Turbo Molecular Vacuum Pump

TXFB-80C Integrated Turbomolecular Vacuum Pump 80 L/s High Vacuum System

The TXFB-80C is a high-performance, integrated turbomolecular vacuum pump designed for small-chamber applications. It combines a high-speed turbo pump with an intelligent controller in a compact, maintenance-free unit. With an 80 L/s pumping speed and flexible installation options, it provides a clean, reliable, and cost-effective vacuum solution for research, semiconductor, and optical coating industries.

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Product Details

The TXFB-80C Integrated Turbomolecular Vacuum Pump is a high-vacuum, compact unit independently developed by Xiamen Taixing Mechatronics. It integrates the turbomolecular vacuum pump body, an intelligent drive controller, and the foreline interface into a single, streamlined device. Specifically designed for small to medium-sized chambers, it provides a fast, clean, high-vacuum solution with a high-speed turbine structure and precision dynamic balancing.

Core Features & Advantages

Integrated Design The pump body and drive controller are unified, eliminating external controllers and complex wiring. It is a "plug-and-play" solution that saves significant installation space.

High Vacuum Performance With a nitrogen pumping speed of 80 L/s and an ultimate pressure of 2×10⁻⁶ Pa, it ensures a rapid transition to an oil-free, ultra-clean vacuum environment.

Stable High-Speed Operation Utilizing high-strength alloy rotors and precision dynamic balancing, the pump operates at speeds up to 60,000 rpm with minimal vibration and noise (≤65 dB).

Intelligent Safety Control The built-in MCU provides multi-layer protection against over-current, over-voltage, over-heating, and phase loss, featuring self-diagnosis and status display.

Maintenance-Free Longevity Equipped with imported high-precision ceramic bearings and grease lubrication, it requires no oil changes and offers a service life exceeding 40,000 hours.

Flexible Installation Supports installation at any angle (horizontal, vertical, or tilted) and uses standard DN63 ISO-K/CF63 flanges to adapt to various high vacuum systems.

Technical Specifications

Parameter Item	TXFB-80C Details
Inlet Flange	CF63 / ISO-K63
Exhaust Flange	KF16
Pumping Speed (N₂)	80 L/S
Compression Ratio (N₂)	＞1×10⁸
Compression Ratio (H₂)	＞1×10³
Ultimate Pressure	2×10⁻⁶ Pa
Motor Speed	60,000 rpm
Bearing Type	Composite Permanent Magnet / Ceramic
Vibration Value	≤0.1μm
Start-up Time	＜2 min
Recommended Forepump	0.5 - 2 L/S (Rotary Vane or dry pumps)
Cooling Method	Water Cooling / Air Cooling
Installation Direction	Any Angle
Weight	Approx. 2.5 Kg - 4.7 Kg (Spec dependent)
Input Voltage / Power	24 VDC / 80W (Peak 100W)
Control Interface	RS485

Application Fields

The TXFB-80C is the ideal core component for various precision industries:

Scientific Research: Mass spectrometers, SEM, TEM, and surface analysis equipment.
Semiconductor: Small-scale vacuum coating, ion implantation, and electronic component drying.
Optical Coating: PVD equipment, lens coating, and vacuum sputtering.
Industrial Precision: Vacuum leak detection, heat treatment, and vacuum pump accessories testing.

Frequently Asked Questions (FAQ)

1. Does it require a backing pump?

Yes, a backing pump (forepump) with a speed of 4-8 m³/h is recommended to achieve the necessary fore-vacuum for the molecular pump to start safely.

2. Can it run continuously for 24 hours?

Absolutely. The TXFB-80C is designed for industrial-grade continuous operation, provided there is adequate cooling (air or water).

3. What is the maintenance cycle?

Under clean working conditions, it is virtually maintenance-free. We recommend a bearing inspection every 12 months, though the grease is designed for long-term stability.

4. Can it handle corrosive gases?

It is not suitable for highly corrosive or halogenated gases. For mildly corrosive applications, please consult us regarding specialized protective measures.

Conclusion: The TXFB-80C Integrated Turbomolecular Vacuum Pump is suitable for laboratory researchers, semiconductor manufacturers, and optical coating facilities. The core advantage is its highly integrated, compact design combined with maintenance-free ceramic bearings and superior pumping stability.

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