This comprehensive guide explores industrial oil-free screw vacuum pumps - their technical specifications, applications in clean industries, maintenance tips, and answers to 10 critical FAQs. Learn why these pumps are revolutionizing semiconductor and medical manufacturing.
Modern oil-free screw vacuum pumps represent a technological leap in clean industrial vacuum solutions. These advanced pumps eliminate contamination risks while delivering exceptional performance in sensitive manufacturing environments.
✔ 100% oil-free operation - No contamination risk for clean processes
✔ Energy efficient - Up to 40% less power than traditional pumps
✔ Low maintenance - No oil changes or filters required
✔ Quiet operation - Typically <68 dB(A) noise levels
✔ Eco-friendly - No oil disposal requirements
Parameter |
SG-75 |
SG-150 |
SG-300 |
Pumping Speed (m³/h) |
75 |
150 |
300 |
Ultimate Pressure (mbar) |
0.1 |
0.1 |
0.1 |
Working Pressure (mbar) |
0.1-1013 |
0.1-1013 |
0.1-1013 |
Motor Power (kW) |
5.5 |
11 |
22 |
Speed (rpm) |
2950 |
2950 |
2950 |
Inlet Connection (DN) |
40 |
50 |
80 |
Noise Level (dB(A)) |
65 |
67 |
68 |
Weight (kg) |
180 |
320 |
580 |
Cooling Method |
Air |
Air/Water |
Water |
A chip manufacturer achieved:
99.999% cleanroom compatibility
30% energy reduction vs oil-sealed pumps
Zero particulate contamination incidents
Key benefits reported:
Complied with FDA GMP requirements
Eliminated oil backstreaming risks
Reduced maintenance costs by 60%
Performance highlights:
24/7 operation reliability
No product contamination issues
25% faster cycle times
Uses precisely machined screw rotors with minimal clearances, requiring no lubricating oil in the pumping chamber.
Daily: Check temperature and vibration
Monthly: Inspect rotor clearance
Annually: Bearing replacement
Special coatings available for corrosive applications (e.g., PTFE, nickel-plated).
7-10 years with proper maintenance in typical industrial use.
Only for high-capacity models (>150m³/h) or high ambient temperatures.
Advantages include:
Lower vibration
Higher ultimate vacuum
Better handling of vapors
Standard models: -10°C to 40°C (special versions available for extremes).
Yes, with ATEX-certified motors and explosion-proof construction.
Built-in inlet filters protect against particles >5μm.
Yes, VFD options can reduce energy use by up to 50% in partial load conditions.
Industrial oil-free screw vacuum pumps provide the perfect solution for contamination-sensitive applications in semiconductor, medical, and food industries. Their clean operation, energy efficiency, and low maintenance requirements make them ideal for modern manufacturing facilities.
When selecting a vacuum pump for critical processes, consider the long-term operational savings and quality assurance benefits of oil-free technology. Our technical team can help you choose the optimal model for your specific pressure and flow requirements.
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