Helium leak detector

TX400 Dual Valve Helium Mass Spectrometer Leak Detector for Semiconductor

TX400 Dual Valve Helium Mass Spectrometer Leak Detector for Semiconductor

The TX400 is a high-performance, cart-mounted helium mass spectrometer leak detector designed for high-end industrial applications. Featuring a professional dual-valve architecture, it ensures contamination-free testing for semiconductor and vacuum coating industries. With ultra-high sensitivity, flexible multi-pump configurations, and dual remote control capabilities, the TX400 provides reliable, efficient, and precise leak detection in even the most demanding environments.

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Product Details

The TX400 dual-valve cart-mounted high-pumping-speed helium mass spectrometer leak detector is a flagship testing device specially developed for high-end fields such as the vacuum industry and semiconductor manufacturing. Adopting a dedicated dual-valve design and cart-mounted integrated structure, it combines the helium tracer principle with 180° non-uniform magnetic deflection mass spectrometry technology, complying with dry helium leak detection industry standards. Equipped with a dedicated auxiliary pumping gas system and supporting flexible multi-pump configuration, the unit delivers high pumping speed and ultra-precise leak detection.

Core Features

Ultra-high detection precision Minimum detectable leak rate for He4: 5.0×10⁻¹³ Pa·m³/s (vacuum mode). Detection limit down to 1.0×10⁻¹² mbar·l/s, accurately capturing micro-leak signals.

Professional dual-valve design Complies with strict standards for high-cleanliness working conditions, ensuring contamination-free testing in high-end industries.

High pumping speed & Efficient response Dedicated auxiliary pumping gas circuit + flexible multi-pump configuration. Start-up time ≤3 min, response time ≤0.5 s.

Cart-mounted for flexible movement Integrated cart structure ensures stability and mobility for fast deployment in workshops and engineering sites.

Multi-gas detection compatibility Accurately detects He4, He3, and H₂, covering conventional helium leak detection and isotope detection.

Dual remote control 100-meter wireless remote control + 50-meter Bluetooth APP dual control, breaking space limits for large equipment.

Performance Parameter Table

Technical Index	Parameter Value
Minimum Detectable Leak Rate (He4)	5.0E-13 Pa·m³/s (Vacuum); ≤5.0E-9 Pa·m³/s (Sniffing)
Detection Limit	1.0E-12 mbar·l/s
Response Time	≤0.5 s
Start-up Time	≤3 min
Turbomolecular Pumping Speed (He)	2.5 L/s (Hicube 80); 8 L/s (Iwata 500C / Agilent TS600)
Backing Pump Pumping Speed	Dry pump: 8-30 m³/h; Oil pump: 6 L/s (BAOSI RV24 etc.)
Detectable Gases	He4 / He3 / H2
Measurement Units	Pa·m³/s, mbar·l/s, Torr·l/s, ppm
Ion Source	Yttrium Iridium Oxide Filament (2 pcs)
Mass Spectrometry Chamber	180° Non-Uniform Magnetic Deflection
Communication Interface	RS232/IO
Dimensions / Weight	974 mm × 550 mm × 1026 mm / Approx. 115 Kg

[TX400 Mobile Helium Leak Detector Visual Representation]

Integrated Cart Design with High-Performance Pumping System

Application Fields

Semiconductor & Battery Manufacturing: Provides high-precision leak detection for production equipment and battery sealing components.
Pressure Vessels & Piping: Performs seal testing on high-pressure vessels and industrial pipelines to eliminate leakage risks.
Vacuum coating equipment: Delivers high-pumping-speed precision leak detection for coating systems to ensure uniform quality.
High-Cleanliness Vacuum Equipment: Tests sealing for high-end laboratory vacuum systems and industrial high-cleanliness equipment.

Why Choose the TX400?

The TX400 is a core device designed for high-end industrial leak detection. Its core strength lies in the perfect integration of professional dual-valve architecture and high-pumping-speed performance. As a leading helium mass spectrometer leak detector, it meets dry helium leak detection standards for semiconductors and features a high-cleanliness design to ensure contamination-free testing. Whether for high cleanliness in semiconductor manufacturing or high pumping speed in vacuum coating, the TX400 provides highly accurate, efficient, and reliable professional solutions.

FAQ

What are the advantages of the dual-valve design?

Specially designed for the vacuum industry, it complies with dry helium leak detection standards, supporting high-cleanliness leak detection and avoiding contamination during testing.

Is pumping speed adjustable?

Yes. Turbomolecular, dry, and oil pumps are available in multiple specifications, allowing on-demand matching to maximize pumping speed for various high-flow scenarios.

How to choose between Vacuum and Sniffing modes?

Vacuum mode offers higher precision for sealed components, while Sniffing mode is ideal for large equipment and on-site maintenance where vacuum pumping isn't feasible.

Conclusion：TX400 Dual-Valve Cart-Mounted High-Pumping-Speed Helium Mass Spectrometer Leak Detector Suitable for high-end industrial fields such as semiconductor manufacturing, vacuum coating, and pressure vessel testing, The core advantage is its professional dual-valve architecture combined with ultra-high pumping speed and 5.0×10⁻¹³ Pa·m³/s detection precision。

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