KYKY FF400/3500B turbomolecular vacuum pump bearings utilize 4th generation vacuum lubrication technology, specifically designed for high-throughput pumps to meet stringent ultra-high vacuum requirements in semiconductor and scientific research applications.
This technical whitepaper details the specifications, performance advantages, and industry applications of KYKY FF400/3500B turbomolecular pump bearings, including 10 expert Q&As for ultra-high vacuum system maintenance.
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Parameter items |
Upper bearing (high speed end) |
Lower bearing (driving end) |
testing standard |
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|
limit speed |
150,000rpm |
95,000rpm |
ISO 15242-1 |
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|
Dynamic load (Cr) |
15.2kN |
22.8kN |
DIN ISO 281 |
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|
lubrication interval |
More than 35,000 hours |
More than 40,000 hours |
ASTM D3336 |
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|
Vacuum holding capability |
<3×10⁻¹¹mbar |
<2×10⁻¹¹mbar |
ASTM E2971 |
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Vibration level |
Grade G0.4 |
Grade G0.6 |
ISO 1940-1 |
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Special performance
Extreme environmental adaptability
Magnetic field tolerance: ≤ 8T (optional anti magnetic version)
Radiation environment: resistant to cumulative dose of 10 ⁶ Gy
Temperature shock: -196 ℃~200 ℃ rapid alternating
reliability verification
Pass 10 acceleration start stop tests
5000 hours of continuous full load experiment (vibration growth<5%)
Third party certification: SEMI S2/S8, UL/CE, ISO 14644-1 Class 4
Application Solution
Semiconductor Manufacturing
Compatible with EUV lithography machines (meeting<0.05 μ m vibration requirements)
Low release version dedicated to wafer transfer system
Research equipment
Particle accelerator specific anti radiation model
Quantum computing ultra-low temperature environment version (4K working condition)
Industrial sector
Large area coating production line (supporting 7 × 24 continuous operation)
High reliability version dedicated to aerospace simulation cabin
At leading semiconductor manufacturer:
✔ 28% improved equipment utilization
✔ ¥420K annual maintenance reduction
✔ 35% better vacuum stability
Performance in national megascience project:
✔ 12,000 hours continuous operation
✔ Sustained 2×10⁻⁷ Pa vacuum
✔ Passed 200 thermal cycle tests
A: Optimized for 3500RPM operation with 3-5x longer lifespan than generic alternatives.
A: Hydraulic mounting tools required (available for rent) - never impact-install.
A: 4th gen solid lubrication requires no maintenance during design life.
A: Recommend vibration monitoring system - inspect when >0.15μm.
A: 24-hour domestic response with 48-hour delivery guarantee (service contract required).
A: IP6X certified for cleanroom environments.
A: Dynamic 50N, static 200N (avoid instantaneous impact loads).
A: 24 months or 20,000 hours (whichever comes first).
A: SGS material analysis & outgassing test reports provided.
A: Support dimensional adjustments, special coatings (50pc MOQ).
Tags :
Tel : +86-15880223078
WhatsApp : +86-13959235484
Email : vacuum@xiamenbest.com
Address : No. 19, Dongan Qianzhanli, Jimei District, Xiamen city china
