In high-vacuum systems such as semiconductor coating, vacuum chambers, scientific research laboratories, and new energy equipment, continuous, stable, and precise vacuum monitoring is the core of ensuring process integrity and safety. The TaiXING TMPG400 Inverted Magnetron + Pirani composite vacuum gauge has become a mainstream solution for high-vacuum pressure monitoring, evaporation/sputtering system background pressure, and medium-to-high vacuum measurement and control. It offers a wide measurement range from 5×10⁻⁹ mbar to atmospheric pressure, featuring a filament-free design, easy integration, and low maintenance requirements.
[Image: TMPG400 Inverted Magnetron Pirani Vacuum Gauge -- Full range high precision measurement]
I. Core Product Advantages
The TMPG400 is engineered to provide reliable vacuum technology for demanding industrial environments. Its primary benefits include:
- Composite Measurement: Combines Pirani and Inverted Magnetron Cold Cathode technologies to cover the full range in a single unit.
- No Filament Risk: Eliminates the common issue of filament burnout found in traditional gauges, significantly increasing reliability.
- Excellent Ignition Performance: Rapid starting in high vacuum segments with stable readings.
- Compact Structure: Logarithmic analog output (0.6V/decade) allows for simple system integration.
- Durability: Bakeable up to 150°C and easy to clean, making it suitable for harsh vacuum conditions.
- Direct Replacement: Fully compatible with industry standards like the INFICON MPG400 for seamless upgrades.
II. Standard Installation Procedures
Proper installation is the first step toward accurate high-performance vacuum gauges operation. Follow these guidelines:
- Model and Interface Confirmation: Common specifications include DN25 ISO-KF (T351-010) and DN40 ISO-KF (T351-011). Ensure the FPM seals are clean and free of damage or oil.
- Positioning: The gauge can be installed at any angle. However, it should be kept away from strong vibrations, intense magnetic fields, and high-temperature sources.
- Protection: Avoid direct exposure to oil mist, dust, or corrosive gases. Install filters if necessary.
- Flange Sealing: Clean the flange faces and center brackets before tightening the clamps evenly to prevent leaks.
III. Electrical Wiring and Power Specifications
To ensure the longevity of your vacuum pump accessories, adhere to the following electrical standards:
- Power Supply: DC 15–30V; Ripple ≤1Vp-p; Power consumption ≤2W.
- Cable Requirements: Maximum length of 50m using 8×0.14mm² shielded cable.
- Signal Output: 0–10.5V analog voltage, logarithmic output at 0.6V per decade. The measurement range corresponds to 1.82V–8.6V.
- Grounding: Use an 8-pin FCC connector and ensure the shielded cable is grounded at one end to reduce electromagnetic interference.
IV. Operation and Automatic Range Switching
The TMPG400 features an intelligent self-test and automatic switching mechanism:
- Self-Test: A green LED indicates the high voltage is working correctly. If no power is present, output is <0.5V; if the Pirani filament is broken, output is >9.5V.
- Atmosphere to 10⁻⁶ mbar: The Pirani sensor operates with a response time of <10ms.
- Below 10⁻⁶ mbar: The system automatically switches to Inverted Magnetron Cold Cathode mode.
- Accuracy: Within 1×10⁻⁸ to 100 mbar, accuracy is approximately ±30% with a repeatability of ±5% (for N₂).
V. Technical Parameters Table
| Parameter |
Specification Details |
| Measurement Range |
5×10⁻⁹ mbar to Atmosphere |
| Interface Types |
DN25 ISO-KF / DN40 ISO-KF |
| Output Signal |
0 to +10.5 VDC (Logarithmic) |
| Supply Voltage |
15 to 30 VDC |
| Max. Bakeout Temp |
150°C (without electronics/magnetic shield) |
| Internal Volume |
Approx. 20 cm³ |
| Materials Exposed to Vacuum |
Stainless steel, Al₂O₃, FPM, Ni, Au, W |
VI. Maintenance and Calibration
Maintaining your vacuum measurement solutions is essential for long-term precision. While the TMPG400 is factory-calibrated, the Pirani segment can be adjusted if drift occurs due to contamination. The cold cathode segment is not adjustable but features an easy-to-clean design. Periodically wipe the flange and sensing area, and avoid long-term exposure to water vapor or oil steam to extend the sensor's lifespan.
[Image: TMPG400 Inverted Magnetron Pirani Vacuum Gauge -- Detailed view of flange and connector]
By following these standardized procedures, the TMPG400 will provide stable, accurate, and reliable service for your vacuum systems, serving as a cost-effective alternative to imported gauges for equipment upgrades and localization. For more information on high-quality components, visit https://www.taixingpump.com/.
Conclusion: TMPG400 is Suitable for semiconductor manufacturing, PVD/CVD coating, and research laboratories. The core advantage is its ultra-wide range 5×10⁻⁹ mbar to atmosphere measurement capability combined with a robust, filament-free inverted magnetron design.