2 pieces)	¥8,500/piece	¥4,500/piece	47%
Piston Ring (2 pieces)	¥1,800/piece	¥950/piece	47%
X/Y Shaft Assembly (6 pieces)	¥6,800/piece	¥3,500/piece	48%

Total Savings: About 48% (Purchasing the full set of 24 parts can save about ¥76,000)

IX. Bulk Procurement Discounts

Quantity	Discount	Stocking Suggestion
Single piece	Standard price	Urgent repair
5-10 pieces	9.5 fold	Quarterly maintenance package
20+ pieces	9 fold	Annual overhaul package
50+ pieces	8.5 fold	Fab customer annual agreement