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MRS·SUAThe MEMS Pirani Vacuum Gauge MRS Series is based on advanced MEMS sensor technology, offering a wide measurement range and higher accuracy than traditional Pirani gauges. It is suitable for various vacuum environments and offers superior stability and corrosion resistance. Learn more about its technical parameters and applications, and choose high-quality vacuum gauges made in China.
The MEMS Pirani vacuum gauge MRS series is designed for industries requiring precise and reliable vacuum measurement, such as semiconductor manufacturing, vacuum coating, scientific research, and industrial processes. Its compact design, wide measurement range, and high accuracy make it a versatile solution for applications demanding stable and corrosion-resistant vacuum monitoring.
Long-Term Operating Features:
Engineered for durability, the MEMS Pirani vacuum gauge MRS series delivers consistent performance over extended periods.
Its advanced MEMS sensing technology ensures high stability and accuracy, even in harsh environments.
The corrosion-resistant materials and robust construction minimize maintenance requirements and extend the device's lifespan.
The MEMS Pirani Vacuum Gauge MRS Series is widely used in the following fields:
· Semiconductor Manufacturing: Provides accurate vacuum measurement to ensure optimal conditions for semiconductor production.
· Scientific Research Laboratories: Ideal for precise vacuum measurement in physics, chemistry, and other experimental applications.
· Vacuum Coating: Offers stable vacuum measurements to ensure the success of coating processes.
· Electronics Manufacturing: Delivers precise vacuum pressure readings for electronics component production.
· Aerospace: Suitable for applications in vacuum environments in aerospace research.
The MEMS Pirani Vacuum Gauge operates by measuring the frequency of gas molecules colliding with the sensor surface to determine pressure changes, providing precise vacuum measurements.
The MRS series has a measurement range of 5 × 10⁻⁵ mbar to 1000 mbar, making it suitable for both ultra-high and conventional vacuum applications.
The gauge comes with a KF-16 interface, making installation straightforward and allowing it to be easily connected to the vacuum system.
While the MRS series offers high accuracy and stability, it is recommended to calibrate the gauge periodically to maintain optimal performance.
It is widely used in semiconductor manufacturing, scientific research laboratories, vacuum coating, electronics manufacturing, and aerospace applications.
The operating temperature range is 0 ~ 40°C, suitable for most standard working environments.
The MEMS Pirani Vacuum Gauge offers 0 ~ 10 VDC analog output, which can be directly connected to a monitoring system for real-time pressure readings.
Yes, the gauge uses 316L stainless steel and other corrosion-resistant materials, ensuring long-term durability even in aggressive environments.
The power consumption is very low, under 1.2W, making it ideal for continuous operation over extended periods.
The repeatability of the MRS series is excellent, with accuracy of ±2% for measurements in the range of 1E-3 to 100 mbar.
The MEMS Pirani Vacuum Gauge MRS Series offers a compact, high-precision, and corrosion-resistant solution for a wide range of vacuum measurement applications. With its exceptional performance and reliability, it is the ideal choice for industries such as semiconductor manufacturing, scientific research, vacuum coating, and aerospace. Choose the MEMS Pirani Vacuum Gauge MRS series for accurate, stable, and long-lasting vacuum measurement.
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