Core Features & Advantages

Oil-Free & Contamination-Free: By employing cryogenic principles, it eliminates oil vapor backflow, ensuring an ultra-clean vacuum environment essential for sensitive processes.

Extreme Vacuum Capability: Achieves ultimate pressures of 10⁻⁷ Pa and above, meeting the rigorous demands of high-end scientific research and industrial production.

Low Operational Costs: Unlike traditional systems, it does not require liquid helium. It operates using standard cooling media, significantly reducing long-term maintenance and running expenses.

Flexible Installation: Designed for simplicity, it can be installed in any orientation, allowing for seamless integration into diverse industrial vacuum systems.

Safety & Reliability: Features a fully sealed design with zero leakage risk, ensuring a long service life and operational safety.

Customizable Configurations: Available in "Baking Type" (achieving 10⁻⁹ Pa via high-temperature outer wall baking) and "Corrosion-Resistant Type" (featuring special internal coatings for harsh environments).

Broad Pumping Speed Range: Nitrogen pumping speeds range from 1,700 to 28,000 L/s, while Hydrogen speeds reach up to 43,000 L/s.

High Cooling Efficiency: Rapid cooldown times (90-240 minutes at 50Hz) enhance overall system throughput and efficiency.

Technical Performance Specifications

Model	Gas Type	P8	P10	P12	P16	P20	P22	P28	P30
Pumping Speed (L/s)	Nitrogen (N₂)	1,700	2,400	4,000	5,000	10,000	17,000	21,000	28,000
	Hydrogen (H₂)	2,700	3,700	6,000	11,000	18,000	25,000	39,000	43,000
	Argon (Ar)	1,400	2,000	3,300	4,200	8,400	14,000	19,000	23,000
	Water (H₂O)	4,000	6,900	9,500	16,000	29,000	39,000	57,000	70,000
Max Throughput (Pa·L/s)	Argon (Ar)	1.2×10³	1.2×10³	2.0×10³	1.6×10³	1.7×10³	4.1×10³	1.7×10³	2.7×10³
Max Throughput (Pa·L/s)	Hydrogen (H₂)	2.4×10²	1.5×10²	4.1×10²	4.5×10²	4.7×10²	1.3×10²	5.0×10²	8.6×10²
Capacity (Pa·L)	Argon (Ar)	1.0×10⁸	1.0×10⁸	2.1×10⁸	4.3×10⁸	5.8×10⁸	8.1×10⁸	5.8×10⁸	7.8×10⁸
Capacity (Pa·L)	Hydrogen (H₂)	1.0×10⁶	1.2×10⁶	1.0×10⁶	2.4×10⁶	4.6×10⁶	8.5×10⁶	6.0×10⁶	1.5×10⁶
Ultimate Pressure (Pa)		10⁻⁷	10⁻⁷	10⁻⁷	10⁻⁷	10⁻⁷	10⁻⁷	10⁻⁷	10⁻⁷
Helium Charge (MPa)		1.3±0.05	1.3±0.05	1.45±0.05	1.45±0.05	1.45±0.05	1.45±0.05	1.45±0.05	1.45±0.05
Cooldown Time (min)		100	112	100	120	160	165	180	240

Wide Range of Applications

The CRYO-P series is engineered to support advanced vacuum equipment across multiple high-tech sectors:

Evaporation Coating: Ensures high-purity environments for superior film quality and uniformity.

Semiconductor Fabrication: Ideal for wafer processing and lithography where cleanliness is non-negotiable.

Space Simulation: Replicates the vacuum of outer space for testing aerospace components and materials.

Ion Implantation: Provides stable high vacuum to ensure precise ion beam control.

Molecular Beam Epitaxy (MBE): Supports the growth of ultra-thin films with atomic precision.

Surface Analysis: Creates interference-free environments for XPS, AES, and other analytical techniques.

High Energy Physics: Used in particle accelerators and beamlines to minimize particle scattering.

Why Choose the CRYO-P Series?

Choosing the CRYO-P series means investing in reliability and purity. Its core advantage lies in the oil-free pumping mechanism, which eliminates the risk of hydrocarbon contamination. With inlet flange sizes ranging from VG/ISO 200 to 750, these pumps are versatile enough for any scale. Whether you are upgrading an existing lab or designing a new production line, our reliable vacuum pump accessories and main units provide a "High Vacuum + High Cleanliness + High Reliability" solution.

Frequently Asked Questions (FAQ)

1. What is the primary benefit of the oil-free design?

It prevents oil vapor from contaminating the vacuum chamber, which is critical for semiconductor and optical coating processes where even microscopic impurities can cause product failure.

2. How do I choose between the Baking and Corrosion-Resistant types?

The Baking type is for users needing extreme vacuum (10⁻⁹ Pa) through outgassing reduction. The Corrosion-Resistant type is essential if your process involves aggressive gases that could damage standard internal components.

3. What are the maintenance requirements?

Maintenance focuses on monitoring the cooling system, ensuring seal integrity, and following standardized regeneration procedures to remove accumulated gases safely.

4. How long does the regeneration process take?

Regeneration time depends on the pump size and the volume of trapped gas, but the CRYO-P series is optimized for rapid thermal recovery to minimize downtime.

Product Summary

The CRYO-P Series Cryopump integrates oil-free cleanliness, extreme vacuum performance, and flexible customization into a single robust package. By utilizing cryogenic condensation to reach 10⁻⁷ Pa, it provides a stable and efficient solution for the most demanding industrial and scientific applications. From high-energy physics to precision semiconductor manufacturing, the CRYO-P series remains the benchmark for excellence in the vacuum industry.

Conclusion: The CRYO-P Series Cryopump is suitable for semiconductor manufacturers, vacuum coating facilities, and aerospace research labs. The core advantage is its oil-free ultra-high vacuum reaching 10⁻⁷ Pa and customizable configurations for corrosive or extreme-low pressure environments.

Data Source: Taixing Pump Technical Department, Updated on October 27, 2023.

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