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Turbo Molecular Vacuum Pump
SplitFlow 80 Neo Model Selection Guide

SplitFlow 80 Neo Model Selection Guide

Compare 3 SplitFlow 80 Neo models: PMP73000210/00510/00110, including DN 63 CF-F, CF-F with rotated venting, DN 63 ISO-K flange options.

SplitFlow 80 Neo 3 Models Selection Guide

 

The SplitFlow 80 Neo offers 3 main models corresponding to different connection specifications and interface configurations. This article details the differences, applicable scenarios, and selection methods for each model.

 

3 Models Overview

 

Pfeiffer P/N

Busch P/N

Description

Connection

PMP73000210

2000091715

SplitFlow 80 Neo TC 80, DN 63 CF-F

DN 63 CF-F

PMP73000510

2000208161

SplitFlow 80 Neo TC 80, DN 63 CF-F w/ turned venting

DN 63 CF-F (with rotated venting)

PMP73000110

2000103707

SplitFlow 80 Neo TC 80, DN 63 ISO-K

DN 63 ISO-K

 

 

Detailed Model Description

 

Model 1: PMP73000210 (Standard CF-F)

 

· Pfeiffer P/N: PMP73000210

· Busch P/N: 2000091715

· Connection: DN 63 CF-F (ConFlat flange, all-metal seal)

· Applications: UHV applications, high-temperature baking equipment, semiconductor coating, surface analysis

· Features: All-metal seal excellent airtightness, suitable for 10^-9 Pa vacuum, can be baked above 200C

 

Model 2: PMP73000510 (CF-F with Rotated Venting)

 

· Pfeiffer P/N: PMP73000510

· Busch P/N: 2000208161

· Connection: DN 63 CF-F + rotated venting interface

· Applications: Compact equipment internal space, venting pipeline needs flexible direction adjustment, equipment layout with special venting direction requirements, retrofit projects

· Features: Rotated venting interface, venting direction can be adjusted arbitrarily, suitable for limited equipment internal space

 

Model 3: PMP73000110 (Standard ISO-K)

 

· Pfeiffer P/N: PMP73000110

· Busch P/N: 2000103707

· Connection: DN 63 ISO-K (ISO clamp quick-release flange)

· Applications: HV applications, laboratory equipment, mass spectrometer integration, helium leak detectors

· Features: ISO-K clamp quick-release structure, easy installation, suitable for conventional HV applications, cost-effective

 

Selection Decision Tree

 

```

Q: What is your vacuum level requirement?

├── 10^-9 Pa UHV -> CF-F series (PMP73000210 or 00510)

└── 10^-6 Pa HV -> ISO-K series (PMP73000110)

 

Q: Equipment internal pipeline layout?

├── Standard layout -> PMP73000210 (CF-F standard)

├── Venting needs flexible adjustment -> PMP73000510 (CF-F with rotated venting)

└── Quick release priority -> PMP73000110 (ISO-K)

 

Q: High temperature baking required?

├── Yes (>150C) -> CF-F series

└── No -> ISO-K also works

```

 

Application Reference

 

Application

Recommended Model

Reason

Mass Spectrometer Integration

PMP73000110

ISO-K convenient installation

Helium Leak Detector

PMP73000110

ISO-K compatible with mainstream detectors

Semiconductor Coating

PMP73000210

CF-F meets UHV

Surface Analysis

PMP73000210

CF-F meets baking needs

Equipment Retrofit

PMP73000510

Rotated venting flexible layout

Laboratory Applications

PMP73000110

Cost-effective

Compact Equipment

PMP73000510

Rotated venting saves space

 

 

Frequently Asked Questions

 

Q: Can the three models be interchanged?

A: Pumping performance is consistent, but inlet interfaces differ. Select based on equipment chamber flange specifications.

 

Q: What are the advantages of the rotated venting version (PMP73000510)?

A: 360-degree venting direction adjustment, especially suitable for equipment with limited internal space where venting pipelines need to avoid other components.

 

Q: Wrong model selected, can it be exchanged?

A: You can contact Pfeiffer factory or us to consult, but we recommend carefully checking equipment flange specifications before purchasing.

 

Conclusion

 

The SplitFlow 80 Neo three models cover various application scenarios from high vacuum to ultra-high vacuum, from standard layout to compact space. Selection mainly considers three factors: vacuum level requirement, inlet flange specification, venting layout needs. Clarify these three points, and you can quickly select the right model.

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