TX400 High Speed Helium Leak Detector with Dual Valve System for Semiconductor Industry

The TX400 Dual Valve Body Trolley-Type Large Pumping Speed Helium Mass Spectrometer Leak Detector is a flagship diagnostic instrument engineered specifically for high-end sectors such as vacuum industrial processing and semiconductor manufacturing. Featuring a specialized dual-valve design and an integrated mobile trolley structure, this device combines the helium tracer principle with 180° non-homogeneous magnetic deflection mass spectrometry. It is fully compliant with dry helium detection standards for high-purity industries. Equipped with a dedicated gas circuit auxiliary system, the TX400 supports flexible multi-pump configurations to achieve massive pumping speeds and ultra-precise leak detection, making it the core choice for environments with stringent cleanliness and speed requirements.

Core Features & Advantages

• Ultra-High Detection Precision: Achieves a minimum detectable leak rate of 5.0E-13 Pa·m³/s in vacuum mode and ≤5.0E-9 Pa·m³/s in sniffing mode, capturing even the most microscopic leak signals.
• Professional Dual-Valve Design: Specifically tailored for semiconductor and vacuum industry standards, ensuring a dry, contamination-free detection process suitable for high-cleanliness industrial vacuum systems.
• High Pumping Speed & Rapid Response: Features a dedicated auxiliary pumping gas circuit. With a startup time of ≤3 min and a response time of ≤0.5s, it significantly optimizes detection cycles.
• Mobile Trolley Integration: The robust trolley structure balances stability with mobility, allowing for rapid deployment across workshops and engineering sites to meet diverse on-site testing equipment needs.
• Multi-Gas Versatility: Capable of accurately detecting He4, He3, and H₂, covering standard helium testing, isotope detection, and hydrogen tracer leak hunting.
• Dual Remote Operation: Supports 100m wireless remote control and 50m Bluetooth APP control, breaking spatial constraints for large-scale equipment or hazardous environments.
• Strong Anti-Interference: Built-in inlet and internal calculation functions resist high background helium interference, ensuring reliable results in complex industrial environments.
• Global Compatibility: Supports Chinese, English, and Russian languages with four switchable measurement units and RS232/IO interfaces for seamless automated data integration.

Technical Specifications

Primary Application Fields

The TX400 is designed for high-stakes environments where precision is non-negotiable:

1. Semiconductor & Battery Manufacturing: Meets dry helium standards for production equipment and battery seals, ensuring zero contamination.
2. Pressure Vessels & Pipelines: Detects seals in high-pressure industrial piping to mitigate safety risks.
3. Vacuum Coating Industry: Provides large pumping speed for coating systems, ensuring product uniformity by preventing leaks.
4. High-Cleanliness Labs: Ideal for advanced laboratory vacuum systems requiring strict environmental integrity.
5. Aerospace & Precision Instruments: Supports rigorous testing for aerospace components where reliability is critical.

Why Choose the TX400?

The TX400 stands out because it perfectly fuses a professional dual-valve design with massive pumping performance. It is the benchmark for high-end industrial leak detection. Whether you are dealing with the high-cleanliness requirements of semiconductor fabs or the high-volume demands of vacuum coating lines, the TX400 provides an efficient, reliable, and professional solution. Its dual remote control and anti-interference capabilities ensure that operators can work safely and accurately in any scenario.

Frequently Asked Questions (FAQ)

1. What is the primary advantage of the dual-valve design?

It is specifically designed to meet semiconductor industry standards, ensuring that the detection process remains "dry" and free from oil or particulate contamination, which is vital for maintaining product yield.

2. Can the pumping speed be customized?

Yes. The TX400 supports various configurations of molecular pumps, dry pumps, and oil pumps (such as Iwata or Agilent models) to maximize pumping speed based on your specific volume requirements.

3. How do I choose between Vacuum and Sniffing modes?

Vacuum mode offers the highest precision for sealed components and systems. Sniffing mode is used for large equipment or on-site maintenance where creating a vacuum is not feasible.

4. Is the device difficult to maintain?

Not at all. The modular design simplifies maintenance, and the dual yttria-coated iridium filaments offer a long service life, reducing the overall cost of ownership.