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Turbo pump
TVPS Oil free Scroll Vacuum Pump
TVPS Oil free Scroll Vacuum Pump
TVPS Oil free Scroll Vacuum Pump
TVPS Oil free Scroll Vacuum Pump
TVPS Oil free Scroll Vacuum Pump
TVPS Oil free Scroll Vacuum Pump
TVPS Oil free Scroll Vacuum Pump
TVPS Oil free Scroll Vacuum Pump

TVPS Oil free Scroll Vacuum Pump

TVPS系列无油涡旋真空泵,又称涡旋泵、干式涡旋泵、无油涡旋泵、无油涡旋泵、干式涡旋真空泵、无油涡旋真空泵,完美应用于半导体行业、光电、材料、医疗、能源、航空航天、分析仪器和真空系统,具有结构紧凑、体积小、重量轻、振动小、噪音低、能耗低、 适用于全球供电,一键启动,可在大气压和真空之间频繁启动和停止。  
  • Item NO :

    TVPS75 TVPS150 TVPS300 TVPS500 TVPS900

Operating principle

TVPS oil free scroll vacuum pump is constructed with pump head assembly, crank pin assembly, bracket assembly, air flush assembly, and exhaust valve assembly. Two spiral cylinders, one offset and orbiting against the other fixed with an offset of 180° to form several crescent-shaped pockets of differing sizes. By means of an eccentric drive, the orbiting scroll is made to orbit about the fixed scroll, reducing the volume of the pockets and compressing gas from outside towards the inside thereby pumping the gas from vacuum chamber.

Features and Benefits

100% no oil clean vacuum

No oil back-diffusion, no oil mist exhaust, provide clean vacuum environment  

Wide product lineup

Pumping speed covers3~60m3/h, limited vacuum level 1~8 Pa

Suitable for all type of power supply around the world

110/220/380/460v, 50/60Hz for choose

Low vibration, low noise

57~63 dB(A), smooth operation

High efficiency, ease of maintenance

No water cooled, no oil lubricated, no daily maintenance

 

Applications

Semiconductor industry

Vacuum sputtering machine.

IC plasma cleaning machine.

IC plasma polishing machine.

IC packaging machine.

IC transmission chamber.

Photoelectric industry

LED vacuum annealing furnace.

Load lock/transfer chambers.

Glove box.

LED packaging machine.

Liquid crystal injection and packaging.

Material industry

Vacuum annealing furnace.

Vacuum diffusion oven.

3D metal printing.

Single crystal growth furnace.

Microwave cleaning and microwave drying machine.

E-beam/Laser melting.

Vacuum degassing. Vacuum gas substitution.

Food and drug industry

Freezing dry. Vacuum storage.

Medical equipment

Low temperature plasma sterilizer.

Vacuum storage.

Dental equipment.

Energy industry

SF 6 Gas recovery machine.

Lithium battery drying and packaging machine.

Analyzing instrument and device

Spectroscopy/scanning electron microscopy

Space environment simulation machine

Helium Leak detector

Mass spectrometer

Cryopump regeneration

Accelerators / synchrotrons

Vacuum equipment

Oil free ultrahigh vacuum unit

Oil free vacuum unit

 

specification:

Model

TVPS75

TVPS150

TVPS300

TVPS500

TVPS900

Pumping Speed

50Hz

l/s

1.0

2.6

4.4

6.7

11.6

l/min

60.0

156.0

264.0

402.0

693.0

m3/h

3.6

9.4

15.8

24.0

41.6

cfm

2.2

5.7

8.8

14.7

24.6

60Hz

l/s

1.2

3.1

5.3

8.1

13.9

l/min

72.0

187.0

317.0

482.0

831.6

m3/h

4.2

11.1

18.9

28.8

50.0

cfm

2.4

6.8

10.6

17.6

30.0

Ultimate Pressure

Pa

≤15

≤10

≤8

≤5

≤200

mbar

≤1.5*10-1

≤1.0*10-1

≤8.0*10-2

≤5.0*10-2

≤2.0

Torr

≤1.1*10-1

≤7.5*10-2

≤6.0*10-2

≤3.7*10-2

≤1.5

psi

≤2.2*10-3

≤1.5*10-3

≤1.2*10-3

≤7.5*10-4

≤2.9*10-2

Noise Level

dB(A)

≤61

Leakage

Pa·l/s

1*10-7

Max. Inlet/Exhaust Pressure

MPa

0.1 / 0.13

Ambient Operation Temp.

41104

Cooling Type

 

Air cooled

Inlet/Exhaust Flange

 

KF25/KF16

KF40/KF16

Motor 1 phase

Power

kW

0.55

0.55

0.55

---

---

Voltage

V

110115 (60Hz)200230 (50Hz

---

---

Speed

rpm

1425 (50Hz)1725 (60Hz)

---

---

Plug

 

North America, Europe, UK/Ireland, India

---

---

Motor 3 phase

Power

kW

0.55

0.55

0.55

0.75

1.5

Voltage

V

200230 or 380415 (50Hz) 200230 or 460 (60Hz)

Speed

rpm

1425 (50Hz)1725 (60Hz)

Dimensions

1 phase

mm

505*265*275

510*265*275

535*320*305

---

---

3 phase

mm

505*265*275

510*265*275

535*320*305

590*320*345

590*320*345

Net Weight

1 phase

kg

21

22

32

---

---

3 phase

kg

20

21

27

38

41

 

 

Performance curve:

 

  size:

 

 

A

B

C

D

E

F

G

H

K

L

M

N

d1

d2

TVPS75

505

265

275

225

215

120

125

160

80

65

200

250

KF25

KF16

TVPS150

510

265

275

225

215

120

135

145

80

70

155

250

KF25

KF16

TVPS300

535

320

305

255

230

160

140

165

95

85

200

270

KF25

KF16

TVPS500

590

320

345

300

250

165

125

190

135

85

205

290

KF40

KF16

TVPS900

590

320

345

300

250

165

125

190

135

85

205

290

KF40

KF16

 

 

 

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