A high-performance support system developed specifically for the FF400/3500B high-speed turbo molecular pump, utilizing the fourth generation vacuum lubrication technology to meet the stringent requirements of ultra-high vacuum environments in the semiconductor, scientific research, and industrial fields.
A high-performance support system developed specifically for the FF400/3500B high-speed turbo molecular pump, utilizing the fourth generation vacuum lubrication technology to meet the stringent requirements of ultra-high vacuum environments in the semiconductor, scientific research, and industrial fields.