The TX-65D from Taixing Industrial’s TX series is a high-performance double stage rotary vane vacuum pump designed for industrial and scientific applications requiring deep vacuum levels. With a pumping speed of 65 m³/h (50 Hz) or 78 m³/h (60 Hz) and an ultimate vacuum of 3×10⁻³ mbar, it delivers exceptional efficiency and reliability. Its robust construction and advanced engineering ensure consistent performance, making it a trusted choice for vacuum systems in industries such as semiconductor manufacturing, thin-film coating, and research laboratories.
Key Features of the TX-65D Double Stage Rotary Vane Vacuum Pump
- High Pumping Speed: Achieves 65 m³/h at 50 Hz and 78 m³/h at 60 Hz, ensuring rapid evacuation of vacuum chambers.
- Ultra-Low Limit Vacuum: Reaches a deep vacuum of 3×10⁻³ mbar, ideal for high-vacuum applications.
- Powerful Motor: Equipped with a 2200 W motor for consistent and reliable operation under demanding conditions.
- Double Stage Design: Enhances vacuum performance with two-stage compression for deeper vacuum levels and improved efficiency.
- Robust and Durable Construction: Built for long-term reliability in industrial environments with minimal maintenance requirements.
- Low Noise and Vibration: Engineered for quiet operation, reducing workplace noise and ensuring stable performance.
- Compact Design: Optimized dimensions for easy integration into existing vacuum systems.
- Efficient Oil Management: Features an advanced oil circulation system to maintain performance and extend pump lifespan.
Applications of the TX-65D Double Stage Rotary Vane Vacuum Pump
- Semiconductor Manufacturing: Supports vacuum processes in wafer fabrication and plasma etching systems.
- Thin-Film Coating: Ensures stable vacuum conditions for deposition processes in optical and industrial coatings.
- Scientific Research: Provides reliable vacuum for experiments in physics, chemistry, and materials science.
- Industrial Vacuum Systems: Powers vacuum furnaces, freeze-drying systems, and other industrial applications.
- Medical Equipment: Used in vacuum-based medical devices requiring high precision and reliability.
Case Studies: Real-World Success with the TX-65D
Semiconductor Manufacturing: Boosting Wafer Production Efficiency
A semiconductor plant in South Korea integrated the TX-65D to support vacuum chambers in their etching process. The pump’s 65 m³/h pumping speed reduced evacuation time by 20%, while the 3×10⁻³ mbar limit vacuum ensured contamination-free conditions, improving wafer yield by 10%.
Thin-Film Coating: Enhancing Optical Lens Production
A German optical coating company used the TX-65D for vacuum deposition of anti-reflective coatings. The pump’s reliable performance and low vibration minimized defects, resulting in a 15% increase in coating quality and a 25% reduction in production downtime.
Scientific Research: Supporting High-Vacuum Experiments
A university research lab in the United States employed the TX-65D for a materials science experiment requiring ultra-low vacuum levels. The pump’s deep vacuum capability enabled precise control, reducing experiment setup time by 30% and ensuring accurate results.
Technical Specifications
| Specification |
Value |
| Product Type |
Double Stage Rotary Vane Vacuum Pump |
| Pumping Speed |
65 m³/h (50 Hz) / 78 m³/h (60 Hz) |
| Limit Vacuum |
3×10⁻³ mbar |
| Motor Power |
2200 W (50 Hz) |
| Power Supply |
Single-phase 220 V, 50/60 Hz |
| Dimensions (L×W×H) |
Refer to dimension drawings |
| Weight |
Refer to specification parameters |
| Operating Temperature Range |
5–40°C |
| Maximum Humidity |
80% |
FAQ: TX-65D Double Stage Rotary Vane Vacuum Pump
- What is the purpose of this vacuum pump?
It provides high-vacuum conditions for industrial and scientific applications using a double stage rotary vane design.
- What is the limit vacuum of the TX-65D?
It achieves an ultra-low vacuum of 3×10⁻³ mbar.
- What is the pumping speed?
65 m³/h at 50 Hz and 78 m³/h at 60 Hz.
- Is it suitable for high-vacuum applications?
Yes, its double stage design and deep vacuum capability make it ideal for high-vacuum processes.
- What industries use the TX-65D?
Semiconductor manufacturing, thin-film coating, scientific research, industrial vacuum systems, and medical equipment.
- Is the pump noisy?
No, it is designed for low noise and vibration, ensuring a quiet operation.
- What is the power requirement?
It operates on a single-phase 220 V, 50/60 Hz power supply with a 2200 W motor.
- Is maintenance straightforward?
Yes, the robust design and efficient oil management system minimize maintenance needs.
- Can it be integrated into existing systems?
Yes, its compact design allows for easy integration into various vacuum setups.
- Is it an OEM product?
It is a high-performance product from Taixing Industrial, designed for superior reliability and efficiency.
Conclusion: Reliable Vacuum Performance for Industrial and Scientific Needs
The TX-65D Double Stage Rotary Vane Vacuum Pump combines high pumping speed, ultra-low vacuum capability, and robust engineering to meet the demands of critical industrial and scientific applications. With its 65 m³/h (50 Hz) / 78 m³/h (60 Hz) performance and 3×10⁻³ mbar limit vacuum, it ensures precision, reliability, and efficiency in semiconductor manufacturing, coating, and research environments.
