This guide explores TXSL scroll vacuum pumps' oil-free design, advanced technical specifications, and diverse applications in sensitive environments. Includes 10 critical FAQs about installation, maintenance, and performance optimization.
The TXSL Series represents cutting-edge scroll vacuum technology with complete oil-free operation, making it ideal for contamination-sensitive applications requiring ultra-high vacuum.
✔ Bellows isolation - Complete separation of compression chamber and bearings
✔ Intelligent control - Built-in controller for speed/pressure regulation
✔ Ultra-high vacuum - Achieves 0.007mbar ultimate pressure
✔ Quiet operation - As low as 53dB(A) noise level
✔ Water vapor handling - Special gas ballast for wet processes
Model |
TXSL10 |
TXSL15 |
TXSL36 |
Pumping Speed (m³/h) |
12.2 |
16.0 |
36.0 |
Ultimate Vacuum (mbar) |
0.007 |
0.01 |
0.01 |
Motor Power (W) |
400 |
400 |
1200 |
Voltage |
200-240V |
200-240V |
200-240V |
Noise Level (dB(A)) |
53 |
53 |
56 |
Connections |
KF25/KF25 |
KF25/KF25 |
KF40/KF25 |
Water Capacity (g/hr) |
136 |
268 |
270 |
Dimensions (mm) |
438×268×300 |
438×268×300 |
517×325×358 |
Weight (kg) |
26 |
27 |
47 |
Leading chip manufacturer achieved:
99.999% cleanroom compatibility
Zero hydrocarbon contamination
3-year maintenance-free operation
Performance highlights:
Stable 0.01mbar operating pressure
40% noise reduction vs competitors
Passed FDA GMP validation
Key results:
Handled 150g/hr water vapor load
Continuous 8000-hour operation
Reduced energy use by 35%
Only annual inspection of bellows and bearings - no oil changes needed.
Metal bellows completely separate compression chamber from motor bearings.
No - only non-corrosive, non-flammable gases as specified.
Provides speed regulation, current limiting, and pressure control.
Typically 30,000+ hours in normal operation.
Standard models are air-cooled only.
Gradual ramp-up via controller recommended for long life.
Yes, designed for 24/7 operation within temperature limits.
Built-in controller monitors pressure and power draw.
2 years standard, extendable to 3 years.
The TXSL Series oil-free scroll vacuum pumps deliver uncompromising clean vacuum performance for critical applications in semiconductor, medical and research environments. Their innovative bellows isolation and intelligent control set new standards for reliability and contamination-free operation.
For facilities requiring ultra-high vacuum without hydrocarbon risk, the TXSL offers the ideal solution. Contact our vacuum specialists today for application engineering support and system integration services.
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