As the global semiconductor industry accelerates toward high precision and efficiency, vacuum technology—the critical backbone for chip manufacturing, advanced packaging, and new material R&D—is undergoing an unprecedented transformation. At the upcoming SEMICON China 2026 (March 25-27, Shanghai New International Expo Center), Hall N2 will serve as the core hub for the entire vacuum equipment supply chain, showcasing innovative high-performance vacuum pumps and integrated system solutions.
Hall N2 will bring together top-tier global vacuum technology brands to address full-scenario requirements, from basic equipment to cutting-edge processes. Among these, dry screw vacuum pumps have become the preferred choice for wafer transfer and reaction chamber evacuation in front-end semiconductor manufacturing due to their oil-free operation, low energy consumption, and high reliability. Meanwhile, scroll vacuum pumps continue to expand their application boundaries in precision optical coating and photovoltaic cell manufacturing, thanks to their compact structure and low vibration levels. The iteration of these industrial vacuum systems is driving downstream industries toward greener and more intelligent upgrades.
| Feature | Screw Vacuum Pump | Scroll Vacuum Pump |
|---|---|---|
| Working Principle | Twin screws rotating without contact | Nested spiral scrolls creating pockets |
| Vacuum Level | High to Medium Vacuum | Medium Vacuum |
| Cleanliness | 100% Oil-free (Dry) | 100% Oil-free (Dry) |
| Primary Application | CVD, PVD, Etching, Wafer Handling | Load locks, Mass Spectrometry, R&D |
| Maintenance Cycle | Long (Designed for 24/7 industrial use) | Moderate (Tip seal replacement required) |
In the international brand zone, Germany's Pfeiffer Vacuum will present its comprehensive range of vacuum solutions, renowned for their stability and precise control in high-end scientific instruments. Simultaneously, IBE (Germany) will demonstrate breakthroughs in ion beam etching for nano-level material processing. From the United States, InTest will focus on thermal stream systems for device reliability testing under extreme environments, while Gel-Pak offers innovative anti-static chip packaging. Furthermore, HVA's high-vacuum gate valves remain the core components for fluid control in sophisticated vacuum pump accessories markets.
As an authorized distributor for these leading international brands, we understand the pivotal role vacuum technology plays in industrial upgrading. Although we are not exhibiting this year, we remain committed to providing domestic customers with synchronized global technical insights and screw vacuum pump solutions. By integrating resources from Germany and the USA, we help clients overcome challenges from laboratory R&D to mass production.
SEMICON China 2026 is more than just a trade show; it is a platform for collaborative innovation. We look forward to exploring the future of vacuum technology in the semiconductor field with industry peers, injecting new momentum into the high-quality development of the global industrial chain.
Conclusion：Vacuum Technology Solutions Suitable for Semiconductor manufacturers and R&D laboratories, The core advantage is the integration of high-precision dry pumping technology and global brand reliability。
Data Source：SEMICON China Official & Industry Analysis，Updated on October 2023。
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