FF160/700F and TXSL-36 UHV Mobile Pump Truck High Vacuum Oil-Free and Portable Vacuum Solution

Introduction

The FF160/700F+TXSL-36 UHV mobile pump truck is designed to address the critical need for efficient high-vacuum pumping in precision applications such as semiconductor processing, electron microscopy, and scientific research. Integrating the high-speed FF160/700F molecular pump with an oil-free TXSL-36 scroll pump, this system delivers rapid pumping from atmosphere to ultra-high vacuum (UHV), with full mobility and clean operation.

Why Choose the FF160/700F+TXSL-36 UHV Mobile Pump Truck?

This system overcomes traditional vacuum limitations by offering:

• High pumping speed: 700 L/s for nitrogen, enabling fast evacuation.
• Oil-free operation: No hydrocarbon contamination, ideal for cleanrooms.
• Mobility: Compact mobile frame with swivel wheels for multi-station use.
• Automated control: PLC-based touchscreen for seamless operation.

Key Benefits

• Ultra-High Vacuum: Achieves ultimate pressure down to 6×10⁻⁸ Pa (CF flange).
• High Pumping Speed: 700 L/s for N₂, with support for multiple gases.
• Oil-Free Cleanliness: TXSL-36 scroll pump ensures no oil vapor contamination.
• Rapid Startup: Molecular pump starts in ≤7 minutes.
• Low Noise and Vibration: ≤56 dB(A) and ≤0.1 mm vibration for sensitive equipment.
• Mobile and Flexible: Easy to move between labs or workstations.

Key Features

1. FF160/700F Molecular Pump

• Pumping speed: 700 L/s (N₂), 680 L/s (Ar), 580 L/s (He), 260 L/s (H₂)
• Ultimate pressure: 6×10⁻⁸ Pa (CF), 6×10⁻⁷ Pa (ISO-K)
• Compression ratio: N₂/Ar: 1×10⁹, He: 1×10⁷, H₂: 6×10⁶
• Water-cooled, lightweight (20.5 kg), DN160 CF/ISO-K inlet

2. TXSL-36 Oil-Free Scroll Pump

• Pumping speed: 36 m³/h (≈10 L/s)
• Ultimate vacuum: 0.01 mbar (1 Pa)
• Oil-free operation, low noise (56 dB(A))
• KF40 inlet, KF25 outlet

3. Integrated Mobile System

• 304 stainless steel frame (700×650×1300 mm)
• 4 brake swivel wheels, push resistance ≤50 N
• 7-inch touchscreen PLC controller with auto/manual modes
• ZDF-11 B5 vacuum gauge (10⁵–10⁻⁸ Pa)
• DN40 KF electric safety valve (power-off shutoff ≤0.3 s)

4. Safety and Control

• Overpressure and power-off protection
• Cooling flow sensor with alarm
• Real-time pressure monitoring and fault codes

Applications

• Scientific Research: Electron microscopy, mass spectrometry, particle accelerators
• Semiconductor Manufacturing: Coating, etching, plasma cleaning
• Aerospace: Component testing, space simulation chambers
• Medical Equipment: Sterilization, diagnostic vacuum systems
• Materials Science: Thin-film deposition, surface analysis

Example Scenarios

Scenario 1: Electron Microscopy Lab

A research institute required a clean, vibration-free vacuum system for TEM sample preparation. The mobile pump truck achieved 1×10⁻⁷ Pa in under 2 hours, with no oil contamination and minimal vibration, improving image clarity and sample integrity.

Scenario 2: Semiconductor Coating Line

A fabrication plant used the system for optical coating. The high pumping speed reduced cycle time by 40%, and the oil-free design eliminated film defects, saving over $50,000 annually in maintenance and rework.

Technical Specifications

FF160/700F Molecular Pump

TXSL-36 Scroll Pump

System Integration

Actionable Tips for Optimizing Performance

• Ensure cooling water flow ≥1 L/min to prevent molecular pump overheating.
• Use the automated sequence for consistent roughing-to-high-vacuum transitions.
• Regularly check vacuum seals and replace gaskets to maintain leak rate ≤1×10⁻⁹ mbar·L/s.
• Keep the system on a stable, level surface to minimize vibration.

FAQ

1. What is the ultimate vacuum? Down to 6×10⁻⁸ Pa with CF flange.
2. Is the system oil-free? Yes, both the molecular pump and scroll pump are oil-free.
3. How mobile is the unit? Very mobile—weighs ~80 kg total, with swivel wheels and push force ≤50 N.
4. What industries is it suited for? Research, semiconductor, aerospace, medical, and materials science.
5. What is the pumping speed? 700 L/s for nitrogen, 36 m³/h for the scroll pump.
6. Is training provided? Yes, on-site installation, debugging, and operator training are included.
7. What is the warranty? Molecular pump: 2 years; scroll pump: 1.5 years; integrated system: 1 year.

Conclusion

The FF160/700F+TXSL-36 UHV mobile pump truck offers a high-performance, clean, and flexible vacuum solution for demanding applications. With its advanced pumping technology, robust integration, and user-friendly design, it is an ideal choice for labs and production facilities requiring reliable ultra-high vacuum performance.