Pfeiffer 420MZF016-010-m Motorized Linear Feedthrough DN16 CF

The Pfeiffer 420MZF016-010-m is a high-performance, original electric linear feedthrough featuring a DN 16 CF flange, precision-engineered by Pfeiffer Vacuum in Germany. This model is specifically designed for the most demanding ultra-high vacuum (UHV) environments, utilizing an integrated all-metal bellows sealing structure. With a standard 10 mm stroke and a powerful two-phase stepping motor drive, it provides micron-level positioning accuracy that is critical for modern scientific research and industrial applications. Whether you are managing high vacuum or slight positive pressure, this feedthrough ensures stable operation and exceptional sealing integrity. For professionals looking to maintain their systems, integrating high-quality vacuum repair parts is essential for long-term reliability.

Key Features

• Superior UHV Sealing Performance: The fully welded metal bellows structure eliminates the need for rubber wearing parts, allowing the unit to operate reliably under ultra-high vacuum levels of 1X10⁻⁹ hPa with an extremely low leak rate.
• High-precision Motorized Positioning: Driven by a specialized stepping motor, it achieves a displacement resolution of 0.1 μm and a repeat positioning accuracy of 3 μm, perfect for sophisticated experimental adjustments.
• Adaptable to High-temperature Bake-out: The innovative split design allows the chamber side to withstand bake-out temperatures up to 200 °C once the motor is removed. With the motor installed, it supports operating temperatures up to 70 °C.
• Compact Structure & Easy Installation: Utilizing the industry-standard DN 16 CF knife-edge flange and M4 screw fixings, it is easily integrated into vacuum chambers where space is at a premium.
• Stable Load-bearing Performance: It handles a maximum load torque of 0.2 N·m at the bellows and an axial thrust of up to 45 N, ensuring smooth movement without jamming.
• Reliable Drive & Easy Maintenance: The two-phase stepping motor can be disassembled independently, allowing for position locking and routine inspections without removing the entire feedthrough. This makes sourcing vacuum repair parts and performing maintenance much more efficient.
• Wide Pressure Range Compatibility: Works steadily from UHV conditions up to a slight positive pressure of 5×10² hPa.
• Long Service Life: The fatigue-resistant metal bellows ensure a friction-free sealing structure, significantly reducing failure rates and operation costs over time.

Technical Data

Application Fields

The Pfeiffer 420MZF016-010-m is a versatile component used across various high-tech sectors:

• Semiconductor & Optical Coating: Ideal for magnetron sputtering and PVD/CVD processes requiring precise adjustment of sample stages.
• Research & Analytical Instruments: Essential for sample transfer in scanning electron microscopes and mass spectrometers.
• UHV Experimental Platforms: Used by universities for physical and chemical vacuum experiments requiring precise workpiece displacement.
• Vacuum Heat Treatment: Compatible with small vacuum annealing and brazing furnaces that require high-temperature bake-out.
• Precision Vacuum Equipment: Acts as a core transmission component for leak detectors and specialized process equipment where high-quality vacuum repair parts are a priority.

Why Choose Pfeiffer 420MZF016-010-m?

Choosing this linear feedthrough means investing in German engineering excellence. The fully welded all-metal bellows design ensures that your system remains free from outgassing and leaks, even at 1×10⁻⁹ hPa. Its micron-level precision (0.1 μm resolution) is unmatched in the industry, providing the control needed for the most sensitive experiments. Furthermore, the split structure design simplifies maintenance, allowing users to service the motor without breaking the vacuum seal, which reduces downtime and the immediate need for complex vacuum repair parts during routine checks.

Frequently Asked Questions (FAQ)

1. Can this product be used in UHV systems?

Yes. The all-metal bellows sealing structure allows it to reach an ultimate vacuum of 1×10⁻⁹ hPa, making it a standard component for ultra-high vacuum systems.

2. Is it necessary to remove the motor for chamber bake-out?

For high-temperature bake-out up to 200 °C, the motor must be removed. If the motor remains installed, the temperature should not exceed 70 °C to prevent damage to the electronics.

3. What is the maximum allowable axial thrust?

The allowable axial thrust is ≤ 45 N. Exceeding this limit may cause permanent deformation of the bellows.

4. How to deal with displacement jamming?

Check if the operating temperature or load exceeds the rated specifications. If jamming persists, inspect the bellows for deformation. Always ensure you have access to genuine vacuum repair parts for any necessary replacements.