This image highlights the MEMS Pirani vacuum gauge MRS series, a cutting-edge vacuum measurement device built with advanced MEMS sensing technology. Its compact design saves installation space while offering a wider measurement range, higher accuracy, and better stability compared to traditional Pirani gauges. With superior corrosion resistance and fast response times (<100 ms), the MRS series is ideal for applications in semiconductor manufacturing, vacuum coating, scientific research, and industrial processes requiring precise vacuum monitoring.
This image highlights the MEMS Pirani vacuum gauge MRS series, a cutting-edge vacuum measurement device built with advanced MEMS sensing technology. Its compact design saves installation space while offering a wider measurement range, higher accuracy, and better stability compared to traditional Pirani gauges. With superior corrosion resistance and fast response times (<100 ms), the MRS series is ideal for applications in semiconductor manufacturing, vacuum coating, scientific research, and industrial processes requiring precise vacuum monitoring.