Edwards IXH1820HTXS Dry Vacuum Pump Applications in Semiconductor and Industrial Sectors

I. Five Major Application Scenarios Overview

II. Semiconductor Wafer Fab Application (Key)

2.1 12-inch Wafer Fab

· IXH1820HTXS main application: 12-inch wafer etching, PECVD

· Process gas: Cl₂, HCl, SiH₄, NH₃, BCl₃

· Typical working conditions: Temperature 80-150℃, continuous 24/7

· Key wear parts:

· X2-Y4 rotors (Cl₂ corrosion 12-18 months)

· FKM seal kits (Cl₂ aging 8-12 months)

· LVHP/HVHP stator (particle wear 12-15 months)

2.2 Maintenance Practice Case (May 2026)

· Customer: A 12-inch wafer fab in Beijing

· Failure: X3 rotor Cl₂ corrosion perforation after 14 months operation

· Symptom: Vibration value suddenly increased to 4.2 mm/s, pump efficiency declined

· Diagnosis: Rotor surface coating was corroded and perforated by Cl₂

· Parts: Taixing TX110040553 (X3 Rotor, Ni≥16%)

· Replacement duration: 6 hours

· Result: Vibration recovered to 1.8 mm/s, efficiency restored

III. FPD Factory Application

3.1 PECVD Process

· IXH1820HTXS application: Gen 6/8.5 PECVD

· Process gas: SiH₄ + NH₃

· Temperature: 200-400℃

· Key parts:

· 2ND/3RD stator (NH₃ particle wear)

· Long Exhaust Pipe (high temperature thermal fatigue)

3.2 Maintenance Recommendations

· Inspect 2ND/3RD stator every 12 months

· Replace FKM seal kit annually

· Long exhaust pipe every 5 years

IV. Solar Photovoltaic Application

4.1 Thin Film Deposition

· IXH1820HTXS application: Thin film silicon solar PECVD

· Process gas: SiH₄ + H₂

· Key parts:

· LV rotor (high load continuous operation)

· Long Exhaust Pipe (long distance exhaust)

4.2 Maintenance Practice Case (March 2026)

· Customer: A PV module factory in Jiangsu

· Failure: LV rotor pitting after 11 months operation

· Parts: Taixing TX110040172 (LV Rotor)

· Result: Restored operation after replacement

V. Vacuum Metallurgy Application

5.1 Vacuum Melting

· IXH1820HTXS application: Special metal vacuum melting

· Process gas: Ar + N₂

· Temperature: 1500-1800℃

· Key parts:

· 4TH stator (high temperature particle wear)

· Elbow (thermal fatigue)

5.2 Maintenance Recommendations

· Inspect 4TH stator every 8-10 months

· Elbow every 3-5 years

VI. Laboratory R&D Application

6.1 Intermittent Process

· IXH1820HTXS application: Small batch experiment

· Operation characteristics: 4-8 hours/day

· Key parts:

· LVHP stator (high vacuum stage)

VII. Typical Failures & Solutions

7.1 X2-Y4 Rotor Cl₂ Corrosion

· Symptom: Sudden vibration increase, efficiency decline

· Root cause: Rotor surface coating corroded by Cl₂

· Solution: Replace with Ni 16% rotor (Taixing TX110040551-561)

7.2 FKM Seal Aging

· Symptom: Air leakage, vacuum degree decline

· Root cause: FKM aged by Cl₂/HCl

· Solution: Replace with FKM seal kit (1820 model)

7.3 LVHP/HVHP Stator Particle Wear

· Symptom: Increased particles, efficiency decline

· Root cause: Process particle wear

· Solution: Replace LVHP/HVHP stator (TX RD110050098 / TX110020121)

7.4 Long Exhaust Pipe Thermal Fatigue

· Symptom: Leakage at interface

· Root cause: Repeated thermal expansion and contraction

· Solution: Replace SUS316L long exhaust pipe

VIII. Maintenance Strategy

IX. FAQ

Q1: What processes is IXH1820HTXS suitable for?

A: Cl₂/HCl etching process + PECVD, especially for 12-inch wafer fab.

Q2: Can HTXS rotors and regular IXH rotors be mixed?

A: No. HTXS rotors have Ni 16%, while regular IXH rotors (Ni 0.5-1.0%) have different materials despite same size.

Q3: How often should FKM seal kits be replaced?

A: 8-12 months (Cl₂ process) / 18-24 months (clean process).

Q4: Can SUS316L long exhaust pipe withstand 300℃?

A: Yes. SUS316L contains Mo element, temperature resistance ≤300℃.

Q5: Is 4TH stator more wear-resistant than 2ND?

A: Not necessarily. 4TH operates at lower pressure but with finer particles.

Q6: How long is the HTXS major overhaul interval?

A: 18 months (Cl₂ process) or 24 months (clean process).

Q7: How many IXH1820HTXS parts does Taixing have in stock?

A: 50+ pieces regular parts in stock, 24h response nationwide.