MEMS Pirani Composite Vacuum Gauge DRS Series - High-Precision Dual-Sensor Vacuum Measurement

MEMS Pirani composite vacuum gauge DRS series, combining MEMS Pirani and ceramic piezoresistive sensors for high-precision measurement from atmospheric to high vacuum levels.

Target Industry or Application Scenario Description

The MEMS Pirani composite vacuum gauge DRS series is designed for industries requiring precise and reliable vacuum measurement, such as semiconductor manufacturing, vacuum coating, scientific research, and industrial processes. Its dual-sensor technology ensures high accuracy across a wide range, making it suitable for applications like foreline and roughing pressure measurement, mass spectrometry control, system process control, and negative pressure gas measurement.

Product Applications

General Vacuum Pressure Measurement

Foreline and Roughing Pressure Measurement

Negative Pressure Gas Measurement and Control

Mass Spectrometer Control

System Process Control

Abnormal Pressure Detection

Control System Pressure

Application Case

Application Field: Mass Spectrometer Control

Equipment Used: DRS-SUA MEMS Pirani Composite Vacuum Gauge

Process Flow: In mass spectrometers, the DRS-SUA is used for real-time vacuum monitoring to ensure analytical accuracy and stability.

Equipment Installation

Detailed instructions on how to properly install the MEMS Pirani composite vacuum gauge, including selecting the installation location, connecting interfaces, and debugging steps to ensure stable and efficient operation. Professional installation guidance from manufacturers is recommended.

Frequently Asked Questions (FAQs) about MEMS Pirani Composite Vacuum Gauge

1、What is the measuring range of the MEMS Pirani composite vacuum gauge?
Answer: The measuring range is 5×10⁻⁵~1500 Torr, suitable for various vacuum environments.

2、What is the accuracy of the MEMS Pirani composite vacuum gauge?
Answer: In the range of 1×10⁻³~100 Torr, the accuracy is ±5% of reading.

3、How to choose the right model of the MEMS Pirani composite vacuum gauge?
Answer: Select the appropriate model based on the measuring range, accuracy requirements, and interface type. Consult professional manufacturers for guidance.

4、What are the key points for daily maintenance of the MEMS Pirani composite vacuum gauge?
Answer: Regularly check the interface sealing, clean the sensor surface, and ensure stable power supply.

5、Is the MEMS Pirani composite vacuum gauge compatible with other vacuum systems?
Answer: Compatibility depends on the interface size and electrical connections. Consult the manufacturer for confirmation.

6、How does the MEMS Pirani composite vacuum gauge perform in high vacuum environments?
Answer: It performs excellently in high vacuum environments, with high measurement accuracy and stability.

7、How to address measurement errors in the MEMS Pirani composite vacuum gauge?
Answer: Check if the sensor is contaminated, calibrate measurement parameters, and replace the sensor if necessary.

8、What is the energy efficiency ratio of the MEMS Pirani composite vacuum gauge?
Answer: With a power consumption of <1.2W, it offers high energy efficiency and low operating costs.

9、How durable is the MEMS Pirani composite vacuum gauge?
Answer: Made from corrosion-resistant materials, it has a long service life and is suitable for high-intensity working environments.

10、How to evaluate the total cost of ownership of the MEMS Pirani composite vacuum gauge?
Answer: Consider the equipment price, maintenance costs, energy consumption, and calibration frequency for evaluation. Choose products from reliable manufacturers for cost-effectiveness.

Through this article, readers can gain a comprehensive understanding of the performance, applications, and maintenance of the MEMS Pirani composite vacuum gauge, providing professional guidance for selection and usage, while recommending high-quality manufacturers to ensure product quality and service support.