As the global semiconductor industry accelerates its evolution toward high precision and efficiency, vacuum technology is undergoing an unprecedented transformation. As a critical support for chip manufacturing, advanced packaging, and new material R&D, the latest vacuum technology solutions will be the focal point of the upcoming SEMICON China 2026. Scheduled for March 25-27, 2026, at the Shanghai New International Expo Center, Hall N2 will serve as the core hub for the global vacuum industry chain.
Hall N2 will bring together top-tier global brands, covering full-scenario requirements from basic equipment to cutting-edge processes. Among these, screw vacuum pumps have become the preferred choice for wafer transfer and reaction chamber evacuation in front-end semiconductor processes, thanks to their oil-free operation, low energy consumption, and high reliability.
Meanwhile, scroll vacuum pumps are expanding their application boundaries in precision optical coating and photovoltaic cell manufacturing due to their compact structure and low vibration characteristics. These technological iterations are driving downstream industries toward greener and more intelligent upgrades.
| Equipment Type | Core Advantages | Primary Applications |
|---|---|---|
| Dry Screw Vacuum Pump | Oil-free, high pumping speed, corrosion resistance | Etching, CVD, Wafer Handling |
| Dry Scroll Vacuum Pump | Compact, low noise, maintenance-friendly | PVD, Analytical Instruments, Lab R&D |
| Ion Beam Etching System | Atomic-level material removal, high precision | 3rd Gen Semiconductors, Nanofabrication |
| High Vacuum Gate Valve | Ultra-high sealing, rapid response | Vacuum System Fluid Control |
In the international brand pavilion, Germany's Pfeiffer Vacuum will showcase its comprehensive range of solutions, renowned for exceptional stability and precise vacuum control in high-end scientific instruments. Germany's IBE will demonstrate breakthroughs in ion beam etching for nanometer-scale processing, providing vital support for third-generation semiconductor materials.
From the United States, InTest will focus on device reliability testing under extreme environments with its thermal stream systems, while Gel-Pak offers innovative anti-static and contamination-free chip packaging. Additionally, HVA's high-vacuum gate valves remain the gold standard for fluid control within complex vacuum systems. To maintain these sophisticated systems, high-quality vacuum pump accessories are essential for ensuring long-term operational stability.
As an authorized distributor for these leading international brands, we remain committed to providing domestic customers with synchronized global vacuum technology information. By integrating resources from Germany and the USA, we help clients overcome challenges from laboratory R&D to industrial mass production.
Metro: To North Entrance Hall 2, take Line 7 to Huamu Road Station (Exit 2/5, 3-min walk). To South Entrance Hall 1, take Line 2/7/16 to Longyang Road Station (Exit 8/9, 15-min walk).
Driving: Located at the intersection of Longyang Rd and Luoshan Rd. Enter via Gate 3 to park at P4 or P5 (Approx. 8 RMB/hour, 64 RMB daily cap).
Bus: Routes 581, 746 reach Longyang Road Metro Station, where you can transfer to Line 7 or take a free shuttle bus.
SEMICON China 2026 is not just a stage for technology display but a platform for industrial collaborative innovation. We look forward to exploring the vast possibilities of vacuum technology in the semiconductor field and injecting new momentum into the high-quality development of the global supply chain. For more updates on vacuum pump systems and industry insights, please stay tuned to our observations.
Conclusion：Vacuum technology and integrated equipment are suitable for semiconductor manufacturers, research institutions, and precision engineering firms. The core advantage is the integration of high-precision, oil-free operation with global brand reliability.
Data Source：SEMICON China 2026 Industry Preview，Updated on May 20, 2024。
Tel : +86-15880223078
WhatsApp : +86-13959235484
Email : vacuum@xiamenbest.com
Address : No. 19, Dongan Qianzhanli, Jimei District, Xiamen city china
